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    • 3. 发明授权
    • Reticle fabrication method
    • 标线制造方法
    • US06925629B2
    • 2005-08-02
    • US10652026
    • 2003-09-02
    • Takashi YoshimuraTakeshi Bashomatsu
    • Takashi YoshimuraTakeshi Bashomatsu
    • G03F1/68G03F1/84G03F7/20G06F17/50H01J37/302H01L21/027
    • G03F1/78G03F1/68G03F1/84H01J37/3023H01J2237/30455H01J2237/3175
    • CAD (Computer Aided Design) data which is reticle design data is input to first and second data conversion devices which respectively convert the CAD data to electron beam (EB) write data and inspection data. The EB write data and inspection data output are input to a data verification device to verify whether or not there is a data conversion error. If no data conversion error is detected by the data verification device, an EB writing device writes a pattern on an unwritten reticle with an electron beam based on the EB write data and develops the reticle, after which the fabricated developed reticle is inspected by a reticle inspection device. As a defect, such as a data conversion error contained in EB write data is detected before fabrication of a reticle, the reticle inspection process is simplified, the effective availability factors of the EB writing device and reticle inspection device and the time needed to fabricate a reticle is made shorter, thereby reducing the fabrication cost.
    • 将作为标线设计数据的CAD(计算机辅助设计)数据输入到分别将CAD数据转换为电子束(EB)写入数据和检查数据的第一和第二数据转换装置。 EB写入数据和检查数据输出被输入到数据验证装置,以验证是否存在数据转换错误。 如果数据验证装置没有检测到数据转换错误,则EB写装置基于EB写入数据将电子束写入具有电​​子束的未写入的掩模版上,并且形成掩模版,之后通过掩模版检查制作的显影掩模版 检查装置 作为缺陷,例如在制作掩模版之前检测到EB写入数据中包含的数据转换错误,简化了掩模检查过程,EB写入装置和掩模版检查装置的有效可用性因素以及制造 掩模版较短,从而降低制造成本。
    • 8. 发明授权
    • Station
    • US07969887B2
    • 2011-06-28
    • US10523120
    • 2004-03-04
    • Takashi YoshimuraToshihisa TodeSyozo Tamaki
    • Takashi YoshimuraToshihisa TodeSyozo Tamaki
    • H04J3/14H04L1/00H04L12/26H04L12/28H04L12/16
    • H04L47/32H04L47/10H04W4/12H04W28/14H04W88/184
    • With the object of eliminating congestion that has occurred in a station which can not prevent or eliminate the occurrence of congestion autonomously, the SMPP response time in output interfaces 21h-21k of a first PPG 21 are measured and when the time mta, which is m-times of the SMPP response time ta in the normal state, is exceeded, congestion is assumed to occur in an interconnected station of the first PPG 21 and the response to push transfer request in an input interface 21a is delayed. Further, changes in the filling ratio in a buffer memory 21b are monitored and when the filling ratio exceeds h %, a decision is made that congestion has occurred in the first PPG 21 and the response to the push transfer request in the input interface 21a is delayed.
    • 为了消除不能自发阻止或消除拥塞发生的站中发生的拥塞的目的,测量第一PPG 21的输出接口21h-21k中的SMPP响应时间,并且当m 在正常状态下的SMPP响应时间ta的时间t max被超过,假设在第一PPG 21的互连站中发生拥塞,并且在输入接口21a中对推送传送请求的响应被延迟。 此外,监视缓冲存储器21b中的填充率的变化,并且当填充率超过h%时,判定在第一PPG 21中发生拥塞并且在输入接口21a中对推送传送请求的响应是 延迟。
    • 10. 发明申请
    • Station
    • US20080130505A1
    • 2008-06-05
    • US10523120
    • 2004-03-04
    • Takashi YoshimuraToshihisa TodeSyozo Tamaki
    • Takashi YoshimuraToshihisa TodeSyozo Tamaki
    • G08C15/00
    • H04L47/32H04L47/10H04W4/12H04W28/14H04W88/184
    • With the object of eliminating congestion that has occurred in a station which can not prevent or eliminate the occurrence of congestion autonomously, the SMPP response time in output interfaces 21h-21k of a first PPG 21 are measured and when the time mta, which is m-times of the SMPP response time ta in the normal state, is exceeded, congestion is assumed to occur in an interconnected station of the first PPG 21 and the response to push transfer request in an input interface 21a is delayed. Further, changes in the filling ratio in a buffer memory 21b are monitored and when the filling ratio exceeds h %, a decision is made that congestion has occurred in the first PPG 21 and the response to the push transfer request in the input interface 21a is delayed.
    • 为了消除不能自发阻止或消除拥塞发生的站中发生的拥塞的目的,测量第一PPG 21的输出接口21h-21k中的SMPP响应时间,并且当时间mta 是在正常状态下的SMPP响应时间ta的m倍,被超过,假定在第一PPG 21的互连站中发生拥塞,并且在输入接口21a中的推送传送请求的响应被延迟。 此外,监视缓冲存储器21b中的填充率的变化,并且当填充率超过h%时,判定在第一PPG 21中发生拥塞以及在输入接口21中对推送传送请求的响应 a被推迟。