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1. 发明授权

US09129353B2 Charged particle beam device, and image analysis device 有权
标题翻译：带电粒子束装置和图像分析装置
公开(公告)号：US09129353B2
公开(公告)日：2015-09-08
申请号：US13980481
申请日：2012-01-19
申请人： Masumi Shirai , Osamu Komuro
发明人： Masumi Shirai , Osamu Komuro
IPC分类号： G06K9/36 , G06T7/00 , H01J37/28
CPC分类号： G06T7/0004 , H01J37/28 , H01J2237/0216 , H01J2237/24528 , H01J2237/24578 , H01J2237/2803 , H01J2237/2809 , H01J2237/2817 , H01J2237/2826
摘要： In a scanning electron microscope, if a failure is caused to occur in a SEM image by the influence of a disturbance such as magnetic field or vibration inside and from outside the device, the cause is identified simply and accurately using this SEM image. There is provided a measurement technique whose measurement accuracy is not influenced by a roughness of SEM image pattern. A one-dimensional scanning is performed in a scanning-line direction (X direction) by setting the Y-direction scanning gain at zero at the time of acquiring the SEM image, and a two-dimensional image is created by arranging image information, which is obtained by the scanning, in a time-series manner in the Y direction. A shift-amount data on the two-dimensional image is acquired using a correlation function, and the magnetic field or vibration included within the SEM image is measured by a frequency analysis of the data.
摘要翻译：在扫描电子显微镜中，如果通过诸如磁场或设备内部和外部的振动的干扰的影响在SEM图像中发生故障，则使用该SEM图像简单且准确地识别原因。提供了测量精度不受SEM图像粗糙度影响的测量技术。通过在获取SEM图像时将Y方向扫描增益设定为零，在扫描线方向（X方向）上进行一维扫描，并且通过布置图像信息来创建二维图像，其中通过在Y方向上以时间序列方式进行扫描获得。使用相关函数获取关于二维图像的偏移量数据，并且通过数据的频率分析来测量包括在SEM图像内的磁场或振动。

2. 发明申请

US20130301954A1 CHARGED PARTICLE BEAM DEVICE, AND IMAGE ANALYSIS DEVICE 有权
标题翻译：充电颗粒光束装置和图像分析装置
公开(公告)号：US20130301954A1
公开(公告)日：2013-11-14
申请号：US13980481
申请日：2012-01-19
申请人： Masumi Shirai , Osamu Komuro
发明人： Masumi Shirai , Osamu Komuro
IPC分类号： G06T7/00
CPC分类号： G06T7/0004 , H01J37/28 , H01J2237/0216 , H01J2237/24528 , H01J2237/24578 , H01J2237/2803 , H01J2237/2809 , H01J2237/2817 , H01J2237/2826
摘要： In a scanning electron microscope, if a failure is caused to occur in a SEM image by the influence of a disturbance such as magnetic field or vibration inside and from outside the device, the cause is identified simply and accurately using this SEM image. There is provided a measurement technique whose measurement accuracy is not influenced by a roughness of SEM image pattern. A one-dimensional scanning is performed in a scanning-line direction (X direction) by setting the Y-direction scanning gain at zero at the time of acquiring the SEM image, and a two-dimensional image is created by arranging image information, which is obtained by the scanning, in a time-series manner in the Y direction. A shift-amount data on the two-dimensional image is acquired using a correlation function, and the magnetic field or vibration included within the SEM image is measured by a frequency analysis of the data.
摘要翻译：在扫描电子显微镜中，如果通过诸如磁场或设备内部和外部的振动的干扰的影响在SEM图像中发生故障，则使用该SEM图像简单且准确地识别原因。提供了测量精度不受SEM图像粗糙度影响的测量技术。通过在获取SEM图像时将Y方向扫描增益设定为零，在扫描线方向（X方向）上进行一维扫描，并且通过布置图像信息来创建二维图像，其中通过在Y方向上以时间序列方式进行扫描获得。使用相关函数获取关于二维图像的偏移量数据，并且通过数据的频率分析来测量包括在SEM图像内的磁场或振动。

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