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1. 发明申请

US20110073489A1 CLEANING LIQUID, CLEANING METHOD, CLEANING SYSTEM, AND METHOD FOR MANUFACTURING MICROSTRUCTURE 审中-公开
标题翻译：清洁液，清洁方法，清洁系统和制造微结构的方法
公开(公告)号：US20110073489A1
公开(公告)日：2011-03-31
申请号：US12880450
申请日：2010-09-13
申请人： Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi , Masaaki Kato , Yusuke Ogawa , Hiroki Domon
发明人： Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi , Masaaki Kato , Yusuke Ogawa , Hiroki Domon
IPC分类号： C25F1/00 , C25F7/00
CPC分类号： H01L21/31133 , G03F7/423 , H01L21/67051
摘要： According to embodiments, a cleaning liquid includes an oxidizing substance and hydrofluoric acid and exhibiting acidity. A cleaning method is disclosed. The method includes producing an oxidizing solution including an oxidizing substance by one selected from electrolyzing a sulfuric acid solution, electrolyzing hydrofluoric acid added to a sulfuric acid solution, and mixing a sulfuric acid solution with aqueous hydrogen peroxide. The method includes supplying the oxidizing solution and hydrofluoric acid to a surface of an object to be cleaned.
摘要翻译：根据实施方案，清洗液体包含氧化物质和氢氟酸并具有酸性。公开了一种清洁方法。该方法包括：通过选择电解硫酸溶液，电解加入到硫酸溶液中的氢氟酸，并将硫酸溶液与过氧化氢水溶液混合，制备包含氧化物质的氧化溶液。该方法包括将氧化溶液和氢氟酸供给到待清洁物体的表面。

2. 发明申请

US20090321272A1 Sulfuric acid electrolysis process 有权
标题翻译：硫酸电解过程
公开(公告)号：US20090321272A1
公开(公告)日：2009-12-31
申请号：US12459161
申请日：2009-06-26
申请人： Masaaki Kato , Yusuke Ogawa , Hiroki Domon , Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi
发明人： Masaaki Kato , Yusuke Ogawa , Hiroki Domon , Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi
IPC分类号： C25B15/00
CPC分类号： C25B1/285
摘要： Sulfuric acid electrolysis process wherein; a temperature of electrolyte containing sulfuric acid to be supplied to an anode compartment and a cathode compartment is controlled to 30 degree Celsius or more; a flow rate F1 (L/min.) of the electrolyte containing sulfuric acid to be supplied to said anode compartment is controlled to 1.5 times or more (F1/Fa≧1.5) a flow rate Fa (L/min.) of gas formed on an anode side as calculated from Equation (1) shown below and a flow rate F2(L/min.) of said electrolyte containing sulfuric acid to be supplied to said cathode compartment is controlled to 1.5 times or more (F2/Fc≧1.5) a flow rate Fe (L/min.) of gas formed on a cathode side as calculated from Equation (2) shown below. Fa=(I×S×R×T)/(4×Faraday constant) Equation (I) Fe=(I×S×R×T)/(2×Faraday constant) Equation (2) I: Electrolytic current (A)S: Time: 60 second (Fixed)R: Gas constant (0.082 1·atm/K/mol)K: Absolute temperature (273.15 degree Celsius+T degree Celsius)T: Electrolysis temperature (degree Celsius)Faraday constant: (C/mol)
摘要翻译：硫酸电解法其中; 供给阳极室和阴极室的含有硫酸的电解质的温度控制在30摄氏度以上; 将供给到阳极室的含有硫酸的电解质的流量F1（L / min）控制为气体的流量Fa（L / min）的1.5倍以上（F1 / Fa> 1.5）形成在阳极侧，由下述式（1）算出，将含有供给阴极室的硫酸的电解质的流量F2（L / min）控制在1.5倍以上（F2 / Fc> = 1.5）由下面所示的等式（2）计算的在阴极侧形成的气体的流速Fe（L / min）。 Fa =（IxSxRxT）/（4xFaraday常数）等式（I）Fe =（IxSxRxT）/（2xFaraday常数）等式（2）I：电解电流（A）S：时间：60秒（固定）R：气体常数（0.082 1.atm / K / mol）K：绝对温度（273.15摄氏度+ T摄氏度）T：电解温度（摄氏度）法拉第常数：（C / mol）

3. 发明授权

US08187449B2 Cleaning method by electrolytic sulfuric acid and manufacturing method of semiconductor device 有权
标题翻译：电解硫酸的清洗方法及半导体装置的制造方法
公开(公告)号：US08187449B2
公开(公告)日：2012-05-29
申请号：US12459133
申请日：2009-06-26
申请人： Hiroki Domon , Yusuke Ogawa , Masaaki Kato , Takamichi Kishi , Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi
发明人： Hiroki Domon , Yusuke Ogawa , Masaaki Kato , Takamichi Kishi , Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi
IPC分类号： C25B1/28
CPC分类号： C11D11/007 , C11D7/08 , C11D11/0047 , C25B1/285 , G03F7/423 , H01L21/31133
摘要： The cleaning method by electrolytic sulfuric acid and the manufacturing method of semiconductor device comprising: the process in which the first sulfuric acid solution is supplied from outside to the sulfuric acid electrolytic cell to form the first electrolytic sulfuric acid containing oxidizing agent in the sulfuric acid electrolytic cell; the process in which the second sulfuric acid solution, which is higher in concentration than said the first sulfuric acid solution previously supplied, is supplied from outside to said sulfuric acid electrolytic cell; said the second sulfuric acid solution and the first electrolytic sulfuric acid are mixed in said sulfuric acid electrolytic cell; and electrolysis is performed to form the cleaning solution comprising the second electrolytic sulfuric acid containing sulfuric acid and oxidation agent in said sulfuric acid electrolytic cell and the process in which cleaning treatment is performed for the cleaning object with said cleaning solution.
摘要翻译：电解硫酸的清洗方法以及半导体装置的制造方法，其特征在于，包括：从硫酸电解槽向外部供给第一硫酸溶液，在硫酸电解液中形成含有第一电解硫酸的氧化剂的工序细胞; 其中比所述先前供应的所述第一硫酸溶液浓度高的第二硫酸溶液从外部供应到所述硫酸电解池的过程; 所述第二硫酸溶液和所述第一电解硫酸在所述硫酸电解池中混合; 并且进行电解以在所述硫酸电解池中形成包含含有硫酸和氧化剂的第二电解硫酸的清洗溶液，以及对所述清洁溶液进行清洁对象的清洁处理的处理。

4. 发明申请

US20080264780A1 Water electrolysis system 审中-公开
标题翻译：水电解系统
公开(公告)号：US20080264780A1
公开(公告)日：2008-10-30
申请号：US12149036
申请日：2008-04-25
申请人： Masaaki Kato , Yusuke Ogawa
发明人： Masaaki Kato , Yusuke Ogawa
IPC分类号： C25B9/10
CPC分类号： C25B1/04 , C25B11/035 , C25B11/0489 , H01M4/8605 , H01M4/90 , H01M4/926 , Y02E60/366
摘要： In a water electrolysis system having an anode catalyst layer containing anode catalyst and a cathode catalyst layer containing cathode catalyst tightly attached, respectively, to each surface of a solid polymer electrolyte membrane comprising a cation exchange membrane, wherein at least one catalyst layer of said anode catalyst layer and cathode catalyst layer comprises a porous structure of anode catalyst or cathode catalyst dispersed in fluorine resin containing resin, featuring the surface of the anode catalyst layer or the cathode catalyst layer being hydrophobized and the water contact angle with the surface of the anode catalyst layer or the cathode catalyst layer of said porous structure being 90 degrees or more, whereby the transfer of gas to the counter electrode can be significantly suppressed, gas purity and current efficiency be improved, and safety operation of the electrolysis system be secured, without a major change in configuration of the water electrolysis system.
摘要翻译：在具有阳极催化剂层的阳极催化剂层和含有阴极催化剂层的阴极催化剂层的水电解系统分别紧密地连接在包含阳离子交换膜的固体高分子电解质膜的各表面上，其中所述阳极的至少一个催化剂层催化剂层和阴极催化剂层包括分散在含氟树脂的树脂中的阳极催化剂或阴极催化剂的多孔结构，阳极催化剂层的表面或阴极催化剂层被疏水化，并且与阳极催化剂的表面的水接触角所述多孔结构的层或阴极催化剂层为90度以上，由此可以显着地抑制气体向对置电极的转移，提高气体纯度和电流效率，并且可以确保电解系统的安全运行，而不需要水电解系统配置发生重大变化。

5. 发明申请

US20110073490A1 CLEANING METHOD, CLEANING SYSTEM, AND METHOD FOR MANUFACTURING MICROSTRUCTURE 审中-公开
标题翻译：清洁方法，清洁系统和制造微结构的方法
公开(公告)号：US20110073490A1
公开(公告)日：2011-03-31
申请号：US12880549
申请日：2010-09-13
申请人： Naoya Hayamizu , Makiko Tange , Masaaki Kato , Hiroki Domon , Yusuke Ogawa , Yoshiaki Kurokawa , Nobuo Kobayashi
发明人： Naoya Hayamizu , Makiko Tange , Masaaki Kato , Hiroki Domon , Yusuke Ogawa , Yoshiaki Kurokawa , Nobuo Kobayashi
IPC分类号： C25F1/00 , C25F7/00
CPC分类号： C25B1/28 , G03F7/423
摘要： According to one embodiment, a cleaning method is disclosed. The method can produce an oxidizing solution including an oxidizing substance by electrolyzing a dilute sulfuric acid solution. In addition, the method can supply a highly concentrated inorganic acid solution individually, sequentially, or substantially simultaneously with the oxidizing solution to a surface of an object to be cleaned.
摘要翻译：根据一个实施例，公开了一种清洁方法。该方法可以通过电解稀硫酸溶液来产生包含氧化物质的氧化溶液。此外，该方法可以将高度浓缩的无机酸溶液与氧化溶液单独，依次或基本上同时地供给到待清洁物体的表面。

6. 发明申请

US20090325390A1 Cleaning method by electrolytic sulfuric acid and manufacturing method of semiconductor device 有权
标题翻译：电解硫酸的清洗方法及半导体装置的制造方法
公开(公告)号：US20090325390A1
公开(公告)日：2009-12-31
申请号：US12459133
申请日：2009-06-26
申请人： Hiroki Domon , Yusuke Ogawa , Masaaki Kato , Takamichi Kishi , Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi
发明人： Hiroki Domon , Yusuke Ogawa , Masaaki Kato , Takamichi Kishi , Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi
IPC分类号： H01L21/20 , C25B1/22 , C11D7/34
CPC分类号： C11D11/007 , C11D7/08 , C11D11/0047 , C25B1/285 , G03F7/423 , H01L21/31133
摘要： The cleaning method by electrolytic sulfuric acid and the manufacturing method of semiconductor device comprising: the process in which the first sulfuric acid solution is supplied from outside to the sulfuric acid electrolytic cell to form the first electrolytic sulfuric acid containing oxidizing agent in the sulfuric acid electrolytic cell; the process in which the second sulfuric acid solution, which is higher in concentration than said the first sulfuric acid solution previously supplied, is supplied from outside to said sulfuric acid electrolytic cell; said the second sulfuric acid solution and the first electrolytic sulfuric acid are mixed in said sulfuric acid electrolytic cell; and electrolysis is performed to form the cleaning solution comprising the second electrolytic sulfuric acid containing sulfuric acid and oxidation agent in said sulfuric acid electrolytic cell and the process in which cleaning treatment is performed for the cleaning object with said cleaning solution.
摘要翻译：电解硫酸的清洗方法以及半导体装置的制造方法，其特征在于，包括：从硫酸电解槽向外部供给第一硫酸溶液，在硫酸电解液中形成含有第一电解硫酸的氧化剂的工序细胞; 其中比所述先前供应的所述第一硫酸溶液浓度高的第二硫酸溶液从外部供应到所述硫酸电解池的过程; 所述第二硫酸溶液和所述第一电解硫酸在所述硫酸电解池中混合; 并且进行电解以在所述硫酸电解池中形成包含含有硫酸和氧化剂的第二电解硫酸的清洗溶液，以及对所述清洁溶液进行清洁对象的清洁处理的处理。

7. 发明授权

US08211287B2 Sulfuric acid electrolysis process 有权
标题翻译：硫酸电解过程
公开(公告)号：US08211287B2
公开(公告)日：2012-07-03
申请号：US12459161
申请日：2009-06-26
申请人： Masaaki Kato , Yusuke Ogawa , Hiroki Domon , Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi
发明人： Masaaki Kato , Yusuke Ogawa , Hiroki Domon , Naoya Hayamizu , Makiko Tange , Yoshiaki Kurokawa , Nobuo Kobayashi
IPC分类号： C25B1/28
CPC分类号： C25B1/285
摘要： Sulfuric acid electrolysis process wherein; a temperature of electrolyte containing sulfuric acid to be supplied to an anode compartment and a cathode compartment is controlled to 30 degree Celsius or more; a flow rate F1 (L/min.) of the electrolyte containing sulfuric acid to be supplied to said anode compartment is controlled to 1.5 times or more (F1/Fa≧1.5) a flow rate Fa (L/min.) of gas formed on an anode side as calculated from Equation (1) shown below and a flow rate F2(L/min.) of said electrolyte containing sulfuric acid to be supplied to said cathode compartment is controlled to 1.5 times or more (F2/Fc≧1.5) a flow rate Fe (L/min.) of gas formed on a cathode side as calculated from Equation (2) shown below. Fa=(I×S×R×T)/(4×Faraday constant) Equation (1) Fe=(I×S×R×T)/(2×Faraday constant) Equation (2) I: Electrolytic current (A) S: Time: 60 second (Fixed) R: Gas constant (0.082 1·atm/K/mol) K: Absolute temperature (273.15 degree Celsius+T degree Celsius) T: Electrolysis temperature (degree Celsius) Faraday constant: (C/mol)
摘要翻译：硫酸电解法其中; 供给阳极室和阴极室的含有硫酸的电解质的温度控制在30摄氏度以上; 供给所述阳极室的含有硫酸的电解质的流量F1（L / min）被控制为形成的气体的流量Fa（L / min）的1.5倍以上（F1 /Fa≥1.5）在阳极侧，由下述式（1）计算，含有供给阴极室的硫酸的电解质的流量F2（L / min）被控制为1.5倍以上（F2 /Fc≥1.5 ）由如下所示的等式（2）计算的在阴极侧形成的气体的流速Fe（L / min）。 Fa =（I×S×R×T）/（4×法拉第常数）等式（1）Fe =（I×S×R×T）/（2×法拉第常数）等式（2）I：电解电流）S：时间：60秒（固定）R：气体常数（0.082 1·atm / K / mol）K：绝对温度（273.15摄氏度+ T摄氏度）T：电解温度（摄氏度）法拉第常数 / mol）

8. 发明申请

US20100084259A1 OPERATION METHOD OF OZONIZER AND OZONIZER APPARATUS USED THEREFOR 审中-公开
标题翻译：其使用的臭氧和臭氧设备的操作方法
公开(公告)号：US20100084259A1
公开(公告)日：2010-04-08
申请号：US12573156
申请日：2009-10-05
申请人： Masaaki Kato , Rie Kawaguchi
发明人： Masaaki Kato , Rie Kawaguchi
IPC分类号： C01B13/11 , C25B9/10
CPC分类号： C25B1/13 , C01B13/115 , C01B2201/12 , C01B2201/22 , C01B2201/24 , C01B2201/32 , C01B2201/34 , C01B2201/62 , C25B9/10 , C25B15/02 , H01M4/8605 , Y02E60/366
摘要： The present invention offers an operation method of an ozonizer and an ozonizer apparatus to improve ozone gas purity and to achieve long and safety electrolysis operation in such manner that, during normal operation of the ozonizer, ozone gas is generated at the anode in the anode compartment and hydrogen gas is generated at the cathode in the cathode compartment; and only when the ozonizer is stopped and operation is switched to protective current operation during which minute electric current is supplied to protect said anode, oxygen-containing gas is supplied to said cathode compartment after electrolyte and hydrogen gas in said cathode compartment are all drained out, so that said cathode is made function as a gas electrode for oxygen reduction reaction, using said cathode as a reversible electrode with two functions as a gas generation electrode and a gas electrode, thereby during normal operation, ozone is generated efficiently, and during the protective current operation, when safety is a key issue, hydrogen gas is not generated at the cathode and mingling of hydrogen gas into ozone gas generated at the anode is prevented.
摘要翻译：本发明提供一种臭氧发生器和臭氧发生装置的操作方法，以改善臭氧气体的纯度并实现长时间和安全的电解操作，使得在臭氧发生器的正常操作期间，在阳极室的阳极处产生臭氧气体在阴极室的阴极产生氢气; 并且只有当臭氧发生器停止并且操作切换到保护电流操作时，在该保护电流操作期间供应微小的电流以保护所述阳极，则在所述阴极室中的电解液和氢气全部被排出之后，含氧气体被供应到所述阴极室使得所述阴极被用作用于氧还原反应的气体电极，使用所述阴极作为具有两个功能的可逆电极作为气体发生电极和气体电极，从而在正常操作期间有效地产生臭氧，并且在保护电流操作，当安全是关键问题时，在阴极处不产生氢气，并且防止氢气混入阳极产生的臭氧气体中。

9. 发明申请

US20080025886A1 Hydrogen combustion system 失效
标题翻译：氢燃烧系统
公开(公告)号：US20080025886A1
公开(公告)日：2008-01-31
申请号：US11878054
申请日：2007-07-20
申请人： Akiyoshi Manabe , Masaaki Kato , Kazumasa Mochizuki , Masakazu Mimura
发明人： Akiyoshi Manabe , Masaaki Kato , Kazumasa Mochizuki , Masakazu Mimura
IPC分类号： B01J8/06
CPC分类号： F23D14/22 , F23C2900/9901 , F23D91/02
摘要： A hydrogen combustion system comprising: an external cylinder 1 constituting the exterior of a double tube construction; an internal cylinder 2 formed by a porous metal plate constituting the interior of said double tube construction; hydrogen combustion catalyst 4 supported with precious metals on spherical ceramic support surface, formed in pellet state, being packed in said internal cylinder 2; an insert pipe 3 formed by porous metal plate inserted in the center of said internal cylinder 2; pre-heating heaters 5 installed between said insert pipe 3 and said internal cylinder 2 to preheat said hydrogen combustion catalyst 4 to ambient atmosphere of over catalytic reaction temperatures; a hydrogen introducing port 8 connecting to said insert pipe 3; an air introducing port 9 provided at the bottom of said external cylinder 1 in the area between said external cylinder 1 and said internal cylinder 2, wherein air for hydrogen combustion is introduced by the drift effect resulting from the differential pressure generated between the packed layer of hydrogen combustion catalyst and the outside, by thermal convection, achieving safe combustion treatment of hydrogen in simple construction, small size and high treatment efficiency.
摘要翻译：一种氢燃烧系统，包括：构成双管结构的外部的外筒1; 由构成所述双管结构内部的多孔金属板形成的内筒2; 氢气燃烧催化剂4由贵金属负载在球形陶瓷支撑表面上，以颗粒状形成，装在所述内筒2中; 由插入在所述内筒2的中心的多孔金属板形成的插入管3; 预热加热器5安装在所述插入管3和所述内筒2之间，以将所述氢燃烧催化剂4预热到过度催化反应温度的环境气氛; 连接到所述插入管3的氢气引入口8; 设置在外筒1的底部的外筒1和内筒2之间的空气引入口9，其中用于氢气燃烧的空气通过由填充层氢燃烧催化剂和外部，通过热对流，在施工简单，体积小，处理效率高的条件下实现氢的安全燃烧处理。

10. 发明授权

US5879062A Regenerative control apparatus of electric vehicle 失效
标题翻译：电动汽车再生控制装置
公开(公告)号：US5879062A
公开(公告)日：1999-03-09
申请号：US613034
申请日：1996-03-08
申请人： Hisamitsu Koga , Tomiji Owada , Masaaki Kato , Nobuyuki Kawamura , Naotake Kumagai , Nobuya Furukawa
发明人： Hisamitsu Koga , Tomiji Owada , Masaaki Kato , Nobuyuki Kawamura , Naotake Kumagai , Nobuya Furukawa
IPC分类号： G05B13/02 , B60L7/12 , B60L7/18 , B60L7/24 , B60L11/18 , H02P3/14
CPC分类号： B60L7/24 , B60L7/18
摘要： According to the present invention, the operating amount of the brake is detected, and the target value of the regenerative torque is set in accordance with the detected operating amount. In the meantime, the change in the detected operating amount along with time is detected, and the rise speed of the regenerative torque is set in accordance with the detected change along with time. The regenerative torque is controlled in accordance with the set target value of the regenerative torque and the set rise speed.
摘要翻译：根据本发明，检测制动器的操作量，并根据检测到的操作量来设定再生转矩的目标值。同时，检测到检测到的操作量随时间的变化，并且根据检测到的随时间的变化来设定再生转矩的上升速度。根据再生转矩的设定目标值和设定的上升速度来控制再生转矩。

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