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    • 3. 发明授权
    • Optical image measuring apparatus
    • 光学图像测量装置
    • US07372578B2
    • 2008-05-13
    • US11223928
    • 2005-09-13
    • Masahiro AkibaKinpui ChanYasufumi FukumaHiroyuki OtsukaHisashi TsukadaKazuhiko Yumikake
    • Masahiro AkibaKinpui ChanYasufumi FukumaHiroyuki OtsukaHisashi TsukadaKazuhiko Yumikake
    • G02B9/02
    • G01B9/02014G01B9/02003G01B9/02027G01B9/02069G01B9/02091G01B11/2441G01B2290/45G01B2290/70
    • Provided is an optical image measuring apparatus capable of effectively receiving interference light, particularly an alternating current component thereof using a smaller number of photo sensors. The optical image measuring apparatus includes a polarizing plate for converting a light beam from a broad-band light source to linearly polarized light, a half mirror for dividing the light beam into signal light and reference light, a piezoelectric element for vibrating a reference mirror, a wavelength plate for converting the reference light to circularly polarized light, a polarization beam splitter for extracting two different polarized light components from interference light produced from the signal light and the reference light which are superimposed on each other by the half mirror, CCDs for detecting the two different polarized light components, and a signal processing portion for producing an image of an object to be measured based on the detected polarized light components. A frequency for intensity modulation of the light beam is synchronized with a beat frequency of the interference light. A frequency of vibration of the reference mirror is synchronized with the beat frequency of the interference light and an amplitude of vibration thereof is set to be equal to or smaller than a wavelength of the interference light.
    • 提供一种光学图像测量装置,其能够使用较少数量的光传感器有效地接收干涉光,特别是其交流分量。 该光学图像测量装置包括用于将来自宽带光源的光束转换为线偏振光的偏振片,用于将光束分成信号光的半反射镜和参考光,用于振动参考反射镜的压电元件, 用于将参考光转换成圆偏振光的波长板,用于从由半反射镜彼此叠加的信号光和参考光产生的干涉光中提取两种不同的偏振光分量的偏振分束器,用于检测的CCD 两个不同的偏振光分量,以及用于基于检测到的偏振光分量产生待测物体的图像的信号处理部分。 光束的强度调制频率与干涉光的拍频同步。 参考反射镜的振动频率与干涉光的拍频同步,其振动振幅被设定为等于或小于干涉光的波长。
    • 4. 发明申请
    • Optical image measuring apparatus
    • 光学图像测量装置
    • US20060055939A1
    • 2006-03-16
    • US11223928
    • 2005-09-13
    • Masahiro AkibaKinpui ChanYasufumi FukumaHiroyuki OtsukaHisashi TsukadaKazuhiko Yumikake
    • Masahiro AkibaKinpui ChanYasufumi FukumaHiroyuki OtsukaHisashi TsukadaKazuhiko Yumikake
    • G01B11/02
    • G01B9/02014G01B9/02003G01B9/02027G01B9/02069G01B9/02091G01B11/2441G01B2290/45G01B2290/70
    • Provided is an optical image measuring apparatus capable of effectively receiving interference light, particularly an alternating current component thereof using a smaller number of photo sensors. The optical image measuring apparatus includes a polarizing plate for converting a light beam from a broad-band light source to linearly polarized light, a half mirror for dividing the light beam into signal light and reference light, a piezoelectric element for vibrating a reference mirror, a wavelength plate for converting the reference light to circularly polarized light, a polarization beam splitter for extracting two different polarized light components from interference light produced from the signal light and the reference light which are superimposed on each other by the half mirror, CCDs for detecting the two different polarized light components, and a signal processing portion for producing an image of an object to be measured based on the detected polarized light components. A frequency for intensity modulation of the light beam is synchronized with a beat frequency of the interference light. A frequency of vibration of the reference mirror is synchronized with the beat frequency of the interference light and an amplitude of vibration thereof is set to be equal to or smaller than a wavelength of the interference light.
    • 提供一种光学图像测量装置,其能够使用较少数量的光传感器有效地接收干涉光,特别是其交流分量。 该光学图像测量装置包括用于将来自宽带光源的光束转换为线偏振光的偏振片,用于将光束分成信号光的半反射镜和参考光,用于振动参考反射镜的压电元件, 用于将参考光转换成圆偏振光的波长板,用于从由半反射镜彼此叠加的信号光和参考光产生的干涉光中提取两种不同的偏振光分量的偏振分束器,用于检测的CCD 两个不同的偏振光分量,以及用于基于检测到的偏振光分量产生待测物体的图像的信号处理部分。 光束的强度调制频率与干涉光的拍频同步。 参考反射镜的振动频率与干涉光的拍频同步,其振动振幅被设定为等于或小于干涉光的波长。
    • 5. 发明授权
    • Optical image measuring apparatus
    • 光学图像测量装置
    • US07248371B2
    • 2007-07-24
    • US11091653
    • 2005-03-29
    • Kinpui ChanMasahiro AkibaYasufumi FukumaHiroyuki OtsukaHisashi Tsukada
    • Kinpui ChanMasahiro AkibaYasufumi FukumaHiroyuki OtsukaHisashi Tsukada
    • G01B9/02
    • G01N21/49A61B3/102A61B5/0066A61B5/0073G01B9/02003G01B9/02012G01B9/02091G01B2290/45G01N2021/1782
    • Provided is an optical image measuring apparatus capable of easily changing a scanning interval of an object to be measured in a depth direction with high precision. The apparatus includes an interference optical system for superimposing signal light propagating through the object to be measured on reference light subjected to frequency shift to produce interference light, a reference mirror driving unit for driving a mirror to scan the object to be measured in the depth direction, shutters for sampling interference light beams, CCDs for storing charges for only a predetermined storage time and outputting electrical signals, a control unit for changing the storage time of the CCDs, a signal processing portion for calculating intensities and phases of interference light beams corresponding to each depth of the object to be measured which are successively detected by the CCDs during scanning based on the electrical signals successively outputted from the CCDs every changed storage time, and a setting operation unit for setting the storage time of the CCDs by an operator.
    • 提供一种能够高精度地容易地在深度方向上变更被测定物的扫描间隔的光学图像测定装置。 该装置包括:干涉光学系统,用于将经过频移的参考光上传播的信号光叠加以产生干涉光;参考镜驱动单元,用于驱动反射镜以沿深度方向扫描被测量物体 用于采集干涉光的百叶窗,仅用于存储预定的存储时间的电荷的CCD和输出电信号;用于改变CCD的存储时间的控制单元,用于计算对应于...的干涉光束的强度和相位的信号处理部分 基于从每个改变的存储时间从CCD连续输出的电信号在扫描期间由CCD连续检测的待测量对象的每个深度,以及设置操作单元,用于设置操作者的CCD的存储时间。
    • 7. 发明申请
    • Optical image measuring apparatus
    • 光学图像测量装置
    • US20050219544A1
    • 2005-10-06
    • US11091478
    • 2005-03-29
    • Kinpui ChanMasahiro AkibaYasufumi FukumaHiroyuki OtsukaHisashi Tsukada
    • Kinpui ChanMasahiro AkibaYasufumi FukumaHiroyuki OtsukaHisashi Tsukada
    • G01B11/00A61B3/12A61B5/00G01B9/02G01N21/17G01N21/47
    • A61B3/1225A61B3/102A61B5/0066A61B5/0073G01B9/02003G01B9/02007G01B9/02012G01B9/02028G01B9/02091G01B2290/45
    • Provided is an optical image measuring apparatus capable of taking images of an object to be measured in plural depth regions in parallel. An optical image measuring apparatus of the present invention includes: a beam splitter (4) for dividing a light beam into signal light (S) and reference light (R); beam splitters (5-1 to 5-(n−1)) for dividing the reference light (R) into plural reference light beams (R1 to Rn); frequency shifters (6-1 to 6-n) for shifting frequencies of the reference light beams (R-1 to Rn) by different amounts; and reflector plates (7-1 to 7-n) arranged at different distances from an object to be measured (O). The reference light beams (R1 to Rn) and the signal light (S) reflected by the object to be measured in depth regions (D1 to Dn) are superimposed on each other to thereby produce interference light (L). Shutters (9-1 to 9-3) extract interference light components (L1 to Ln) from the reference light (L), and CCD cameras (10-1 to 10-3) receive the interference light component and convert the interference light component into electrical signals to output the signals. A computer (20) forms images in depth regions corresponding to the interference light components based on the electrical signals.
    • 本发明提供一种能够并行地在多个深度区域拍摄被测量物体的图像的光学图像测量装置。 本发明的光学图像测量装置包括:用于将光束分成信号光(S)和参考光(R)的分束器(4); 用于将参考光(R)分成多个参考光束(R 1至R n)的分束器(5-1-1至(n-1)); 用于将参考光束(R-1至Rn)的频率移动不同量的频移器(6-1至6-n); 以及布置在与被测量物体(O)不同的距离处的反射板(7-1至7-n)。 在深度区域(D 1〜D n)中被测量对象物反射的基准光束(R 1〜R n)和信号光(S)彼此叠加,从而产生干涉光(L)。 百叶窗(9-1至9-3)从参考光(L)中提取干涉光分量(L 1至Ln),CCD相机(10-1至10-3)接收干涉光分量并转换干涉光 组成电信号输出信号。 计算机(20)基于电信号在与干涉光分量对应的深度区域中形成图像。
    • 9. 发明授权
    • Optical image measuring apparatus for forming an image of an object to be measured based on interference light
    • 用于基于干涉光形成待测物体的图像的光学图像测量装置
    • US07268885B2
    • 2007-09-11
    • US11073712
    • 2005-03-08
    • Kinpui ChanMasahiro AkibaYasufumi FukumaHiroyuki OtsukaHisashi Tsukada
    • Kinpui ChanMasahiro AkibaYasufumi FukumaHiroyuki OtsukaHisashi Tsukada
    • G01B9/02
    • G01B9/02007G01B9/02003G01B9/02041G01B9/02069G01B2290/45G01J2009/0234
    • An optical image measuring apparatus capable of effectively obtaining a direct current component of a heterodyne signal which is composed of background light of interference light is provided. The optical image measuring apparatus includes: an optical interference system in which a light beam from a light source is divided into signal light and reference light by a beam splitter, a frequency of the reference light is shifted by a frequency shifter, and the signal light propagating through an object to be measured and the reference light reflected on a mirror are superimposed on each other by the beam splitter to produce interference light; beam splitters for dividing the interference light into interference light beams; shutters serving as an intensity modulating unit for modulating intensities of the respective interference light beams at predetermined intervals; CCDs for receiving the respective interference light beams whose intensities are modulated and outputting electrical signals; and a signal processing portion serving as a calculating unit for calculating an intensity of the direct current component corresponding to the background light of the interference light based on the outputted electrical signals.
    • 提供一种能够有效地获得由干涉光的背景光组成的外差信号的直流分量的光学图像测量装置。 光学图像测量装置包括:光学干涉系统,其中来自光源的光束被分束器分成信号光和参考光,参考光的频率被移频器偏移,并且信号光 通过被测量物体传播并且通过分束器将反射在反射镜上的参考光彼此叠加以产生干涉光; 分束器,用于将干涉光分成干涉光束; 用作强度调制单元的快门,用于以预定间隔调制各个干涉光束的强度; 用于接收其强度被调制并输出电信号的各个干涉光束的CCD; 以及信号处理部分,用作计算单元,用于基于输出的电信号计算与干涉光的背景光相对应的直流分量的强度。
    • 10. 发明申请
    • Optical image measuring apparatus
    • 光学图像测量装置
    • US20050219545A1
    • 2005-10-06
    • US11091653
    • 2005-03-29
    • Kinpui ChanMasahiro AkibaYasufumi FukumaHiroyuki OtsukaHisashi Tsukada
    • Kinpui ChanMasahiro AkibaYasufumi FukumaHiroyuki OtsukaHisashi Tsukada
    • G01B11/00A61B3/12A61B5/00G01B9/02G01N21/17G01N21/47G01N21/49
    • G01N21/49A61B3/102A61B5/0066A61B5/0073G01B9/02003G01B9/02012G01B9/02091G01B2290/45G01N2021/1782
    • Provided is an optical image measuring apparatus capable of easily changing a scanning interval of an object to be measured in a depth direction with high precision. The apparatus includes an interference optical system for superimposing signal light propagating through the object to be measured on reference light subjected to frequency shift to produce interference light, a reference mirror driving unit for driving a mirror to scan the object to be measured in the depth direction, shutters for sampling interference light beams, CCDs for storing charges for only a predetermined storage time and outputting electrical signals, a control unit for changing the storage time of the CCDs, a signal processing portion for calculating intensities and phases of interference light beams corresponding to each depth of the object to be measured which are successively detected by the CCDs during scanning based on the electrical signals successively outputted from the CCDs every changed storage time, and a setting operation unit for setting the storage time of the CCDs by an operator.
    • 提供一种能够高精度地容易地在深度方向上变更被测定物的扫描间隔的光学图像测定装置。 该装置包括:干涉光学系统,用于将经过频移的参考光上传播的信号光叠加以产生干涉光;参考镜驱动单元,用于驱动反射镜以沿深度方向扫描被测量物体 用于采集干涉光的百叶窗,仅用于存储预定的存储时间的电荷的CCD和输出电信号;用于改变CCD的存储时间的控制单元,用于计算对应于...的干涉光束的强度和相位的信号处理部分 基于从每个改变的存储时间从CCD连续输出的电信号在扫描期间由CCD连续检测的待测量对象的每个深度,以及设置操作单元,用于设置操作者的CCD的存储时间。