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1. 发明授权

US06605811B2 Electron beam lithography system and method 有权
标题翻译：电子束光刻系统及方法
公开(公告)号：US06605811B2
公开(公告)日：2003-08-12
申请号：US09986485
申请日：2001-11-09
申请人： Masanao Hotta , Yasuhiko Kojima , Takaomi Ito , Katsumi Yokota , Tetsuyuki Okabayashi , Akio Otani , Susumu Ono
发明人： Masanao Hotta , Yasuhiko Kojima , Takaomi Ito , Katsumi Yokota , Tetsuyuki Okabayashi , Akio Otani , Susumu Ono
IPC分类号： G01N2300
CPC分类号： H01J37/1472 , H01J2237/3175
摘要： In an electron beam lithography system, an outputted main signal is applied directly to deflection plates, whereas an outputted auxiliary signal is applied to the deflection plate through a capacitive coupling for writing a wide strip-like pattern accurately at a high speed. In the electron beam lithography system, a deflection signal is divided into a main signal having a low frequency and a large amplitude and an auxiliary signal having a high frequency and a small amplitude. The main signal is applied directly to deflection plates, and the auxiliary signal is applied to the deflection plate through a capacitor. In the case of writing a straight line having a certain width, and a solid graphic pattern, because the electron beam is deflected in a given direction and a given width by the use of the auxiliary signal in synchronism with one sweeping cycle based on the main signal, a line whose width is as wide as may times of the electron beam diameter can be written, and a graphic pattern having a certain width can be written at a high speed.
摘要翻译：在电子束光刻系统中，输出的主信号直接施加到偏转板，而输出的辅助信号通过电容耦合施加到偏转板，用于以高速准确地写入宽的带状图案。在电子束光刻系统中，偏转信号被分成具有低频和大振幅的主信号以及具有高频和小振幅的辅助信号。主信号直接施加到偏转板，辅助信号通过电容器施加到偏转板上。在写入具有一定宽度的直线和固体图形的情况下，因为电子束通过使用辅助信号以给定方向偏转并且给定的宽度与基于主要的一个扫描周期同步地信号，可以写入其宽度与电子束直径的宽度一样宽的线，并且可以高速写入具有一定宽度的图形。

2. 发明授权

US3949176A Method of and apparatus for all busy detection 失效
标题翻译：所有繁忙检测的方法和装置
公开(公告)号：US3949176A
公开(公告)日：1976-04-06
申请号：US437679
申请日：1974-01-29
申请人： Yoshiro Hayashi , Takeaki Yamagata , Akio Otani , Tadashi Minami , Kuniomi Aizawa
发明人： Yoshiro Hayashi , Takeaki Yamagata , Akio Otani , Tadashi Minami , Kuniomi Aizawa
IPC分类号： H04M3/22 , H04Q3/00
CPC分类号： H04Q3/00
摘要： A method of and an apparatus for detecting the all make busy state of a line concentrator or an exchange in which all outgoing circuits are divided into a plurality of groups, at least one circuit is specified from each of the groups, the specified circuits are successively scanned with a scanning signal producing therefrom a plurality of phase pulse signals having phase ranges resulting from dividing phase ranges by at least the number of the specified circuits of the groups corresponding to the latter phase ranges which are one period of the scanning signal divided by the number of the groups, the busy state of the specified circuit of a group is detected to decide the busy state of the group, and the busy states of all groups at one cycle of the scanning are detected to detect the all make busy state of the line concentrator or the exchange.
摘要翻译：一种用于检测线路集线器或交换机的所有繁忙状态的方法和装置，其中所有输出电路被分成多个组，至少一个电路从每个组指定，所指定的电路依次用扫描信号扫描多个相位脉冲信号，所述相位脉冲信号具有相位范围，所述相位范围是由相位范围除以至少相应于作为扫描信号的一个周期的后一个相位范围的组的指定电路的数量检测组的指定电路的忙碌状态，确定组的忙碌状态，检测到扫描的一个周期的所有组的忙碌状态，以检测所有组的忙碌状态线路集线器或交换机。

3. 发明授权

US4794530A Credit settlement and ticketing terminal system 失效
标题翻译：信用结算和票务终端系统
公开(公告)号：US4794530A
公开(公告)日：1988-12-27
申请号：US860508
申请日：1986-05-07
申请人： Kazuo Yukiura , Keniti Seto , Kimio Watanabe , Hiroshi Harimoto , Akio Otani
发明人： Kazuo Yukiura , Keniti Seto , Kimio Watanabe , Hiroshi Harimoto , Akio Otani
IPC分类号： G07F7/08 , G06Q30/06 , G06Q50/00 , G07B1/00 , G07F7/00 , G07F17/42
CPC分类号： G06Q10/02 , G06Q20/10 , G06Q20/204 , G07B15/00 , G07F17/0014 , G07F17/42
摘要： A credit settlement and ticketing terminal system comprises a terminal unit for issuing request information, and a central unit for performing a processing for ticketing a ticket or the like by referring to the issued request information and a file managed by the central unit, and for delivering results of the processing to the terminal unit to ticket or issue a desired ticket or the like. The central unit includes a processor for processing reservation and ticketing and a calculator for calculating charges for the reservation and ticketing. When the request information from the terminal unit is recognized as credit ticketing request information, the central unit settles the charges incurred by selling on credit, edits results of the credit settlement such that the results and a ticketing data are printed out on different sheets, and delivers as response information, the results and ticketing data to the terminal unit. The terminal unit includes an input device for inputting items of reservation, a card reader for identifying the principal of a reservation applicant, a secret number or password code entry device, means for setting a display indicating that the charges for sales should be settled on credit, a control device for transmitting, as the credit ticketing request information, the inputted information to the central unit upon a transmission starting operation and a printer for printing out a ticket or coupon and the results of credit settlement based on response information from the central unit.
摘要翻译：信用结算和票务终端系统包括用于发出请求信息的终端单元，以及用于通过参考所发出的请求信息和由中央单元管理的文件执行票券等票务处理的中央单元，并且用于递送对终端单元的处理结果进行打票或发出期望的票据等。中央单元包括处理预约和票务的处理器以及用于计算预订和票务费用的计算器。当来自终端单元的请求信息被确认为信用票据请求信息时，中央单元结算通过信用销售而产生的费用，编辑信用结算的结果，使得结果和票据数据在不同的表上打印出来，以及将结果和票务数据作为响应信息提供给终端单元。终端单元包括用于输入预约项目的输入设备，用于识别预约申请人的主体的读卡器，秘密号码或密码代码输入设备，用于设置指示销售费用应在信用额上结算的显示的装置控制装置，用于在发送开始操作时将输入的信息作为信用票据请求信息发送到中央单元，以及用于打印出票据或优惠券的打印机以及基于来自中央单元的响应信息的信用结算结果。

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