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    • 1. 发明授权
    • Process for producing a tool insert for injection molding a microstructured part
    • 用于生产用于注射模塑微结构部件的工具刀片的方法
    • US07195862B2
    • 2007-03-27
    • US10720965
    • 2003-11-24
    • Max GmürThomas Fässler
    • Max GmürThomas Fässler
    • G03F7/00
    • B23P15/007B01L3/5027B29C45/2628B29C45/2673B29C45/372B29L2031/756B81C99/0085B81C99/009
    • Process for producing a tool insert for injection molding a microstructured part fabricated of a synthetic material, a metal or a ceramic material and which comprises an arrangement of microchannels and which further comprises an arrangement of through-going orifices extending in a substantially perpendicular manner with respect to the outer surface of the part. The process comprises the following steps: (1) microstructuring the front side of a first wafer by means of plasma etching to form the arrangement of microchannels, which are formed on the front side of the wafer, (2) removing the etching mask from the front side of the first wafer, (3) microstructuring the rear side of the first wafer by means of plasma etching to form the arrangement of through-going orifices which extend in a substantially perpendicular manner with respect to the front side of the first wafer, (4) removing the etching mask from the rear side of the first wafer, (5) bonding the rear side of the first wafer to a carrier substrate to form a master, (6) electrochemically depositing a metal layer on the front side of the first wafer and in the through-going orifices which are present therein, wherein the deposited metal layer achieves a depth which is greater than the depth of the microchannels on the front side of the first wafer, and (7) separating the metal layer from the master, wherein the separated metal layer can be used as a tool insert for injection molding a part and has integrated in the metal layer piercing punches, each such punch having a shape and dimensions defined by the shape and dimensions of a corresponding one of the through-going orifices provided in the first wafer.
    • 用于制造用于注射模制由合成材料,金属或陶瓷材料制成的微结构部件的工具插入件的方法,其包括微通道的布置,并且还包括以基本上垂直的方式延伸的贯穿孔的布置, 到零件的外表面。 该过程包括以下st
    • 4. 发明授权
    • Method for production of moulded bodies, in particular optical structures and use thereof
    • 成型体的制造方法,特别是光学结构及其用途
    • US07767131B2
    • 2010-08-03
    • US10487998
    • 2002-08-26
    • Tilo CallenbachMax GmürHeinz LüthiMartin Andreas BoppMichael PawlakMarkus Ehrat
    • Tilo CallenbachMax GmürHeinz LüthiMartin Andreas BoppMichael PawlakMarkus Ehrat
    • B29C45/16
    • G02B6/1221B29C33/38B29C33/424B29C45/0001B29C45/37B29C45/372B29C2045/7356B29D11/00009B29K2709/08G02B6/13G02B6/34G02B2006/12107Y10T428/12597Y10T428/315
    • The present invention relates to a method for manufacture a body from a thermoplastic plastic with a three-dimensionally structured surface, wherein molding is performed directly from a master made of glass coated with metal oxide, without deposition of further coatings on a surface of the master. The invention also relates to bodies manufactured with this method from a thermoplastic featuring a three-dimensionally structured surface, as well as to planar optical structures likewise manufactured with this method for generating evanescent-field measuring platforms and to a use thereof. The invention furthermore relates to a planar optical structure for generating an evanescent-field measuring platform, comprising a first essentially optical transparent, waveguiding layer (a) with refractive index n1 and a second essentially optical transparent layer (b) with refractive index n2, where n1>n2, in a case of an embodiment of a planar optical film waveguide, or comprising a metal layer (a′) and a second layer (b), in a case of an embodiment for generating a surface plasmon resonance, wherein the second layer (b) comprises a material from a group comprising cyclo-olefin polymers and cyclo-olefin copolymers.
    • 本发明涉及一种由具有三维结构表面的热塑性塑料制造主体的方法,其中模制由直接由金属氧化物涂覆的玻璃制成的母板进行,而不会在母板的表面上沉积更多的涂层 。 本发明还涉及由具有三维结构化表面的热塑性材料制成的主体以及同样利用这种用于产生ev逝场测量平台的方法制造的平面光学结构及其用途。 本发明还涉及一种用于产生ev逝场测量平台的平面光学结构,包括具有折射率n1的第一基本上光学透明的波导层(a)和具有折射率n2的第二基本光学透明层(b),其中 n1> n2,在平面光学膜波导的实施例的情况下,或者在用于产生表面等离子体共振的实施例的情况下,包括金属层(a')和第二层(b),其中第二 层(b)包括来自包含环烯烃聚合物和环烯烃共聚物的组的材料。
    • 6. 发明授权
    • Process for producing a tool insert for injection molding a part with two-stage microstructures
    • 用于制造用于注射成型具有两级微结构的部件的工具刀片的方法
    • US07056649B2
    • 2006-06-06
    • US10720402
    • 2003-11-24
    • Max Gmür
    • Max Gmür
    • G03C1/73H01L21/30
    • B29C33/424B23P15/007B29C33/44B81C99/009
    • A process for producing microstructured tool insert for injection molding a part, the part being fabricated of a synthetic material, a metal or a ceramic material and including an arrangement of microstructures which are formed on an outer surface of the part and have two different predetermined depths. The process comprises the following steps: (1) microstructuring the front side of the first wafer by means of plasma etching to form an arrangement of first microstructures, which are formed on the front side of the wafer and which have a first predetermined depth, (2) microstructuring the rear side of the first wafer by means of plasma etching to form an arrangement of the second microstructures which form cavities which have a first orifice on the rear side of the first wafer and issue into the first microstructures on the front side of the first wafer or have a second orifice on the front side of the first wafer, (3) bonding the rear side of the first wafer to a carrier substrate to form a master, (4) electrochemically depositing a metal layer on the front side of the first wafer and in the cavities which are present therein and are formed by the second microstructures, and (5) separating the metal layer from the master, wherein the separated metal layer can be used as a tool insert for injection molding a part.
    • 一种制造用于注射成型零件的微结构化刀具刀片的方法,该部件由合成材料,金属或陶瓷材料制成,并且包括形成在该零件的外表面上并具有两个不同预定深度的微结构的布置 。 该方法包括以下步骤:(1)通过等离子体蚀刻对第一晶片的前侧进行微结构,以形成第一微结构的布置,其形成在晶片的前侧并具有第一预定深度( 2)通过等离子体蚀刻来微结构化第一晶片的后侧以形成第二微结构的布置,该第二微结构形成空腔,第一微孔在第一晶片的后侧具有第一孔,并发射到第一晶片的正面的第一微结构 第一晶片或在第一晶片的正面上具有第二孔,(3)将第一晶片的后侧粘合到载体基板以形成母板,(4)在前面的电化学沉积金属层 第一晶片和存在于其中并由第二微结构形成的空腔中,以及(5)将金属层与母板分离,其中分离的金属层可用作刀具插入件 用于注射成型零件。
    • 7. 发明授权
    • Process for producing a tool insert for injection molding a part with single-stage microstructures
    • 用于生产用于注塑成型具有单级微结构的零件的工具刀片的工艺
    • US06764924B2
    • 2004-07-20
    • US10720852
    • 2003-11-24
    • Max Gmür
    • Max Gmür
    • H01L2130
    • B81C99/009B23P15/007B29C45/2673B29C45/372B29C2045/0094B29L2031/756
    • Process for producing a tool insert for injection molding a part which is produced from a synthetic material, a metal or a ceramic material and which comprises an arrangement of microstructures which are formed on an outer surface of the part and have a predetermined depth. The process comprises the following steps: photo-lithographically masking the front side of a first wafer with a first etching mask which corresponds to an arrangement of microstructures, microstructuring the first wafer by means of plasma etching the front side of the first wafer to form an arrangement of microstructures, the depth of which extends over the entire thickness of the first wafer, so that the microstructures form cavities which have an orifice on the front side and on the rear side of the first wafer respectively, removing the first etching mask from the front side of the first wafer, bonding the front side of the first wafer to a carrier substrate to form a master, electrochemically depositing a metal layer on the rear side of the first wafer and in the cavities which are present therein and are formed by the microstructures, and separating the metal layer from the master, wherein the separated metal layer can be used as a tool insert for injection molding a part.
    • 用于制造用于注射成型由工具材料,金属或陶瓷材料制成的零件的工具插入件的方法,其包括形成在所述部件的外表面上并具有预定深度的微结构的布置。 该方法包括以下步骤:用对应于微结构布置的第一蚀刻掩模对第一晶片的前侧进行光刻掩模,通过等离子体蚀刻第一晶片的前侧来对第一晶片进行微结构化,以形成第 微结构的布置,其深度在第一晶片的整个厚度上延伸,使得微结构分别形成在第一晶片的前侧和后侧具有孔口的空腔,从第一晶片的前侧和后侧去除第一蚀刻掩模 在第一晶片的前侧,将第一晶片的前侧接合到载体基板以形成母版,在第一晶片的后侧和存在于其中的空腔中电化学沉积金属层,并由 微结构,并将金属层与母板分开,其中分离的金属层可以用作用于注射成型零件的工具刀片。