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    • 2. 发明申请
    • SPECTRAL IMAGE ACQUIRING APPARATUS
    • 光谱图像采集设备
    • US20120105843A1
    • 2012-05-03
    • US13275572
    • 2011-10-18
    • Hideaki HIRAIMasanori KOBAYASHI
    • Hideaki HIRAIMasanori KOBAYASHI
    • G01J3/40
    • G01J3/2823G01J3/02G01J3/0208G01J3/0224G01J3/0229G01J3/0259G02B5/1814G02B5/20
    • A spectral image acquiring apparatus includes an optical filter on which light is incident; an image sensor including a two-dimensionally disposed pixel array for detecting the light via the optical filter; and a signal processing unit generating a difference-value image based on a detection signal from the image sensor. The optical filter includes a diffraction grating having a lattice pattern corresponding to one or more pixels on the image sensor. The signal processing unit calculates a difference value in an amount of received light between two adjacent pixels based on the detection signal from the image sensor, and generates the difference-value image based on the difference value. The difference value between the two adjacent pixels is varied depending on a difference in an interference point on the image sensor corresponding to a diffraction angle of the light that has passed through the diffraction grating.
    • 光谱图像获取装置包括光入射的滤光器; 图像传感器,包括用于经由所述滤光器检测所述光的二维布置的像素阵列; 以及信号处理单元,其基于来自图像传感器的检测信号生成差值图像。 光学滤波器包括具有对应于图像传感器上的一个或多个像素的格子图案的衍射光栅。 信号处理单元基于来自图像传感器的检测信号计算两个相邻像素之间的接收光量的差值,并基于差值生成差值图像。 两个相邻像素之间的差值取决于对应于已经通过衍射光栅的光的衍射角的图像传感器上的干涉点的差异。
    • 5. 发明申请
    • INSPECTION SYSTEM AND INSPECTION METHOD
    • 检查系统和检查方法
    • US20110242312A1
    • 2011-10-06
    • US13073130
    • 2011-03-28
    • Hirokazu SEKIKenji KOREMURAMakoto TORIZAWAMasanori KOBAYASHIToshiyuki TODOROKIHaruhiko KUSUNOSE
    • Hirokazu SEKIKenji KOREMURAMakoto TORIZAWAMasanori KOBAYASHIToshiyuki TODOROKIHaruhiko KUSUNOSE
    • G06K9/00H04N7/18
    • G01N21/9505G01N2021/8854G06T7/0004G06T2207/10004G06T2207/30148H01L22/12
    • According to the invention, the surface of the Sic substrate or the epitaxial layer formed on the Sic substrate using the optical apparatus including the differential interference optical system. The reflected light from the surface of the Sic substrate or the epitaxial layer is received by the line sensor (23), and the output of the line sensor is supplied to the processor (11). The processor comprises means for forming the differential interference contrast image of the surface of the Sic substrate. The differential interference contrast image of the surface of the Sic substrate is supplied to the defect detection means in order to detect the defects formed in the substrate. The image of the detected defect is supplied to the defect classification means (36) to classify the type of the defect based on the shape and luminance distribution of the defect image. The defect classification means comprise a first classifying means (50) for classifying the defect image having specific shape and a second classifying means (51) for classifying the defect image having a spot shaped dark image or the luminance distribution of a bright image portion and a dark image portion.
    • 根据本发明,使用包括差分干涉光学系统的光学装置的Sic衬底或在Sic衬底上形成的外延层的表面。 来自Sic衬底或外延层的表面的反射光被线传感器(23)接收,线传感器的输出被提供给处理器(11)。 处理器包括用于形成Sic衬底表面的微分干涉对比度图像的装置。 将Sic衬底的表面的微分干涉对比度图像提供给缺陷检测装置,以便检测在衬底中形成的缺陷。 检测到的缺陷的图像被提供给缺陷分类装置(36),以根据缺陷图像的形状和亮度分布对缺陷的类型进行分类。 缺陷分类装置包括用于分类具有特定形状的缺陷图像的第一分类装置(50)和用于对具有点形暗图像的缺陷图像或明亮图像部分的亮度分布进行分类的第二分类装置(51) 暗图像部分。