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1. 发明申请

US20110123328A1 VACUUM PUMP 审中-公开
标题翻译：真空泵
公开(公告)号：US20110123328A1
公开(公告)日：2011-05-26
申请号：US12952568
申请日：2010-11-23
申请人： Markus Henry , Christian Beyer , Heinz Englaender , Rainer Hoelzer , Heinz-Dieter Odendahl
发明人： Markus Henry , Christian Beyer , Heinz Englaender , Rainer Hoelzer , Heinz-Dieter Odendahl
IPC分类号： F04D29/04
CPC分类号： F04D19/042 , F04D19/048 , F04D29/0563 , F04D29/058 , F04D29/059 , F16C32/0402 , F16C2360/45
摘要： A vacuum pump, particularly a turbomolecular pump or multi-inlet pump, comprises a rotor shaft (12) carrying at least one rotor means (14). The rotor shaft (12) is supported on the pressure side by a bearing assembly (56) and on the suction-side by a further bearing assembly (30). According to the invention, the suction-side bearing assembly (30) comprises an electromagnetic bearing (32,34). Further according to the invention, the pressure-side bearing assembly (56) comprises a ball bearing (58) so that the rotor shaft (12) can be given the largest possible length. The rolling bearing (58) is preferably biased by the electromagnetic bearing (32,34).
摘要翻译：真空泵，特别是涡轮分子泵或多入口泵，包括承载至少一个转子装置（14）的转子轴（12）。转子轴（12）由轴承组件（56）支撑在压力侧上，并通过另一个轴承组件（30）在吸力侧上。根据本发明，吸入侧轴承组件（30）包括电磁轴承（32,34）。此外，根据本发明，压力侧轴承组件（56）包括球轴承（58），使得转子轴（12）可以被给予最大可能的长度。滚动轴承（58）优选地被电磁轴承（32,34）偏置。

2. 发明申请

US20110311348A1 MULTI-INLET VACUUM PUMP 有权
标题翻译：多重真空泵
公开(公告)号：US20110311348A1
公开(公告)日：2011-12-22
申请号：US13203309
申请日：2010-02-23
申请人： Christian Beyer , Markus Henry , Heinz Englaender
发明人： Christian Beyer , Markus Henry , Heinz Englaender
IPC分类号： F04D19/04 , F01D1/36
CPC分类号： F04D19/046 , F04D19/042
摘要： A multi-inlet vacuum pump includes a first pump device (10) including a first rotor element (18) with a plurality of first rotor disks (20) serially arranged in the conveying direction (36), and a second pump device (12) including a further rotor element (26) with a plurality of second rotor disks (28) serially arranged in the conveying direction (36). A diameter of the second rotor disks (28) is at least partially larger than a diameter of the first rotor disks (20). A main inlet (32) sucks in a first fluid stream (34) with the first pump device (10). The first fluid stream (34) is conveyed in the direction of the further pump device (12). An intermediate inlet (38) sucks in a second fluid stream (40) with the second pump device (12). The second fluid stream (40) is conveyed in the direction of a pump outlet. A process of merging the two fluid streams (34,40) will occur within the second pump device (12), preferably between two adjacent second rotor disks (28) of the second pump device (12).
摘要翻译：多入口真空泵包括第一泵装置（10），第一泵装置（10）包括具有沿输送方向（36）串联布置的多个第一转子盘（20）的第一转子元件（18）和第二泵装置（12）包括具有沿传送方向（36）串联布置的多个第二转子盘（28）的另一个转子元件（26）。第二转子盘（28）的直径至少部分地大于第一转子盘（20）的直径。主入口（32）与第一泵装置（10）吸入第一流体流（34）。第一流体流（34）沿着另一个泵装置（12）的方向输送。中间入口（38）与第二泵装置（12）吸入第二流体流（40）。第二流体流（40）沿泵出口的方向输送。在第二泵装置（12）内，优选地在第二泵装置（12）的两个相邻的第二转子盘（28）之间将出现合并两个流体流（34,40）的过程。

3. 发明授权

US08992162B2 Multi-inlet vacuum pump 有权
标题翻译：多进口真空泵
公开(公告)号：US08992162B2
公开(公告)日：2015-03-31
申请号：US13257002
申请日：2010-03-03
申请人： Markus Henry , Heinz Englaender , Christian Beyer
发明人： Markus Henry , Heinz Englaender , Christian Beyer
IPC分类号： F04D19/04 , F04D29/38 , F04D29/52
CPC分类号： F04D19/042 , F04D29/522 , F05B2250/501
摘要： A multi-inlet vacuum pump has a first pump device (10) and a second pump device (12). The first pump device (10) includes a first rotor element (18) having a plurality of first rotor discs (20, 21) arranged consecutively in the delivery direction (36). The second rotor disc includes a second rotor element (26) having a plurality of second rotor discs (28) arranged consecutively in the delivery direction (36). A first fluid flow (34) is suctioned through a main inlet (32) by the first pump device (10) and delivered in the direction of the second pump device (12). A second fluid flow (40) is suctioned through an intermediate inlet (38) by the second pump device and delivered in the direction of a pump outlet. The diameter of the last rotor disc (21) of the first pump (10) substantially corresponds to the diameter of the first rotor (28) of the second pump device (12).
摘要翻译：多入口真空泵具有第一泵装置（10）和第二泵装置（12）。第一泵装置（10）包括具有沿输送方向（36）连续设置的多个第一转子盘（20,21）的第一转子元件（18）。第二转子盘包括具有沿输送方向（36）连续布置的多个第二转子盘（28）的第二转子元件（26）。第一流体流（34）通过第一泵装置（10）通过主入口（32）被抽吸并沿第二泵装置（12）的方向输送。第二流体流（40）通过第二泵装置通过中间入口（38）抽吸并沿泵出口的方向输送。第一泵（10）的最后一个转子盘（21）的直径基本上对应于第二泵装置（12）的第一转子（28）的直径。

4. 发明授权

US08926266B2 Multi-inlet vacuum pump 有权
标题翻译：多进口真空泵
公开(公告)号：US08926266B2
公开(公告)日：2015-01-06
申请号：US13203309
申请日：2010-02-23
申请人： Christian Beyer , Markus Henry , Heinz Englaender
发明人： Christian Beyer , Markus Henry , Heinz Englaender
IPC分类号： F04D19/04
CPC分类号： F04D19/046 , F04D19/042
摘要： A multi-inlet vacuum pump includes a first pump device (10) including a first rotor element (18) with a plurality of first rotor disks (20) serially arranged in the conveying direction (36), and a second pump device (12) including a further rotor element (26) with a plurality of second rotor disks (28) serially arranged in the conveying direction (36). A diameter of the second rotor disks (28) is at least partially larger than a diameter of the first rotor disks (20). A main inlet (32) sucks in a first fluid stream (34) with the first pump device (10). The first fluid stream (34) is conveyed in the direction of the further pump device (12). An intermediate inlet (38) sucks in a second fluid stream (40) with the second pump device (12). The second fluid stream (40) is conveyed in the direction of a pump outlet. A process of merging the two fluid streams (34,40) will occur within the second pump device (12), preferably between two adjacent second rotor disks (28) of the second pump device (12).
摘要翻译：多入口真空泵包括第一泵装置（10），第一泵装置（10）包括具有沿输送方向（36）串联布置的多个第一转子盘（20）的第一转子元件（18）和第二泵装置（12）包括具有沿传送方向（36）串联布置的多个第二转子盘（28）的另一个转子元件（26）。第二转子盘（28）的直径至少部分地大于第一转子盘（20）的直径。主入口（32）与第一泵装置（10）吸入第一流体流（34）。第一流体流（34）沿着另一个泵装置（12）的方向输送。中间入口（38）与第二泵装置（12）吸入第二流体流（40）。第二流体流（40）沿泵出口的方向输送。在第二泵装置（12）内，优选地在第二泵装置（12）的两个相邻的第二转子盘（28）之间将出现合并两个流体流（34,40）的过程。

5. 发明申请

US20120087776A1 MULTI-INLET VACUUM PUMP 有权
标题翻译：多重真空泵
公开(公告)号：US20120087776A1
公开(公告)日：2012-04-12
申请号：US13257002
申请日：2010-03-03
申请人： Markus Henry , Heinz Englaender , Christian Beyer
发明人： Markus Henry , Heinz Englaender , Christian Beyer
IPC分类号： F04D25/16
CPC分类号： F04D19/042 , F04D29/522 , F05B2250/501
摘要： A multi-inlet vacuum pump has a first pump device (10) and a second pump device (12). The first pump device (10) includes a first rotor element (18) having a plurality of first rotor discs (20, 21) arranged consecutively in the delivery direction (36). The second rotor disc includes a second rotor element (26) having a plurality of second rotor discs (28) arranged consecutively in the delivery direction (36). A first fluid flow (34) is suctioned through a main inlet (32) by the first pump device (10) and delivered in the direction of the second pump device (12). A second fluid flow (40) is suctioned through an intermediate inlet (38) by the second pump device and delivered in the direction of a pump outlet. The diameter of the last rotor disc (21) of the first pump (10) substantially corresponds to the diameter of the first rotor (28) of the second pump device (12).
摘要翻译：多入口真空泵具有第一泵装置（10）和第二泵装置（12）。第一泵装置（10）包括具有沿输送方向（36）连续设置的多个第一转子盘（20,21）的第一转子元件（18）。第二转子盘包括具有沿输送方向（36）连续布置的多个第二转子盘（28）的第二转子元件（26）。第一流体流（34）通过第一泵装置（10）通过主入口（32）被抽吸并沿第二泵装置（12）的方向输送。第二流体流（40）通过第二泵装置通过中间入口（38）抽吸并沿泵出口的方向输送。第一泵（10）的最后一个转子盘（21）的直径基本上对应于第二泵装置（12）的第一转子（28）的直径。

6. 发明授权

US06168374A Friction vacuum pump 有权
标题翻译：摩擦真空泵
公开(公告)号：US06168374A
公开(公告)日：2001-01-02
申请号：US09242004
申请日：1999-02-05
申请人： Robert Stolle , Heinz-Dieter Odendahl , Christian Beyer
发明人： Robert Stolle , Heinz-Dieter Odendahl , Christian Beyer
IPC分类号： F01D136
CPC分类号： F04C23/005 , F04D19/042 , F04D19/044 , F04D19/046
摘要： The present invention relates to a friction vacuum pump having at least one turbomolecular pump stage (2) joined at its pressure side to a screw pump stage (4). In order to improve the pump properties it is proposed that a filling stage (3) be arranged between the turbomolecular pump stage (2) and the screw pump stage (4) that has blades (13) whose length corresponds at the suction side to the active length of the blades at the pressure side of the turbomolecular pump stage (2), and at the pressure side to the depth of the suction-side region of the screw (14) of the screw stage (4).
摘要翻译：本发明涉及一种摩擦真空泵，其具有至少一个涡轮分子泵级（2），其在其压力侧连接到螺杆泵级（4）。为了提高泵性能，提出在涡轮分子泵级（2）和螺杆泵级（4）之间设置一个填充级（3），该级具有叶片（13），其叶片（13）的吸力侧对应于在涡轮分子泵级（2）的压力侧的叶片的有效长度和螺杆级（4）的螺杆（14）的吸入侧区域的深度的压力侧。

7. 发明申请

US20100176294A1 MASS SPECTROMETER ARRANGEMENT 失效
标题翻译：质谱仪安排
公开(公告)号：US20100176294A1
公开(公告)日：2010-07-15
申请号：US12663946
申请日：2008-06-03
申请人： Markus Henry , Christian Beyer
发明人： Markus Henry , Christian Beyer
IPC分类号： H01J49/24 , H01J49/26
CPC分类号： H01J49/24 , F04D19/042 , F04D29/522
摘要： The invention refers to a mass spectrometer arrangement (10) comprising a housing (86) having a mass spectrometer forevacuum vacuum chamber (20) with a mass spectrometer forevacuum outlet (30), at least two mass spectrometer high-vacuum vacuum chambers (21, 22, 23), and an integrated turbomolecular pump (12) connected with the high-vacuum vacuum chambers (21, 22, 23) and having a forevacuum outlet (89). The two forevacuum outlets (30, 89) open into a common forevacuum chamber (98) in the housing (86), which in turn opens into a housing outlet (88).
摘要翻译：本发明涉及一种质谱仪装置（10），其包括具有质谱仪前真空真空室（20）的壳体（86），其具有质谱仪前级真空出口（30），至少两个质谱仪的高真空真空室（21， 22,23）和与高真空真空室（21,22,23）连接并具有前级真空出口（89）的一体式涡轮分子泵（12）。两个前级真空出口（30,89）打开到壳体（86）中的共同的预真空室（98）中，该预热真空室又开启到壳体出口（88）中。

8. 发明授权

US06435811B1 Friction vacuum pump with a stator and a rotor 有权
标题翻译：带定子和转子的摩擦真空泵
公开(公告)号：US06435811B1
公开(公告)日：2002-08-20
申请号：US09700046
申请日：2000-11-08
申请人： Christian Beyer , Ralf Adamietz , Markus Henry , Gunter Schutz , Heinrich Engländer , Gerhard Wilhelm Walter , Hans-Rudolf Fischer
发明人： Christian Beyer , Ralf Adamietz , Markus Henry , Gunter Schutz , Heinrich Engländer , Gerhard Wilhelm Walter , Hans-Rudolf Fischer
IPC分类号： F03B500
CPC分类号： F04D17/168 , F04D19/046
摘要： The invention relates to a friction vacuum pump (1) with a stator (3) and a rotor (4), which form at least two pump stages (12, 13, 14) with one gas inlet (23, 28) each, as well as with junction for the pump stages, which are equipped with junction openings (36,37) and serve for the connection of the gas inlets (23, 28) of the pump stages with devices to be evacuated; in order to avoid high conductance losses it is proposed that the junction openings (36, 37) are located in a plane which is disposed laterally adjacent to the pump stages (12, 13, 14) such that the distance between the junction openings (36, 37) and the rotor axis (15) is of minimum feasible size.
摘要翻译：本发明涉及具有定子（3）和转子（4）的摩擦真空泵（1），其形成至少两个具有一个气体入口（23,28）的泵级（12,13,14），每个具有一个气体入口（23,28），如以及用于泵级的接头，其具有连接开口（36,37）并且用于将泵级的气体入口（23,28）与要抽真空的装置连接; 为了避免高电导损失，提出接合开口（36,37）位于横向邻近泵级（12,13,14）设置的平面中，使得接合开口（36,37）之间的距离，37）和转子轴（15）具有最小可行尺寸。

9. 发明授权

US08106354B2 Mass spectrometer arrangement 失效
标题翻译：质谱仪排列
公开(公告)号：US08106354B2
公开(公告)日：2012-01-31
申请号：US12663946
申请日：2008-06-03
申请人： Markus Henry , Christian Beyer
发明人： Markus Henry , Christian Beyer
IPC分类号： F04D19/04
CPC分类号： H01J49/24 , F04D19/042 , F04D29/522
摘要： The invention refers to a mass spectrometer arrangement (10) comprising a housing (86) having a mass spectrometer forevacuum vacuum chamber (20) with a mass spectrometer forevacuum outlet (30), at least two mass spectrometer high-vacuum vacuum chambers (21, 22, 23), and an integrated turbomolecular pump (12) connected with the high-vacuum vacuum chambers (21, 22, 23) and having a forevacuum outlet (89). The two forevacuum outlets (30, 89) open into a common forevacuum chamber (98) in the housing (86), which in turn opens into a housing outlet (88).
摘要翻译：本发明涉及一种质谱仪装置（10），其包括具有质谱仪前真空真空室（20）的壳体（86），其具有质谱仪前级真空出口（30），至少两个质谱仪的高真空真空室（21， 22,23）和与高真空真空室（21,22,23）连接并具有前级真空出口（89）的一体式涡轮分子泵（12）。两个前级真空出口（30,89）打开到壳体（86）中的共同的预真空室（98）中，该预热真空室又开启到壳体出口（88）中。

10. 发明申请

US20140123732A1 LEAK DETECTION DEVICE AND METHOD FOR CHECKING OBJECTS FOR FLUID TIGHTNESS BY MEANS OF A LEAK DETECTION DEVICE 有权
标题翻译：泄漏检测装置和方法，用于通过泄漏检测装置检测流体密度的物体
公开(公告)号：US20140123732A1
公开(公告)日：2014-05-08
申请号：US14131073
申请日：2012-05-18
申请人： Gerhard Wilhelm Walter , Guenter Holstein , Christian Beyer
发明人： Gerhard Wilhelm Walter , Guenter Holstein , Christian Beyer
IPC分类号： G01M3/02
CPC分类号： G01M3/02 , G01M3/202
摘要： A leak detection device has a test chamber which, for evacuation, is connected to an evacuation pump device. Moreover, the test chamber is connected by a test gas line to a test gas pump device. The test gas pump device is connected, at its main inlet, to a test gas detector, such that a detection of test gas can take place using the counter-current principle. A valve device is arranged in the test gas line. This valve device has a test gas chamber for temporary storage of test gas removed from the test chamber.
摘要翻译：泄漏检测装置具有用于抽真空连接到抽空泵装置的测试室。此外，试验室通过试验气体管线连接到试验气体泵装置。测试气体泵装置在其主入口处连接到测试气体检测器，使得可以使用逆流原理进行检测气体的检测。在测试气体管线中布置有阀装置。该阀装置具有用于临时存储从测试室移除的测试气体的测试气室。

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