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1. 发明授权

US06820489B2 Optical differential pressure sensor 有权
公开(公告)号：US06820489B2
公开(公告)日：2004-11-23
申请号：US10646368
申请日：2003-08-22
申请人： Mark R. Fernald , Timothy J. Bailey , Matthew B. Miller , James M. Sullivan , James R. Dunphy , Michael A. Davis , Christopher J. Wright , Alan D. Kersey , Martin A. Putnam , Robert N. Brucato , Paul E. Sanders
发明人： Mark R. Fernald , Timothy J. Bailey , Matthew B. Miller , James M. Sullivan , James R. Dunphy , Michael A. Davis , Christopher J. Wright , Alan D. Kersey , Martin A. Putnam , Robert N. Brucato , Paul E. Sanders
IPC分类号： G01L900
CPC分类号： G01L11/025
摘要： A fiber grating pressure sensor includes an optical sensing element which includes an optical fiber having a Bragg grating impressed therein which is encased within and fused to at least a portion of a glass capillary tube and/or a large diameter waveguide grating having a core and a wide cladding. Light is incident on the grating and light is reflected from the grating at a reflection wavelength &lgr;1. The sensing element may be used by itself as a sensor or located within a housing. When external pressure P increases, the grating is compressed and the reflection wavelength &lgr;1 changes. The shape of the sensing element may have other geometries, e.g., a “dogbone” shape, so as to enhance the sensitivity of shift in &lgr;1 due to applied external pressure and may be fused to an outer shell.

2. 发明授权

US06422084B1 Bragg grating pressure sensor 有权
标题翻译：布拉格光栅压力传感器
公开(公告)号：US06422084B1
公开(公告)日：2002-07-23
申请号：US09455867
申请日：1999-12-06
申请人： Mark R. Fernald , Timothy J. Bailey , Matthew B. Miller , James M. Sullivan , James R. Dunphy , Michael A. Davis , Christopher J. Wright , Alan D. Kersey , Martin A. Putnam , Robert N. Brucato , Paul E. Sanders
发明人： Mark R. Fernald , Timothy J. Bailey , Matthew B. Miller , James M. Sullivan , James R. Dunphy , Michael A. Davis , Christopher J. Wright , Alan D. Kersey , Martin A. Putnam , Robert N. Brucato , Paul E. Sanders
IPC分类号： G01L900
CPC分类号： G01L11/025
摘要： A fiber grating pressure sensor includes an optical sensing element 20, 600 which includes an optical fiber 10 having a Bragg grating 12 impressed therein which is encased within and fused to at least a portion of a glass capillary tube 20 and/or a large diameter waveguide grating 600 having a core and a wide cladding and which has an outer transverse dimension of at least 0.3 mm. Light 14 is incident on the grating 12 and light 16 is reflected from the grating 12 at a reflection wavelength &lgr;1. The sensing element 20, 600 may be used by itself as a sensor or located within a housing 48, 60, 90, 270, 300. When external pressure P increases, the grating 12 is compressed and the reflection wavelength &lgr;1 changes. The shape of the sensing element 20, 600 may have other geometries, e.g., a “dogbone” shape, so as to enhance the sensitivity of shift in &lgr;1 due to applied external pressure and may be fused to an outer shell 50. At least a portion of the sensing element may be doped between a pair of gratings 150, 152, to form a compression-tuned laser or the grating 12 or gratings 150, 152 may be constructed as a tunable DFB laser. Also, the axial ends of element 20, 600 where the fiber 10 exits the tube 20 may have an inner tapered region 22 and/or a protruding tapered (or fluted) axial section 27 to provide strain relief or improved pull strength for the fiber 10. A temperature grating 270 may be used to measure temperature and allow for a temperature-corrected pressure measurement. The sensor may be suspended within an outer housing 112, by a fluid, spacers, or other means. The invention may also be used as a force transducer.
摘要翻译：光纤光栅压力传感器包括光学感测元件20,600，光学传感元件20,600包括光纤10，该光纤10具有印刷在其中的布拉格光栅12，该光纤10包围玻璃毛细管20和/或大直径波导的至少一部分光栅600具有芯和宽包层，并且具有至少0.3mm的外横向尺寸。光14入射到光栅12上，光16以反射波长lambd1从光栅12反射。感测元件20,600可以自身用作传感器或位于壳体48,60,90,270,3300内。当外部压力P增加时，光栅12被压缩并且反射波长lambd1改变。感测元件20,600的形状可以具有其他几何形状，例如“狗骨”形状，以便增强由于施加的外部压力而导致的羔羊皮1偏移的灵敏度，并且可以将其熔合到外壳50上。至少感测元件的一部分可以掺杂在一对光栅150,152之间以形成压缩调谐的激光器，或者光栅12或光栅150,152可被构造为可调DFB激光器。此外，纤维10离开管20的元件20,600的轴向端部可以具有内锥形区域22和/或突出的锥形（或槽纹）轴向部分27，以提供应变消除或改进的纤维10的拉伸强度可以使用温度光栅270来测量温度并允许进行温度校正的压力测量。传感器可以通过流体，间隔件或其他装置悬挂在外壳体112内。本发明也可以用作力传感器。

3. 发明授权

US06776045B2 Bragg grating pressure sensor for industrial sensing applications 有权
标题翻译：用于工业传感应用的布拉格光栅压力传感器
公开(公告)号：US06776045B2
公开(公告)日：2004-08-17
申请号：US10007735
申请日：2001-11-08
申请人： Mark R. Fernald , Timothy J. Bailey , Matthew B. Miller , James M. Sullivan , James R. Dunphy , Michael A. Davis , Christopher J. Wright , Alan D. Kersey , Martin A. Putnam , Robert N. Brucato , Paul E. Sanders
发明人： Mark R. Fernald , Timothy J. Bailey , Matthew B. Miller , James M. Sullivan , James R. Dunphy , Michael A. Davis , Christopher J. Wright , Alan D. Kersey , Martin A. Putnam , Robert N. Brucato , Paul E. Sanders
IPC分类号： G01L900
CPC分类号： G01L11/025
摘要： A fiber grating pressure sensor for use in an industrial process includes an optical sensing element 20,600 which includes an optical fiber 10 having a Bragg grating 12 impressed therein which is encased within and fused to at least a portion of a glass capillary tube 20 and/or a large diameter waveguide grating 600 having a core and a wide cladding and which has an outer transverse dimension of at least 0.3 mm. Light 14 is incident on the grating 12 and light 16 is reflected from the grating 12 at a reflection wavelength &lgr;1. The sensing element 20,600 may be used by itself as a sensor or located within a housing 48,60,90,270,300. When external pressure P increases, the grating 12 is compressed and the reflection wavelength &lgr;1 changes. The shape of the sensing element 20,600 may have other geometries, e.g., a “dogbone” shape, so as to enhance the sensitivity of shift in &lgr;1 due to applied external pressure and may be fused to an outer shell 50. A temperature grating 270 may be used to measure temperature and allow for a temperature-corrected pressure measurement. The sensor may be suspended within an outer housing 112, by a fluid, spacers, or other means. The sensor may also be combined with an instrument, an opto-electronic converter and a controller in an industrial process control system.
摘要翻译：用于工业过程的光纤光栅压力传感器包括光学传感元件20,600，光学传感元件20,600包括光纤10，该光纤10具有印刷在其中的布拉格光栅12，该布置光栅12被封装在玻璃毛细管20的至少一部分内并与其融合，和/或具有芯和宽包层并且具有至少0.3mm的外横向尺寸的大直径波导光栅600。光14入射到光栅12上，光16以反射波长λ1从光栅12反射。感测元件20,600可以自身用作传感器或位于壳体48,60,270,300内。当外部压力P增加时，光栅12被压缩，反射波长λ1变化。感测元件20,600的形状可以具有其他几何形状，例如“狗骨”形状，以便增强由于施加的外部压力而导致的λ1偏移的灵敏度，并且可以将其熔合到外壳50.温度光栅270可以用于测量温度并允许进行温度校正的压力测量。传感器可以通过流体，间隔件或其他装置悬挂在外壳体112内。传感器还可以与工业过程控制系统中的仪器，光电转换器和控制器组合。

4. 发明授权

US06668656B2 Optical sensor having differing diameters 有权
标题翻译：具有不同直径的光学传感器
公开(公告)号：US06668656B2
公开(公告)日：2003-12-30
申请号：US10191710
申请日：2002-07-09
申请人： Mark R. Fernald , Timothy J. Bailey , Matthew B. Miller , James M. Sullivan , James R. Dunphy , Michael A. Davis , Christopher J. Wright , Alan D. Kersey , Martin A. Putnam , Robert N. Brucato , Paul E. Sanders
发明人： Mark R. Fernald , Timothy J. Bailey , Matthew B. Miller , James M. Sullivan , James R. Dunphy , Michael A. Davis , Christopher J. Wright , Alan D. Kersey , Martin A. Putnam , Robert N. Brucato , Paul E. Sanders
IPC分类号： G01L900
CPC分类号： G01L11/025
摘要： A fiber Bragg grating based sensor is disclosed. The sensor comprises an optical waveguide having a core and a cladding. The core comprises a pressure sensor such as a fiber Bragg grating. In one embodiment, a support is affixed around the cladding which has two first portions each having a first diameter. The pressure sensor is located at a second portion of the support positioned between the two first portions which has a second smaller diameter, thus giving the sensor a “dog bone” shape. In another embodiment, the dog bone shape is imparted by positioning the pressure sensor at a portion of a waveguide having a reduced cladding diameter.
摘要翻译：公开了一种基于光纤布拉格光栅的传感器。传感器包括具有芯和包层的光波导。核心包括诸如光纤布拉格光栅的压力传感器。在一个实施例中，支撑件固定在包层周围，该包层具有两个各自具有第一直径的第一部分。所述压力传感器位于所述支撑件的位于所述两个第一部分之间的第二部分，所述第二部分具有第二较小的直径，从而使所述传感器成为“狗骨”形状。在另一个实施例中，通过将压力传感器定位在具有减小的包层直径的波导的部分处来施加狗骨形状。

5. 发明授权

US06298184B1 Method and apparatus for forming a tube-encased bragg grating 有权
标题翻译：用于形成管状布拉格光栅的方法和装置
公开(公告)号：US06298184B1
公开(公告)日：2001-10-02
申请号：US09205845
申请日：1998-12-04
申请人： Martin A. Putnam , Timothy J. Bailey , Matthew B. Miller , James M. Sullivan , Mark R. Fernald , Michael A. Davis , Christopher J. Wright
发明人： Martin A. Putnam , Timothy J. Bailey , Matthew B. Miller , James M. Sullivan , Mark R. Fernald , Michael A. Davis , Christopher J. Wright
IPC分类号： G02B634
CPC分类号： G02B6/02133 , G02B2006/02161
摘要： A method and apparatus for forming a tube-encased fiber grating includes an optical fiber 28 which is encased within and fused to at least a portion of a glass capillary tube 120 and a substantially transparent index-matching medium 122, such as an optically flat window, having an optically flat surface 126 adjacent to the tube 120. A substantially transparent index-matching intermediate material (e.g., UV transparent oil) 124 is used between the window 22 and the tube 120 to substantially eliminate the interface between the tube 120 and the medium 122. A pair of writing beams 26,34 are incident on and pass through the medium 122, the tube 120 and intersect and interfere in a region 30 on the fiber 28. Also, the width Wb of the writing beams 26,34 may be set to be less than the width Woil of the intermediate material 124 to eliminate surface damage (ablations) of the tube 120. Attentively, the medium 122 may have a geometry to eliminate surface ablations (e.g., a collar shape) and/or to match the shape of the tube 120. More than one grating or pair of gratings may be written in the tube-encased fiber or one or more gratings may be formed in multiple fibers 28,250 encased in the tube 120. Further, high intensity writing beams 26,34 on the fiber 28 may be achieved by having the medium 122 have a predetermined thickness T.
摘要翻译：用于形成管封装光纤光栅的方法和装置包括：光纤28，其被包裹在玻璃毛细管120和基本上透明的折射率匹配介质122的至少一部分内并且熔合到光纤平面窗口具有与管120相邻的光学平坦表面126.在窗口22和管120之间使用基本上透明的折射率匹配中间材料（例如，UV透明油）124，以基本上消除管120和管120之间的界面介质122.一对写入光束26,34入射并穿过介质122，管120并且交叉并干涉光纤28上的区域30.而且，写入光束26,34的宽度Wb可以被设定为小于中间材料124的宽度Wo，以消除管120的表面损伤（消融）。注意地，介质122可以具有几何形状以消除表面消融（例如，套环形状）和/或t o匹配管120的形状。可以将多于一个的光栅或一对光栅写入管封装的光纤中，或者一个或多个光栅可以形成在封装在管120中的多个光纤28,250中。此外，高强度写入光束 26,34可以通过使介质122具有预定厚度T来实现。

6. 发明授权

US06813013B2 Pressure-isolated bragg grating temperature sensor 有权
标题翻译：压力隔离布拉格光栅温度传感器
公开(公告)号：US06813013B2
公开(公告)日：2004-11-02
申请号：US10193876
申请日：2002-07-12
申请人： Mark R. Fernald , Timothy J. Bailey , Matthew B. Miller , James M. Sullivan , Richard T. Jones , Christopher J. Wright , Alan D. Kersey , Martin A. Putnam , Robert N. Brucato , Paul E. Sanders
发明人： Mark R. Fernald , Timothy J. Bailey , Matthew B. Miller , James M. Sullivan , Richard T. Jones , Christopher J. Wright , Alan D. Kersey , Martin A. Putnam , Robert N. Brucato , Paul E. Sanders
IPC分类号： G01N2100
CPC分类号： G01K11/3206 , G01D5/35316 , G01K5/52
摘要： A pressure-isolated Bragg grating temperature sensor includes an optical element, which includes an optical fiber having at least one Bragg grating disposed therein. The Bragg grating is encased within and fused to at least a portion of an inner glass capillary tube, or comprises a large diameter waveguide grating having a core and a wide cladding and having the grating disposed therein, encased within an outer tube to form a chamber. An extended portion of the sensing element that has the grating therein extends inwardly into the chamber, which allows the grating to sense temperature changes but isolates the grating from external pressure. More than one grating or pair of gratings may be used and more than one fiber or optical core may be used. At least a portion of the sensing element may be doped between a pair of gratings to form a temperature tuned laser, or the grating or gratings may be configured as a tunable DFB laser disposed in the sensing element.
摘要翻译：压力隔离布拉格光栅温度传感器包括光学元件，其包括其中布置有至少一个布拉格光栅的光纤。布拉格光栅被封装在内玻璃毛细管的至少一部分中并且熔合到内玻璃毛细管的至少一部分中，或包括具有芯和宽包层并且具有设置在其中的光栅的大直径波导光栅，该光栅包围在外管内以形成室。其中具有光栅的感测元件的延伸部分向内延伸到腔室中，这允许光栅感测温度变化，但是将光栅与外部压力隔离。可以使用多于一个的光栅或一对光栅，并且可以使用多于一个的光纤或光纤。感测元件的至少一部分可以掺杂在一对光栅之间以形成温度调节的激光器，或者光栅或光栅可被配置为设置在感测元件中的可调DFB激光器。

7. 发明授权

US06452667B1 Pressure-isolated bragg grating temperature sensor 有权
标题翻译：压力隔离布拉格光栅温度传感器
公开(公告)号：US06452667B1
公开(公告)日：2002-09-17
申请号：US09456113
申请日：1999-12-06
申请人： Mark R. Fernald , Timothy J. Bailey , Matthew B. Miller , James M. Sullivan , Richard T. Jones , Christopher J. Wright , Alan D. Kersey , Martin A. Putnam , Robert N. Brucato , Paul E. Sanders
发明人： Mark R. Fernald , Timothy J. Bailey , Matthew B. Miller , James M. Sullivan , Richard T. Jones , Christopher J. Wright , Alan D. Kersey , Martin A. Putnam , Robert N. Brucato , Paul E. Sanders
IPC分类号： G01N2100
CPC分类号： G01K11/3206 , G01D5/35316 , G01K5/52
摘要： A pressure-isolated Bragg grating temperature sensor includes an optical element which includes an optical fiber having at least one Bragg grating disposed therein. The Bragg grating is encased within and fused to at least a portion of an inner glass capillary tube, or comprises a large diameter waveguide grating having a core and a wide cladding and having the grating disposed therein, encased within an outer tube to form a chamber. An extended portion of the sensing element that has the grating therein extends inwardly into the chamber which allows the grating to sense temperature changes but isolates the grating from external pressure. More than one grating or pair of gratings may be used and more than one fiber or optical core may be used. At least a portion of the sensing element may be doped between a pair of gratings to form a temperature tuned laser, or the grating or gratings may be configured as a tunable DFB laser disposed in the sensing element.
摘要翻译：压力隔离布拉格光栅温度传感器包括光学元件，该光学元件包括其中布置有至少一个布拉格光栅的光纤。布拉格光栅被封装在内玻璃毛细管的至少一部分中并且熔合到内玻璃毛细管的至少一部分中，或包括具有芯和宽包层并且具有设置在其中的光栅的大直径波导光栅，该光栅包围在外管内以形成室。具有光栅的感测元件的延伸部分向内延伸到腔室中，允许光栅感测温度变化，但是将光栅与外部压力隔离。可以使用多于一个的光栅或一对光栅，并且可以使用多于一个的光纤或光纤。感测元件的至少一部分可以掺杂在一对光栅之间以形成温度调节的激光器，或者光栅或光栅可被配置为设置在感测元件中的可调DFB激光器。

8. 发明授权

US06490931B1 Fused tension-based fiber grating pressure sensor 有权
标题翻译：熔融张力光纤光栅压力传感器
公开(公告)号：US06490931B1
公开(公告)日：2002-12-10
申请号：US09399403
申请日：1999-09-20
申请人： Mark R. Fernald , Timothy J. Bailey , Matthew B. Miller , James M. Sullivan , James R. Dunphy , Christopher J. Wright , Martin A. Putnam , Robert J. Maron , Richard T. Jones , Guy A. Daigle , John J. Grunbeck , Alan D. Kersey
发明人： Mark R. Fernald , Timothy J. Bailey , Matthew B. Miller , James M. Sullivan , James R. Dunphy , Christopher J. Wright , Martin A. Putnam , Robert J. Maron , Richard T. Jones , Guy A. Daigle , John J. Grunbeck , Alan D. Kersey
IPC分类号： G01L900
CPC分类号： G01L1/242 , G01L11/025
摘要： A fused tension-based fiber grating pressure sensor includes an optical fiber having a Bragg grating impressed therein. The fiber is fused to tubes on opposite sides of the grating and an outer tube is fused to the tubes to form a chamber. The tubes and fiber may be made of glass. Light is incident on the grating and light is reflected from the grating at a reflection wavelength &lgr;1. The grating is initially placed in tension as the pressure P increases, the tension on the grating reduced and the reflection wavelength shifts accordingly. A temperature grating may be used to measure temperature and allow for a temperature-corrected pressure measurement.
摘要翻译：基于熔融张力的光纤光栅压力传感器包括其中印有布拉格光栅的光纤。纤维被熔合到光栅的相对侧上的管，并且外管与管融合以形成室。管和纤维可以由玻璃制成。光入射到光栅上，光以反射波长lambd1从光栅反射。当压力P增加时，光栅最初处于张力状态，光栅上的张力减小，反射波长相应地移动。温度光栅可用于测量温度并允许进行温度校正的压力测量。

9. 发明授权

US06519388B1 Tube-encased fiber grating 有权
标题翻译：管状光纤光栅
公开(公告)号：US06519388B1
公开(公告)日：2003-02-11
申请号：US09455865
申请日：1999-12-06
申请人： Mark R. Fernald , Timothy J. Bailey , Matthew B. Miller , James M. Sullivan , Michael A. Davis , Peter Ogle , Alan D. Kersey , Martin A. Putnam , Robert N. Brucato , Paul E. Sanders
发明人： Mark R. Fernald , Timothy J. Bailey , Matthew B. Miller , James M. Sullivan , Michael A. Davis , Peter Ogle , Alan D. Kersey , Martin A. Putnam , Robert N. Brucato , Paul E. Sanders
IPC分类号： G02B634
CPC分类号： G02B6/022 , G02B6/0218
摘要： A tube-encased fiber grating includes an optical fiber 10 having at least one Bragg grating 12 impressed therein which is embedded within a glass capillary tube 20. Light 14 is incident on the grating 12 and light 16 is reflected at a reflection wavelength &lgr;1. The shape of the tube 20 may be other geometries (e.g., a “dogbone” shape) and/or more than one concentric tube may be used or more than one grating or pair of gratings may be used. The fiber 10 may be doped at least between a pair of gratings 150,152, encased in the tube 20 to form a tube-encased compression-tuned fiber laser or the grating 12 or gratings 150,152 may be constructed as a tunable DFB fiber laser encased in the tube 20. Also, the tube 20 may have an inner region 22 which is tapered away from the fiber 10 to provide strain relief for the fiber 10, or the tube 20 may have tapered (or fluted) sections 27 which have an outer geometry that decreases down to the fiber 10 and provides added fiber pull strength. Also, the tube-encased grating 12 exhibits lower mode coupling from the fiber core to the cladding modes due to the increased diameter of the cladding where the tube 20 is fused to the fiber 10 where the grating is located 12.
摘要翻译：管状光纤光栅包括光纤10，其具有嵌入其中的至少一个布拉格光栅12，该布拉格光栅12嵌入玻璃毛细管20内。光14入射到光栅12上，光16以反射波长lambd1反射。管20的形状可以是其他几何形状（例如，“狗骨”形状）和/或可以使用多于一个的同心管，或者可以使用多于一个的光栅或一对光栅。纤维10可以至少掺杂在一对光栅150,152之间，封装在管20中以形成管封装的压缩调谐光纤激光器，或者光栅12或光栅150,152可被构造为包含在该光纤12中的可调DFB光纤激光器。管20也可以具有内部区域22，该内部区域22远离纤维10逐渐变细，以为纤维10提供应变消除，或者管20可以具有锥形（或凹槽）部分27，其具有外部几何形状降低到纤维10并提供增加的纤维拉伸强度。此外，由于包层的直径增加，管20被熔合到光栅位于12处的光纤10，管状光栅12表现出从纤维芯到包层模式的较低模式耦合。

10. 发明授权

US06363089B1 Compression-tuned Bragg grating and laser 有权
标题翻译：压缩调谐布拉格光栅和激光
公开(公告)号：US06363089B1
公开(公告)日：2002-03-26
申请号：US09691997
申请日：2000-10-19
申请人： Mark R. Fernald , Timothy J. Bailey , Matthew B. Miller , James M. Sullivan , Michael A. Davis , Robert N. Brucato , Martin A. Putnam , Alan D. Kersey , Paul E. Sanders
发明人： Mark R. Fernald , Timothy J. Bailey , Matthew B. Miller , James M. Sullivan , Michael A. Davis , Robert N. Brucato , Martin A. Putnam , Alan D. Kersey , Paul E. Sanders
IPC分类号： H01S310
CPC分类号： G02F1/0115 , G02B6/0218 , G02B6/022 , G02F1/0128 , G02F2201/307
摘要： A compression-tuned bragg grating includes a tunable optical element 20,600 which includes either an optical fiber 10 having at least one Bragg grating 12 impressed therein encased within and fused to at least a portion of a glass capillary tube 20or a large diameter waveguide grating 600 having a core and a wide cladding. Light 14 is incident on the grating 12 and light 16 is reflected at a reflection wavelength &lgr;1. The tunable element 20,600 is axially compressed which causes a shift in the reflection wavelength of the grating 12 without buckling the element. The shape of the element may be other geometries (e.g., a “dogbone” shape) and/or more than one grating or pair of gratings may be used and more than one fiber 10 or core 612 may be used. At least a portion of the element may be doped between a pair of gratings 150,152, to form a compression-tuned laser or the grating 12 or gratings 150,152 may be constructed as a tunable DFB laser. Also, the element 20 may have an inner tapered region 22 or tapered (or fluted) sections 27. The compression may be done by a PZT, stepper motor or other actuator or fluid pressure.
摘要翻译：压缩调谐布拉格光栅包括可调谐光学元件20,600，其包括光纤10，其具有印刷在其中的至少一个布拉格光栅12，该光纤10被封装在玻璃毛细管20或大直径波导光栅600的至少一部分中并且熔合到其中，一个核心和宽广的包层。光14入射到光栅12上，光16以反射波长lambd1反射。可调谐元件20,600被轴向压缩，这导致光栅12的反射波长的偏移而不使元件弯曲。元件的形状可以是其他几何形状（例如，“狗骨”形状）和/或可以使用多于一个的光栅或一对光栅，并且可以使用多于一个的光纤10或核612。元件的至少一部分可以掺杂在一对光栅150,152之间，以形成压缩调谐的激光器，或者光栅12或光栅150,152可被构造为可调DFB激光器。此外，元件20可以具有内锥形区域22或锥形（或凹槽）部分27.压缩可以由PZT，步进电动机或其他致动器或流体压力来实现。

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