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    • 1. 发明授权
    • Method for manufacturing liquid discharge head
    • 液体排放头的制造方法
    • US08133662B2
    • 2012-03-13
    • US12721415
    • 2010-03-10
    • Makoto WatanabeYoshinori TagawaSatoshi IbeKazuhiro AsaiMasaki OhsumiMasataka Nagai
    • Makoto WatanabeYoshinori TagawaSatoshi IbeKazuhiro AsaiMasaki OhsumiMasataka Nagai
    • B41J2/16
    • B41J2/1603B41J2/1626B41J2/1631B41J2/1639B41J2/1645
    • A method for manufacturing a liquid discharge head that includes a flow path wall member which forms a wall of a flow path communicating with a discharge port for discharging a liquid and a substrate which forms the flow path in contact with the flow path wall member includes providing a first layer, which is made of a photosensitive resin on the substrate, for forming a pattern having a shape of the flow path, providing a second layer which is capable of absorbing light within a photosensitive wavelength range of the photosensitive resin and has a shape corresponding to the shape of the flow path, on the first layer so as to come into contact with the first layer, performing patterning of the first layer which includes exposure of the first layer with the light using the second layer as a mask, and forming the pattern from the first layer, providing a cover layer which is made of a photosensitive resin and serves as the flow path wall member so as to cover the second layer and the pattern, forming the discharge port on the cover layer by performing patterning of the cover layer which includes exposure of the cover layer with the light, and forming the flow path by removing the second layer and the pattern.
    • 一种液体排出头的制造方法,其特征在于,包括形成与排出液体的排出口连通的流路壁的流路壁部件和形成与流路壁部件接触的流路的基板, 第一层,其由基材上的感光树脂制成,用于形成具有流路形状的图案,提供能够吸收感光性树脂感光波长范围内的光的第二层,并具有形状 对应于流路的形状,在第一层上与第一层接触,使用第二层作为掩模进行包括第一层与光的曝光的第一层的图案化,以及形成 从第一层的图案,提供由感光树脂制成并用作流路壁构件以覆盖第二层的覆盖层和轻拍 通过进行覆盖层的图案化,包括覆盖层与光的曝光,并且通过去除第二层和图案形成流路,从而在覆盖层上形成排出口。
    • 4. 发明申请
    • METHOD FOR MANUFACTURING LIQUID DISCHARGE HEAD
    • 制造液体放电头的方法
    • US20100233630A1
    • 2010-09-16
    • US12721415
    • 2010-03-10
    • Makoto WatanabeYoshinori TagawaSatoshi IbeKazuhiro AsaiMasaki OhsumiMasataka Nagai
    • Makoto WatanabeYoshinori TagawaSatoshi IbeKazuhiro AsaiMasaki OhsumiMasataka Nagai
    • G03F7/20
    • B41J2/1603B41J2/1626B41J2/1631B41J2/1639B41J2/1645
    • A method for manufacturing a liquid discharge head that includes a flow path wall member which forms a wall of a flow path communicating with a discharge port for discharging a liquid and a substrate which forms the flow path in contact with the flow path wall member includes providing a first layer, which is made of a photosensitive resin on the substrate, for forming a pattern having a shape of the flow path, providing a second layer which is capable of absorbing light within a photosensitive wavelength range of the photosensitive resin and has a shape corresponding to the shape of the flow path, on the first layer so as to come into contact with the first layer, performing patterning of the first layer which includes exposure of the first layer with the light using the second layer as a mask, and forming the pattern from the first layer, providing a cover layer which is made of a photosensitive resin and serves as the flow path wall member so as to cover the second layer and the pattern, forming the discharge port on the cover layer by performing patterning of the cover layer which includes exposure of the cover layer with the light, and forming the flow path by removing the second layer and the pattern.
    • 一种液体排出头的制造方法,其特征在于,包括形成与排出液体的排出口连通的流路壁的流路壁部件和形成与流路壁部件接触的流路的基板, 第一层,其由基材上的感光树脂制成,用于形成具有流路形状的图案,提供能够吸收感光性树脂感光波长范围内的光的第二层,并具有形状 对应于流路的形状,在第一层上与第一层接触,使用第二层作为掩模进行包括第一层与光的曝光的第一层的图案化,以及形成 从第一层的图案,提供由感光树脂制成并用作流路壁构件以覆盖第二层的覆盖层和轻拍 通过进行覆盖层的图案化,包括覆盖层与光的曝光,并且通过去除第二层和图案形成流路,从而在覆盖层上形成排出口。