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1. 发明申请

US20070292612A1 Metal-organic vaporizing and feeding apparatus, metal-organic chemical vapor deposition apparatus, metal-organic chemical vapor deposition method, gas flow rate regulator, semiconductor manufacturing apparatus, and semiconductor manufacturing method 审中-公开
标题翻译：金属有机蒸发送料装置，金属有机化学气相沉积装置，金属有机化学气相沉积法，气体流量调节器，半导体制造装置和半导体制造方法
公开(公告)号：US20070292612A1
公开(公告)日：2007-12-20
申请号：US11808960
申请日：2007-06-14
申请人： Masaki Ueno , Toshio Ueda , Takao Nakamura , Koichi Ishikawa , Ken Takahashi , Osamu Yasaku , Kazuo Ujiie , Kikurou Takemoto
发明人： Masaki Ueno , Toshio Ueda , Takao Nakamura , Koichi Ishikawa , Ken Takahashi , Osamu Yasaku , Kazuo Ujiie , Kikurou Takemoto
IPC分类号： C23C16/00
CPC分类号： C23C16/4482 , C23C16/52
摘要： A metal-organic vaporizing and feeding apparatus includes: a retention vessel for retaining a metal-organic material; a bubbling gas feeding path connected to the retention vessel, for feeding bubbling gas to the metal-organic material; a metal-organic gas feeding path connected to the retention vessel, for feeding metal-organic gas generated in the retention vessel and dilution gas to a deposition chamber; a dilution gas feeding path connected to the metal-organic gas feeding path, for feeding the dilution gas to the metal-organic gas feeding path; a flow rate regulator provided in the bubbling gas feeding path, for regulating flow rate of the bubbling gas; a pressure regulator for regulating pressure of the dilution gas; and a sonic nozzle disposed in the metal-organic gas feeding path on a downstream side of a connecting position between the metal-organic gas feeding path and the dilution gas feeding path.
摘要翻译：一种金属有机气化和输送装置，包括：用于保持金属 - 有机材料的保留容器; 连接到保持容器的鼓泡气体供给路径，用于将鼓泡气体供给到金属有机材料; 连接到保持容器的金属有机气体供给路径，用于将在保留容器中产生的金属有机气体和稀释气体供给到沉积室; 连接到金属 - 有机气体供给路径的稀释气体供给路径，用于将稀释气体供给到金属 - 有机气体供给路径; 设置在鼓泡气体供给路径中的流量调节器，用于调节发泡气体的流量; 用于调节稀释气体的压力的压力调节器; 以及设置在金属 - 有机气体供给路径之间的金属 - 有机气体供给路径和稀释气体供给路径之间的连接位置的下游侧的声波喷嘴。

2. 发明申请

US20070079760A1 Vaporizer and semiconductor processing system 有权
标题翻译：汽化器和半导体加工系统
公开(公告)号：US20070079760A1
公开(公告)日：2007-04-12
申请号：US11543086
申请日：2006-10-05
申请人： Tsuneyuki Okabe , Shigeyuki Okura , Kazuo Ujiie
发明人： Tsuneyuki Okabe , Shigeyuki Okura , Kazuo Ujiie
IPC分类号： C23C16/00
CPC分类号： C23C16/4486
摘要： A vaporizer for generating a process gas from a liquid material includes a container defining a process space of the vaporizer, and an injector having a spray port configured to spray the liquid material in an atomized state downward in the container. A lower block is disposed below the spray port inside the container such that a run-up space for the atomized liquid material is defined between the spray port and the lower block, and an annular space continuous to the run-up space is defined between an inner surface of the container and the lower block. First and second heaters are respectively provided to the container and the lower block, and configured to heat the atomized liquid material flowing through the annular space to generate the process gas. A gas delivery passage is connected to the container to output the process gas from the annular space.
摘要翻译：用于从液体材料产生处理气体的蒸发器包括限定蒸发器的处理空间的容器和具有喷射口的喷射器，该喷射口被配置为以雾化状态将容器内的液体材料向下喷射。下部块设置在容器内部的喷雾口下方，使得雾化液体材料的起飞空间被限定在喷射口和下部块之间，并且与起动空间连续的环形空间被限定在容器的内表面和下块。第一和第二加热器分别设置在容器和下部块体上，并且构造成加热流过环形空间的雾化液体材料以产生处理气体。气体输送通道连接到容器以从环形空间输出处理气体。

3. 发明授权

US5282659A Chuck for positioning chip electronic elements 失效
标题翻译：卡盘用于定位芯片电子元件
公开(公告)号：US5282659A
公开(公告)日：1994-02-01
申请号：US837883
申请日：1992-02-20
申请人： Kazuya Yasuraoka , Kazuo Ujiie
发明人： Kazuya Yasuraoka , Kazuo Ujiie
IPC分类号： H05K13/04 , H05K3/32
CPC分类号： H05K13/0413 , Y10T279/11
摘要： A head case accommodates an axially movable suction nozzle that holds an electric component on a chip by suction at its center. At least four jaws, which are disposed around the center axis of the suction nozzle and adapted to move parallel to the bottom plate of the head case through guide slots radially extending with respect to the same axis, are attached to the bottom plate. Two each of the facing jaws on both sides of the axis are coupled together by means of links and always urged toward the suction nozzle by springs. While expanding rods actuated by pistons open the jaws, the suction nozzle picks up the electric component on a chip by suction. When released on completion of the pick-up, the jaws urged by the springs move an equal distance toward the axis of the suction nozzle parallel to the surface of the bottom plate to squarely hold the four sides of the electric component on a chip, with its center thus held in alignment with the axis of the suction nozzle.
摘要翻译：头壳体容纳可轴向移动的吸嘴，其通过其中心处的抽吸将电子部件保持在芯片上。至少四个钳口围绕吸嘴的中心轴设置并且适于通过相对于相同轴线径向延伸的引导槽平行于头壳体的底板移动，附接到底板。轴的两侧的两个相对的夹爪中的每一个通过连杆联接在一起，并且始终通过弹簧朝向吸嘴施力。当由活塞致动的膨胀杆打开钳口时，吸嘴通过抽吸拾取芯片上的电气部件。当拾取完成时释放时，由弹簧推动的夹爪平行于底板的表面平移于吸嘴的轴线等距离，将电气部件的四边平面地保持在芯片上，其中心因此保持与吸嘴的轴线对齐。

4. 发明授权

US5457538A Apparatus for visually determining the correct soldering position of an electronic component with respect to a printed circuit board 失效
标题翻译：用于可视地确定电子部件相对于印刷电路板的正确焊接位置的装置
公开(公告)号：US5457538A
公开(公告)日：1995-10-10
申请号：US202255
申请日：1994-02-25
申请人： Kazuo Ujiie
发明人： Kazuo Ujiie
IPC分类号： H05K13/04 , H05K13/08 , G01B11/00
CPC分类号： H05K13/0413
摘要： An electronic-component holder comprises an image superimposing device comprising a semitransparent mirror 34 and a plane mirror 36 that, in combination, horizontally reflect the images of two objects, one placed over the other, to the same point, an image extracting device 50 that reflects the partial images in the diagonal fields of the image superimposing device in opposite and horizontal directions, and a solid image reproducing device 84 that converts the image from the image extracting device into a picture signal that are disposed between a semiconductor device D and a printed circuit board C that is placed below the semiconductor device D. The image superimposing device combines the image of the lead L.sub.1 on the back of the semiconductor device D and that of the conductor pattern on the front of the printed circuit board C into one composite image. The image extracting device 50 conveys to the solid image reproducing device only a portion of the image of the semiconductor device extracted from the diagonal fields. The positioner is capable of positioning even larger electronic components with high precision without increasing the size of the optical system.
摘要翻译：电子部件保持器包括图像叠加装置，该图像叠加装置包括半透明反射镜34和平面反射镜36，其组合地将两个物体的图像水平地反射到另一个对象的图像提取装置50，图像提取装置50 反映图像叠加装置的相对和水平方向的对角线场中的部分图像，以及将图像从图像提取装置转换为图像信号的实心图像再现装置84，其设置在半导体装置D和印刷电路板C.放置在半导体器件D的下面。图像叠加装置将半导体器件D的背面上的引线L1的图像和印刷电路板C的前面的导体图案的图像组合为一个复合图像。图像提取装置50仅向实体图像再现装置传送从对角线场提取的半导体装置的图像的一部分。定位器能够在不增加光学系统的尺寸的情况下以高精度定位更大的电子部件。

5. 发明授权

US08382903B2 Vaporizer and semiconductor processing system 有权
标题翻译：汽化器和半导体加工系统
公开(公告)号：US08382903B2
公开(公告)日：2013-02-26
申请号：US11543086
申请日：2006-10-05
申请人： Tsuneyuki Okabe , Shigeyuki Okura , Kazuo Ujiie
发明人： Tsuneyuki Okabe , Shigeyuki Okura , Kazuo Ujiie
IPC分类号： C23C16/00
CPC分类号： C23C16/4486
摘要： A vaporizer for generating a process gas from a liquid material includes a container defining a process space of the vaporizer, and an injector having a spray port configured to spray the liquid material in an atomized state downward in the container. A lower block is disposed below the spray port inside the container such that a run-up space for the atomized liquid material is defined between the spray port and the lower block, and an annular space continuous to the run-up space is defined between an inner surface of the container and the lower block. First and second heaters are respectively provided to the container and the lower block, and configured to heat the atomized liquid material flowing through the annular space to generate the process gas. A gas delivery passage is connected to the container to output the process gas from the annular space.
摘要翻译：用于从液体材料产生处理气体的蒸发器包括限定蒸发器的处理空间的容器和具有喷射口的喷射器，该喷射口被配置为以雾化状态将容器内的液体材料向下喷射。下部块设置在容器内的喷雾口下方，使得雾化液体材料的起始空间被限定在喷射口和下部块之间，并且与起动空间连续的环形空间被限定在容器的内表面和下块。第一和第二加热器分别设置在容器和下部块体上，并且构造成加热流过环形空间的雾化液体材料以产生处理气体。气体输送通道连接到容器以从环形空间输出处理气体。

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