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1. 发明申请

US20050072266A1 Planetary system workpiece support and method for surface treatment of workpieces 有权
标题翻译：行星系统工件支撑和工件表面处理方法
公开(公告)号：US20050072266A1
公开(公告)日：2005-04-07
申请号：US10601734
申请日：2003-06-23
申请人： Martin Zaech , Anton Kunz
发明人： Martin Zaech , Anton Kunz
IPC分类号： C23C14/50 , F16H37/00 , H01L21/00 , H01L21/687
CPC分类号： H01L21/68764 , C23C14/505 , H01J2237/202 , H01L21/6715 , H01L21/68771 , Y10T74/19
摘要： A planet system workpiece support for a vacuum treatment apparatus includes a sun system rotatable in the vacuum treatment apparatus about a sun system axle to be coupled to a drive. At least one planet system is rotatable on planet axle and is supported on the sun system. The planet system has a driving coupling for driving the planet system and the support has at least one moon system supported on the planet system and rotatable about a moon axle with a driving connection to the sun system. At least one workpiece is received on the moon system and the driving connection is established, at least during operation, uninterruptedly between sun system and moon system.
摘要翻译：用于真空处理设备的行星系统工件支撑件包括可在真空处理设备中围绕要耦合到驱动器的太阳系轴线旋转的太阳系。至少一个行星系统可以在行星轴上旋转并被支撑在太阳系统上。行星系统具有用于驱动行星系统的驱动联接器，并且支撑件具有支撑在行星系统上的至少一个月球系统，并且能够围绕具有与太阳系统的驱动连接的月球轴旋转。在月球系统上至少接收一个工件，至少在运行期间建立驱动连接，太阳系和月球系统之间不间断。

2. 发明授权

US06620254B2 Planetary system workpiece support and method for surface treatment of workpieces 失效
公开(公告)号：US06620254B2
公开(公告)日：2003-09-16
申请号：US09879527
申请日：2001-06-12
申请人： Martin Zaech , Anton Kunz
发明人： Martin Zaech , Anton Kunz
IPC分类号： C23C1600
CPC分类号： C23C14/505
摘要： A vacuum treatment workpiece support and method for a vacuum treatment apparatus, uses a sun system that is rotatable with respect to the apparatus about a sun system axle. The sun system is coupled to an apparatus-side drive. At least one planet system supported on the sun system, is rotatable about a planet axle and is provided with a driving coupling with respect to the apparatus. At least one moon system is supported on the planet system, and is rotatable about a moon axle with a driving connection to the sun system. A receiver for at least one workpiece is provided on the moon system. The driving connection is established, at least during operation of the apparatus, in an uninterrupted manner, between the sun system and the moon system.

3. 发明授权

US07081166B2 Planetary system workpiece support and method for surface treatment of workpieces 有权
标题翻译：行星系统工件支撑和工件表面处理方法
公开(公告)号：US07081166B2
公开(公告)日：2006-07-25
申请号：US10601734
申请日：2003-06-23
申请人： Martin Zaech , Anton Kunz
发明人： Martin Zaech , Anton Kunz
IPC分类号： C23C16/00 , C23C13/08
CPC分类号： H01L21/68764 , C23C14/505 , H01J2237/202 , H01L21/6715 , H01L21/68771 , Y10T74/19
摘要： A planet system workpiece support for a vacuum treatment apparatus includes a sun system rotatable in the vacuum treatment apparatus about a sun system axle to be coupled to a drive. At least one planet system is rotatable on planet axle and is supported on the sun system. The planet system has a driving coupling for driving the planet system and the support has at least one moon system supported on the planet system and rotatable about a moon axle with a driving connection to the sun system. At least one workpiece is received on the moon system and the driving connection is established, at least during operation, uninterruptedly between sun system and moon system.
摘要翻译：用于真空处理设备的行星系统工件支撑件包括可在真空处理设备中围绕要耦合到驱动器的太阳系轴线旋转的太阳系。至少一个行星系统可以在行星轴上旋转并被支撑在太阳系统上。行星系统具有用于驱动行星系统的驱动联接器，并且支撑件具有支撑在行星系统上的至少一个月球系统，并且能够围绕具有与太阳系统的驱动连接的月球轴旋转。在月球系统上至少接收一个工件，至少在运行期间建立驱动连接，太阳系和月球系统之间不间断。

4. 发明授权

US5013268A Device for connecting a heating wire to a current conductor terminal 失效
标题翻译：将加热线连接到电流导体端子的装置
公开(公告)号：US5013268A
公开(公告)日：1991-05-07
申请号：US463373
申请日：1990-01-11
申请人： Anton Kunz
发明人： Anton Kunz
IPC分类号： H01R4/38 , H01R4/50
CPC分类号： H01R4/5058
摘要： In order to make a connection between a heating wire for the production of a stream of ions and a current conductor terminal the heating wire which is enclosed by a shoe into an axial bore at the end of the current conductor and is clampingly held by a clamping member in form of a sphere pressed against the shoe, whereby a tapered section of the screw bolt is pressed the sphere, said screw bolt being screwed into a tapped hole in the current conductor terminal which extends parallel to the hole in which said shoe is received.
摘要翻译：为了在用于产生离子流的电热丝和电流导体端之间形成连接，该电线将由电线导体的末端封闭的电线导入轴向孔内并夹紧球体形式的构件被压靠在鞋上，由此螺钉的锥形部分被挤压球体，所述螺栓螺纹拧入当前导体端子中的螺纹孔中，该导电端子平行于接收所述鞋的孔延伸。

5. 发明授权

US5415694A Vacuum coating apparatus with rotary-driven substrate carrier 失效
标题翻译：具有旋转驱动衬底载体的真空镀膜设备
公开(公告)号：US5415694A
公开(公告)日：1995-05-16
申请号：US58539
申请日：1993-05-05
申请人： Anton Kunz , Erich Bergmann
发明人： Anton Kunz , Erich Bergmann
IPC分类号： C23C14/24 , C23C14/50 , F16L39/06 , C23C16/00
CPC分类号： F16L39/06 , C23C14/505
摘要： In a vacuum coating apparatus with a rotary-driven substrate carrier, the bearing of the substrate carrier is implemented as a quasi-hydrostatic rotary transmission feedthrough. For receiving the parts to be coated, a mounting is provided which is operationally connected to a drive shaft. The drive shaft has a bearing disk. In operation this bearing disk is hydrostatically supported wherein the bearing can take place on both sides of the bearing disk via at least one annular channel for each side. The drive shaft is carried radially in the wall of the apparatus and the annular channels are disposed in a spring-supported housing. The bearing disk, in turn, is provided with radial channels which are operationally connected with axial channels of the shaft portion of the drive shaft. In this way the bearing of rotary-driven substrate carriers in the vacuum coating apparatus is solved.
摘要翻译：在具有旋转驱动衬底载体的真空涂覆设备中，衬底载体的轴承被实现为准流体静力学旋转传递馈通。为了接收待涂覆的部件，提供了可操作地连接到驱动轴的安装件。驱动轴具有轴承盘。在操作中，该轴承盘被水压支撑，其中轴承可以通过用于每一侧的至少一个环形通道在轴承盘的两侧发生。驱动轴径向承载在设备的壁上，环形通道设置在弹簧支撑的壳体中。轴承盘又设置有径向通道，其与驱动轴的轴部分的轴向通道可操作地连接。以这种方式解决了真空镀膜装置中的旋转驱动衬底载体的轴承。

6. 发明授权

US5196062A Arrangement for holding and cooling work pieces positioned next to one another 失效
标题翻译：控制和冷却工作安排的安排下一步到另一个
公开(公告)号：US5196062A
公开(公告)日：1993-03-23
申请号：US688093
申请日：1991-04-19
申请人： Erich Bergmann , Martin Zach , Anton Kunz
发明人： Erich Bergmann , Martin Zach , Anton Kunz
IPC分类号： B22D30/00 , C23C14/50 , C23C14/54 , C23C14/56
CPC分类号： C23C14/541 , C23C14/50
摘要： An arrangement for holding and cooling bearing shell blanks (2) positioned one next to the other during a coating process in a vacuum chamber, has cooling body and work piece holding pairs (3) which are detachable from each other and which are connected to one another via a cooling surface (9) and a heat transmission surface (7). A work piece holding part (5) of the cooling body and the work piece holding pair (3) is implemented so that the bearing shell blanks (2) are placed in a concave bearing surface (32) of the holding part during the coating process and are kept, over their entire surface, at a temperature determined by the cooling surface temperature. A temperature gradient can be formed if teflon foil strips are placed on the bearing surface. These allow only a direct heat contact of the apex of the bearing shell blanks (2) with the bearing surface. At the apex then, a deposition of fine particles with a high surface hardness, and at the margins a deposition of coarse particles with a correspondingly lesser surface hardness, take place. During the coating, the work piece holding parts (5) can already be loaded whereby the pass in the production of bearing shells (2) can be considerably shortened.
摘要翻译：在真空室中的涂布过程中，用于保持和冷却轴承壳坯料（2）的布置，具有冷却体和工件保持件（3），它们彼此可拆卸并连接到一个另一个经由冷却表面（9）和传热表面（7）。实施冷却体和工件保持对（3）的工件保持部（5），使得在涂布过程中轴承壳坯（2）被放置在保持部的凹入支承面（32）并在其整个表面上以由冷却表面温度确定的温度保持。如果聚四氟乙烯箔带放置在轴承表面上，则可以形成温度梯度。这些仅允许轴承壳坯料（2）的顶点与轴承表面的直接热接触。在顶点处，沉积具有高表面硬度的细颗粒，并且在边缘处发生具有相应较小表面硬度的粗颗粒的沉积。在涂覆期间，工件保持部件（5）可以被装载，从而可以显着缩短轴承壳体（2）的生产过程。

7. 发明授权

US06761772B2 Workpiece support 有权
标题翻译：工件支持
公开(公告)号：US06761772B2
公开(公告)日：2004-07-13
申请号：US10141432
申请日：2002-05-08
申请人： Laurent Giacri , Anton Kunz
发明人： Laurent Giacri , Anton Kunz
IPC分类号： H01L2100
CPC分类号： C23C14/505
摘要： In order to ensure uniform coating of workpieces, workpiece holders carrying said workpieces are rotatably mounted at the edge of a turntable, a plurality of which are fastened in succession at adjustable distances to a drivable shaft. In order to trigger intermittent rotations of the workpiece holders, a driver finger of a driving device engages in each case a drive wheel thereof on each revolution of the turntable, so that the workpiece holders are rotated relative to the turntable through a specific angle in a direction opposite to the direction of rotation of said turntable. In order that no readjustment of the driver finger is required, for example in the case of a change of distances between the turntables, said driver finger is fastened to an extension of a rotating ring, which is mounted on the turntable itself so as to be non-displaceable in the direction of the shaft but rotatable about said shaft. The extension cooperates with a rod serving as a stop, in such a way that rotation of the driving device together with the turntable is prevented.
摘要翻译：为了确保工件的均匀涂布，承载所述工件的工件保持架可旋转地安装在转台的边缘处，其多个可调节距离连接到可驱动的轴。为了触发工件保持器的间歇旋转，驱动装置的驾驶员指状物在转盘的每转一周的情况下都啮合在驱动轮上，使得工件保持器相对于转盘旋转一定角度方向与所述转台的旋转方向相反。为了不需要驾驶员手指的重新调整，例如在转盘之间的距离变化的情况下，所述驾驶员手指固定在旋转环的延伸部上，该旋转环安装在转盘本身上，从而为在轴的方向上不能移位，而是能够围绕所述轴旋转。延伸部与用作止动件的杆配合，从而防止驱动装置与转盘一起旋转。

8. 发明授权

US4999458A Electrical current lead-in device at a vacuum chamber 失效
标题翻译：真空室内的电流引入装置
公开(公告)号：US4999458A
公开(公告)日：1991-03-12
申请号：US463372
申请日：1990-01-11
申请人： Anton Kunz
发明人： Anton Kunz
IPC分类号： B01J3/00 , C23C14/22 , C23C14/24 , C23C16/50 , H01B17/30
CPC分类号： C23C14/22 , H01B17/303
摘要： A cylinder is flanged onto the wall of a vacuum chamber in which a workpiece is to be coated and is to brought into contact with a current or power conductor for accomplishing same, and the current conductor in the form of a piston rod extends through this cylinder. The piston rod includes at one end a disk of graphite intended to contact the workpiece. An annular piston which is rigidly mounted on the piston rod is subjected at its outer side to the atmospheric pressure and closes a space off located within the cylinder and enclosed by a bellows, which space communicates with the vacuum chamber. A spiral pressure spring within the cylinder which rests against its bottom and against the inner side of the piston counteracts the atmospheric pressure at the outer side of the piston. In case of a subatmospheric pressure in the space, the piston is moved inwards into the cylinder against the action of the spring and the contact between the current conductor and the workpiece is established automatically. If the vacuum chamber and the space is aerated, the spring urges the piston in the opposite direction such that the current contact is interrupted automatically, thus excluding faulty operator manipulations.
摘要翻译：气缸被法兰连接到真空室的壁上，其中工件将被涂覆并且与电流或电力导体接触以实现它，并且活塞杆形式的电流导体延伸穿过该气缸。活塞杆的一端包括用于接触工件的石墨盘。刚性地安装在活塞杆上的环形活塞在其外侧经受大气压力并且封闭位于气缸内的空间，并由波纹管封闭，该空间与真空室连通。气缸内的螺旋压力弹簧靠在其底部并抵靠活塞的内侧抵消活塞外侧的大气压力。在空间中的低于大气压力的情况下，活塞抵抗弹簧的作用向内移动到气缸中，并且自动地建立电流导体和工件之间的接触。如果真空室和空间被充气，则弹簧以相反的方向推动活塞，使得电流接触自动中断，从而排除操作者的不良操作。

9. 发明授权

US4889494A Device for transmission of electrical currents and rotating machine parts 失效
标题翻译：用于传输电流和旋转机器部件的装置
公开(公告)号：US4889494A
公开(公告)日：1989-12-26
申请号：US122117
申请日：1987-11-17
申请人： Anton Kunz
发明人： Anton Kunz
IPC分类号： H01R39/64
CPC分类号： H01R39/64
摘要： A current-conducting bearing or contact bearing includes contact-making surfaces of a bearing bolt and a shaft fashioned as an axial cone and a hollow cone, respectively. With a suitable choice of materials of the current conducting parts, such as special bronzes, an allowable current load of up to 200 amperes per square cm is possible, compared to 4 amperes per square cm in the case of hard carbon and 25-30 amperes per square cm in the case of bronze carbon of traditional brushes in slip rings of electric machines.
摘要翻译：导电轴承或接触轴承包括分别形成为轴向锥体和中空锥体的轴承螺栓和轴的接触形成表面。通过适当选择当前导电部件（如特殊青铜）的材料，每平方厘米可允许的电流负载可达200安培，而硬碳和25-30安培的情况下，每平方厘米的安培数为4安培传统电刷青铜碳在电机滑环中为每平方厘米。

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