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    • 7. 发明授权
    • Effective constant doping in a graded compositional alloy
    • 在渐变组分合金中有效的恒定掺杂
    • US5753545A
    • 1998-05-19
    • US349097
    • 1994-12-01
    • Takyiu LiuChanh Nguyen
    • Takyiu LiuChanh Nguyen
    • H01L21/203
    • H01L21/02579H01L21/02461H01L21/02463H01L21/02507H01L21/0251H01L21/02543H01L21/02546H01L21/02576
    • Epitaxial growth of a chirped superlattice with constant dopings is achieved with minimal growth interruption time. This is done by doping only one of the two compositions during growth of its layer. For example, in the growth of a plurality of alternating layers of InP and GaInAs to form the superlattice, either the InP layers are doped with an n-type dopant, such as silicon, or the GaInAs layers are doped with a p-type dopant, such as beryllium. Alternatively, InP can equally be doped p-type (with beryllium) and GaInAs can be doped n-type (with silicon). In either case, the doping scheme described herein is easily done during molecular beam epitaxial growth by opening and closing the shutter of the dopant (silicon or beryllium) source cell at the appropriate times. To the electrical carriers, the doping superlattice scheme of the present invention presents a uniform doping without any need to change the doping cell temperature. This in turn allows improved controllability and minimal interface contamination.
    • 实现具有恒定掺杂的啁啾超晶格的外延生长,具有最小的生长中断时间。 这通过在其层的生长期间仅掺杂两种组合物中的一种来完成。 例如,在形成超晶格的多个交替层的InP和GaInAs的生长中,InP层中掺杂有诸如硅的n型掺杂剂,或者GaInAs层掺杂有p型掺杂剂 ,如铍。 或者,InP可以同样地掺杂p型(具有铍),GaInAs可以掺杂n型(具有硅)。 在任一情况下,本文所述的掺杂方案在分子束外延生长期间容易地在合适的时间打开和闭合掺杂剂(硅或铍)源电池的快门来完成。 对于电载体,本发明的掺杂超晶格方案呈现均匀掺杂,而不需要改变掺杂电池温度。 这反过来又提高了可控性和最小的界面污染。
    • 8. 发明授权
    • Parabolically graded base-collector double heterojunction bipolar
transistor
    • 抛物线分级的基极二极管双异质结双极晶体管
    • US5606185A
    • 1997-02-25
    • US349096
    • 1994-12-01
    • Chanh NguyenTakyiu Liu
    • Chanh NguyenTakyiu Liu
    • H01L29/737H01L31/0328H01L31/0336H01L31/072
    • H01L29/7371
    • A double heterojunction bipolar transistor (DHBT) is provided with a parabolic grade in bandgap at the base-collector junction. The parabolic grade in bandgap is close to parabolic in composition. The parabolic grade in bandgap is achieved by employing a chirped superlattice to mimic the parabolically varying alloy composition. Each period of the superlattice consists of one low-bandgap layer and one high-bandgap layer. The average composition in each period is determined by the relative thicknesses of these two layers. By varying the thickness ratio of these two layers approximately parabolically with (i) the distance from the base for a concave parabola and (ii) the distance from the collector for a convex parabola, the intended parabolic grade is achieved. The exact values may be computed numerically.
    • 双异质结双极晶体管(DHBT)在基极 - 集电极结上的带隙中具有抛物线等级。 带隙中的抛物线等级在组成上接近抛物线。 带隙中的抛物线级别通过采用啁啾超晶格来模拟抛物线变化的合金组成来实现。 超晶格的每个周期由一个低带隙层和一个高带隙层组成。 每个周期的平均组成由这两层的相对厚度决定。 通过以下方式改变这两层的厚度比:(i)与凹面抛物线的基底的距离,以及(ii)与凸型抛物线的收集器的距离,实现了预期的抛物线等级。 精确值可以数值计算。