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1. 发明申请

US20120147919A1 SURFACE PROFILE INSPECTION DEVICE 失效
标题翻译：表面轮廓检查装置
公开(公告)号：US20120147919A1
公开(公告)日：2012-06-14
申请号：US13312044
申请日：2011-12-06
申请人： Masaru HISANAGA , Masataka TODA , Toshihiko YOSHIKAWA
发明人： Masaru HISANAGA , Masataka TODA , Toshihiko YOSHIKAWA
IPC分类号： H01S5/026
CPC分类号： H01S5/005 , G01B11/25 , H01S5/02248 , H01S5/4025
摘要： A surface profile inspection device producing a sheet of light propagating in a linear region forming a plane from a laser beam emitted from a laser light source and irradiating the sheet of light to an object to be measured, and including an image capturing unit capturing an image of the object to be measured and a configuration data generating unit extracting a light section line defined by an irradiation of the sheet of light from image data of the captured image and generating surface profile data of the object to be measured. The laser light source includes a semiconductor laser emitting a laser beam from a light emitting layer formed in a linear direction along a boarder of a p-n junction. An attitude of the semiconductor laser is set to arrange the linear direction to be unparallel to a spread direction of the sheet of light.
摘要翻译：一种表面轮廓检查装置，其产生在从激光光源发射的激光束形成平面的直线区域中传播的光束，并将光束照射到被测量物体，并且包括拍摄图像的图像捕获单元以及配置数据生成单元，从拍摄图像的图像数据中提取由照射光束而定义的光截面线，并生成被测量物体的表面轮廓数据。该激光源包括从p-n结的边缘沿着线性方向形成的发光层发射激光的半导体激光器。半导体激光器的姿态被设定为使线性方向与光束的扩展方向不平行。

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