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热词
    • 3. 发明授权
    • Apparatus for testing semiconductor device
    • 半导体器件测试装置
    • US06351834B1
    • 2002-02-26
    • US09407898
    • 1999-09-29
    • Michio MaekawaJunichi Hirase
    • Michio MaekawaJunichi Hirase
    • G11C2900
    • G11C29/56G01R31/31922G01R31/31926G01R31/31937
    • A plurality of testing units, each of which is applied to an input or output terminal of a device under test, are provided. An input pattern is supplied to a first testing unit that is applied to an input terminal, while expected patterns are supplied to second and third testing units that are applied to first and second output terminals, respectively. These testing units are operated in synchronism with a common clock signal. The second testing unit, which has received the expected pattern, communicates an evaluative result, indicating a point in time when the logical level of a voltage signal appearing at the first output terminal of the device under test matches with the expected pattern, to the third testing unit. And the third testing unit performs timing and functional tests on a signal appearing at the second output terminal with reference to this evaluative result.
    • 提供了多个测试单元,每个测试单元应用于被测设备的输入或输出端子。 将输入图案提供给施加到输入端子的第一测试单元,同时将预期图案分别提供给施加到第一和第二输出端子的第二和第三测试单元。 这些测试单元与公共时钟信号同步工作。 已经接收到预期模式的第二测试单元传达评估结果,指示出现在被测设备的第一输出端子处的电压信号的逻辑电平与预期模式相匹配的时间点到第三测试单元 测试单位。 并且第三测试单元参考该评估结果对出现在第二输出端的信号执行定时和功能测试。