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    • 4. 发明申请
    • DEVICE FOR REMOVING GENERATED WATER
    • 用于去除生成水的装置
    • US20120129061A1
    • 2012-05-24
    • US13388217
    • 2010-03-16
    • Masato NishikawaTakahiro Nakamura
    • Masato NishikawaTakahiro Nakamura
    • H01M8/06
    • H01M8/04291H01M8/04059H01M8/04074H01M8/04156H01M8/1007
    • Generated water generated from electrical equipment such as a fuel cell or the like is surely and quickly removed. A generated water removing device 10 has a diaphragm 14 that is disposed so as to face a generated water discharge face 11A of a fuel cell 11 through a predetermined first gap L1, has plural holes 13 for atomizing or vaporizing generated water and feeds generated water to the outside of the first gap L1 through the holes 13, and a heat pipe 17 that has a heat absorber 15 for absorbing heat generated in the fuel cell 11 and a heat radiator 16 disposed so as to face the diaphragm 14 through a predetermined second gap L2, and transfers heat absorbed by the heat absorber 15 to the heat radiator 16 to warm the generated water fed to the outside of the first gap through the holes 13.
    • 从燃料电池等电气设备产生的水可以被快速地除去。 生成的除水装置10具有通过规定的第一间隙L1与燃料电池11的生成排水面11A相对配置的隔膜14,具有用于使生成的水雾化或蒸发的多个孔13,并将生成的水供给到 通过孔13的第一间隙L1的外侧和具有用于吸收在燃料电池11中产生的热的吸热体15的热管17和通过预定的第二间隙设置成与隔膜14相对设置的散热器16 L2,将吸热器15吸收的热量传递给散热器16,以通过孔13加热供给到第一间隙的外部的生成水。
    • 9. 发明申请
    • Auxiliary for forming fine pattern and process for producing the same
    • 辅助形成精细图案及其制造方法
    • US20060211814A1
    • 2006-09-21
    • US10550110
    • 2004-03-18
    • Masato NishikawaKiyohisa Takahashi
    • Masato NishikawaKiyohisa Takahashi
    • C08L29/04
    • G03F7/40C08F8/28C08F8/30C08F8/44C08F2810/20C08F16/06
    • A modified polyvinyl alcohol (PVA) protected with a protecting group of the present invention is one wherein an amount of high-molecular weight body components of the modified polyvinyl alcohol having a weight-average molecular weight of 250,000 or more as determined by polyethylene glycol standards according to a gel permeation chromatography is 1000 ppm or less in the modified polyvinyl alcohol. The modified PVA is prepared by removing a metal ion and an acid from the modified PVA such as acetalized PVA with ion exchange treatment and then heat-treating at 80° C. or higher. An auxiliary for fine pattern formation of the present invention comprises the aforementioned modified PVA, a water-soluble crosslinking agent, and water or a mixed solvent of water and a water-soluble organic solvent. The auxiliary for fine pattern formation is applied over a resist pattern 3 and a coated layer 4 is formed thereon. Then the resist pattern 3 and the coated layer 4 are heated and thereby an acid is diffused from the resist pattern 3 to the coated layer 4. As a result, the coated layer in the vicinity of the resist pattern surface is crosslinked and cured by the diffused acid. The coated layer is developed to form a hole pattern having crosslinked and cured layer on the resist pattern, of which the hole size is less than a limit resolution of the wavelength of a light-exposure and which have no development defects.
    • 用本发明的保护基保护的改性聚乙烯醇(PVA)是其中通过聚乙二醇标准测定的改性聚乙烯醇的重均分子量为25万以上的高分子量体成分的量 根据凝胶渗透色谱在改性聚乙烯醇中为1000ppm以下。 通过离子交换处理从改性PVA如缩醛化PVA中除去金属离子和酸,然后在80℃或更高温度下进行热处理制备改性PVA。 本发明的精细图案形成用辅助剂包括上述改性PVA,水溶性交联剂,水或水和水溶性有机溶剂的混合溶剂。 在抗蚀剂图案3上施加用于精细图案形成的辅助件,并且在其上形成涂层4。 然后,抗蚀剂图案3和涂层4被加热,从而将酸从抗蚀剂图案3扩散到涂层4。 结果,抗蚀剂图形表面附近的涂层被扩散的酸交联和固化。 显影涂层以在抗蚀剂图案上形成具有交联和固化层的孔图案,其孔尺寸小于曝光波长的极限分辨率并且没有显影缺陷。