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    • 5. 发明申请
    • Field-emission electron source apparatus
    • 场发射电子源装置
    • US20070188075A1
    • 2007-08-16
    • US11706532
    • 2007-02-13
    • Junichi KimiyaKeisuke Koga
    • Junichi KimiyaKeisuke Koga
    • H01J63/04H01J1/62
    • H01J7/18H01J1/46H01J29/467
    • A field-emission electron source apparatus includes a vacuum container that receives a field-emission electron source array, a target and an auxiliary electrode, and a getter pump that is disposed in the vacuum container and absorbs and removes excess gas. An electron beam emitted from the field-emission electron source array passes through a plurality of through holes formed in the auxiliary electrode and reaches the target. A space containing the field-emission electron source array and a space containing the target and the getter pump are separated substantially by the auxiliary electrode so that gas generated from the target is absorbed by the getter pump without passing through the space containing the field-emission electron source array. This makes it possible to provide a highly-reliable field-emission electron source apparatus in which the influence of gas and ions on the field-emission electron source array is eliminated or reduced.
    • 场发射电子源装置包括:接收场发射电子源阵列的真空容器,靶和辅助电极;以及设置在真空容器中并吸收和去除过量气体的吸气泵。 从场致发射电子源阵列发射的电子束通过形成在辅助电极中的多个通孔并到达靶。 包含场致发射电子源阵列的空间和包含靶和吸气泵的空间基本上由辅助电极分离,使得由靶产生的气体被吸气泵吸收而不通过包含场致发射的空间 电子源阵列。 这使得可以提供一种高可靠性的场致发射电子源装置,其中消除或减少了气体和离子对场发射电子源阵列的影响。
    • 9. 发明授权
    • Electron gun structure
    • 电子枪结构
    • US06265819B1
    • 2001-07-24
    • US09180826
    • 1998-11-13
    • Kazunori SatouJunichi KimiyaShigeru SugawaraOsamu OnoTakashi Awano
    • Kazunori SatouJunichi KimiyaShigeru SugawaraOsamu OnoTakashi Awano
    • H01J2950
    • H01J29/485
    • An electron gun assembly includes a plurality of cathodes arranged in an in-line direction, at least first through fourth grids having electron beam passing holes arranged in an in-line direction, and an insulation support for sandwiching the cathodes and the grids between and fixing the cathodes and the grids from a direction perpendicular to the in-line direction. The second grid and the fourth grid are supplied with substantially the same low potential, the third grid is supplied with a potential higher than the potential of the fourth grid, and the second grid is fixed to the insulation support on a side of the third grid. The third grid has a cup-shaped electrode on a side of the second grid, the cup-shaped electrode including a plane portion having electron beam passing holes, an opening portion, and planting portions planted in the insulation support.
    • 一种电子枪组件,包括沿排列方向布置的多个阴极,至少第一至第四栅极,具有沿着一个排列方向布置的电子束通孔,以及绝缘支撑件,用于将阴极和栅格夹在其间并固定 阴极和栅极从垂直于在线方向的方向。 第二栅极和第四栅极被提供有基本上相同的低电位,第三栅极被提供有高于第四栅极的电势的电位,并且第二栅极固定到第三栅极侧的绝缘支撑 。 第三格栅在第二格栅的一侧具有杯形电极,杯形电极包括具有电子束通过孔的平面部分,开口部分和种植在绝缘支撑体中的种植部分。