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    • 1. 发明授权
    • Load sensor with use of crystal resonator
    • 使用晶体谐振器的负载传感器
    • US06880407B2
    • 2005-04-19
    • US10163858
    • 2002-06-05
    • Masami YamanakaMotoyuki AdachiAkio ChibaKozo Ono
    • Masami YamanakaMotoyuki AdachiAkio ChibaKozo Ono
    • G01G3/16G01G3/13G01L1/10H01L41/08H01L41/18G01B7/16H01L41/04
    • G01G3/13
    • Excitation electrodes are respectively affixed to central portions of both surfaces of a long plate-shaped AT-cut crystal resonator, the central portion starts a thickness shear oscillation in the length direction of the crystal resonator when an electric signal is applied to the central portion of the crystal resonator through the excitation electrodes. And, channel-shaped, half-circular-shaped, or trapezoid grooves in cross-section are respectively formed in the plate width direction on middle portions between the center portion and end portions of the crystal resonator. These grooves are formed so as to be symmetrical with respect to a thicknesswise central position of the crystal resonator through a well-known etching technique such as photo-etching and the like.
    • 励磁电极分别固定在长板状AT切割晶体谐振器的两个表面的中心部分,当电信号施加到晶体谐振器的中心部分时,中心部分在晶体谐振器的长度方向上开始厚度剪切振荡 晶体谐振器通过激发电极。 并且,在晶体谐振器的中心部分和端部之间的中间部分上分别在板宽度方向上形成横截面的通道形状,半圆形或梯形槽。 这些槽通过公知的蚀刻技术如光蚀刻等形成为相对于晶体谐振器的厚度方向中心位置对称。