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1. 发明申请

US20070247693A1 METHOD AND SYSTEM FOR PACKAGING A MEMS DEVICE 失效
标题翻译：用于包装MEMS器件的方法和系统
公开(公告)号：US20070247693A1
公开(公告)日：2007-10-25
申请号：US11679134
申请日：2007-02-26
申请人： Mark Miles , Jeffrey Sampsell
发明人： Mark Miles , Jeffrey Sampsell
IPC分类号： B81B7/04 , B81C1/00 , G02F1/00
CPC分类号： B81C1/0023 , G02B26/001 , Y10T29/49002
摘要： A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device.
摘要翻译：描述了基于MEMS的显示装置，其中干涉式调制器的阵列被配置为将光反射通过透明基板。透明基板被密封到背板，并且背板可以包含用于控制干涉式调制器阵列的电子电路。背板可以为诸如可用于控制显示器状态的电子部件等设备组件提供物理支持。背板也可以用作设备的主要结构支撑。

2. 发明申请

US20070047900A1 MEMS devices having support structures and methods of fabricating the same 有权
标题翻译：具有支撑结构的MEMS器件及其制造方法
公开(公告)号：US20070047900A1
公开(公告)日：2007-03-01
申请号：US11491490
申请日：2006-07-21
申请人： Jeffrey Sampsell , Clarence Chui , Manish Kothari , Mark Miles , Teruo Sasagawa , Wonsuk Chung , Ming-Hau Tung
发明人： Jeffrey Sampsell , Clarence Chui , Manish Kothari , Mark Miles , Teruo Sasagawa , Wonsuk Chung , Ming-Hau Tung
IPC分类号： G02B6/00
CPC分类号： G02B26/001 , B81B3/007 , B81B2201/047 , B81B2203/0307 , B81B2203/053
摘要： Embodiments of MEMS devices comprise a conductive movable layer spaced apart from a conductive fixed layer by a gap, and supported by rigid support structures, or rivets, overlying depressions in the conductive movable layer, or by posts underlying depressions in the conductive movable layer. In certain embodiments, both rivets and posts may be used. In certain embodiments, these support structures are formed from rigid inorganic materials, such as metals or oxides. In certain embodiments, etch barriers may also be deposited to facilitate the use of materials in the formation of support structures which are not selectively etchable with respect to other components within the MEMS device.
摘要翻译： MEMS器件的实施例包括通过间隙与导电固定层间隔开的导电可移动层，并且由导电可移动层中的上凹部的刚性支撑结构或铆钉支撑，或由导电可移动层中的凹陷下方的柱支撑。在某些实施例中，可以使用铆钉和柱。在某些实施方案中，这些支撑结构由诸如金属或氧化物的刚性无机材料形成。在某些实施例中，还可以沉积蚀刻阻挡层以促进材料在形成相对于MEMS器件内的其它部件不能选择性蚀刻的支撑结构的形成中的使用。

3. 发明申请

US20060067641A1 Method and device for packaging a substrate 失效
标题翻译：包装基材的方法和装置
公开(公告)号：US20060067641A1
公开(公告)日：2006-03-30
申请号：US11045738
申请日：2005-01-28
申请人： Lauren Palmateer , William Cummings , Brian Gally , Mark Miles , Jeffrey Sampsell , Clarence Chui , Manish Kothari
发明人： Lauren Palmateer , William Cummings , Brian Gally , Mark Miles , Jeffrey Sampsell , Clarence Chui , Manish Kothari
IPC分类号： G02B6/00
CPC分类号： G02B26/007 , B81B2201/047 , B81C1/00285 , B81C1/00333 , B81C2203/0136 , B81C2203/0145 , G02B26/001 , G02B26/0825 , G02B26/0833
摘要： A package structure and method of packaging for an interferometric modulator. A thin film material is deposited over an interferometric modulator and transparent substrate to encapsulate the interferometric modulator. A gap or cavity between the interferometric modulator and the thin film provides a space in which mechanical parts of the interferometric modulator may move. The gap is created by removal of a sacrificial layer that is deposited over the interferometric modulator.
摘要翻译：用于干涉式调制器的封装结构和封装方法。将薄膜材料沉积在干涉式调制器和透明衬底上以封装干涉式调制器。干涉式调制器和薄膜之间的间隙或腔提供干涉式调制器的机械部分可以移动的空间。通过去除沉积在干涉式调制器上的牺牲层产生间隙。

4. 发明申请

US20060077533A1 Method and system for packaging a MEMS device 有权
公开(公告)号：US20060077533A1
公开(公告)日：2006-04-13
申请号：US11045800
申请日：2005-01-28
申请人： Mark Miles , Jeffrey Sampsell , Lauren Palmateer , Brian Arbuckle , Philip Floyd
发明人： Mark Miles , Jeffrey Sampsell , Lauren Palmateer , Brian Arbuckle , Philip Floyd
IPC分类号： G02F1/00
CPC分类号： B81C1/0023 , G02B26/001 , Y10T29/49002
摘要： A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device.

5. 发明申请

US20120198545A1 System and Method for Providing Digital Content 有权
标题翻译：提供数字内容的系统和方法
公开(公告)号：US20120198545A1
公开(公告)日：2012-08-02
申请号：US13360368
申请日：2012-01-27
申请人： George Willard Keenan , Jim Allen Colby , Matthew B. Strong , Daniel Torgerson , Garth Braithwaite , Daniel Hatch , Andrew Branch , Randall Wright , Sean Thayne , Emerson Tyler Wright , Jeremiah Stephenson , Mark Miles , Mac Sims
发明人： George Willard Keenan , Jim Allen Colby , Matthew B. Strong , Daniel Torgerson , Garth Braithwaite , Daniel Hatch , Andrew Branch , Randall Wright , Sean Thayne , Emerson Tyler Wright , Jeremiah Stephenson , Mark Miles , Mac Sims
IPC分类号： G05B15/02 , G06F3/048 , G06F21/00 , G09G5/00
CPC分类号： G06F3/048 , G05B19/4097 , G06F21/00 , G06T3/20 , G06T3/40 , G09G5/14 , G09G2340/0464 , G09G2358/00 , G09G2370/022
摘要： A method of electronically displaying glyphs. The method includes receiving a glyph spacing, moving a first glyph toward a second glyph along an axis, identifying an intersection of a first axis coordinate of the first glyph with a second axis coordinate of the second glyph, and moving at least one of the glyphs along the axis to separate the first and second axis coordinates of the respective first and second glyphs by the glyph spacing.
摘要翻译：一种电子显示字形的方法。该方法包括：接收字形间距，沿着轴向第二字形移动第一字形，识别第一字形的第一轴坐标与第二字形的第二轴坐标的交集，以及移动至少一个字形沿着轴线分离相应的第一和第二字形的第一和第二轴坐标乘以字形间距。

6. 发明申请

US20080037093A1 METHOD AND DEVICE FOR MULTI-COLOR INTERFEROMETRIC MODULATION 有权
标题翻译：用于多色度干涉调制的方法和装置
公开(公告)号：US20080037093A1
公开(公告)日：2008-02-14
申请号：US11841752
申请日：2007-08-20
申请人： Mark Miles
发明人： Mark Miles
IPC分类号： G02B26/00
CPC分类号： G02B26/001 , B82Y20/00 , G01J3/26 , G02B5/284 , G02B6/12 , G02B26/007 , G02B26/02 , G02B26/0833 , G02B26/0841 , G02B26/085 , G02B26/0858 , G02B27/01 , G02B27/017 , G02B2006/12104 , G02F1/13725 , G02F1/19 , G02F1/216 , G02F2203/03 , G06F3/1431 , G06F3/1446 , G06F3/147 , G09G3/001 , G09G3/2014 , G09G3/2074 , G09G3/2077 , G09G3/3466 , G09G5/02 , G09G2300/0408 , G09G2300/0452 , H01Q9/26
摘要： Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.
摘要翻译：在可见光谱中的光被调制使用调制元件的阵列，以及连接到阵列的控制电路，用于独立地控制每个调制元件，每个调制元件具有表现出特定频率的预定阻抗特性的表面的光。每个调制元件传送的光的幅度由脉冲编码调制独立地控制。每个调制元件具有保持在拉伸应力下的可变形部分，并且控制电路控制可变形部分的变形。每个可变形元件具有变形机构和光学部分，变形机构和光学部分分别独立地赋予元件受控的变形特性和受控的调制特性。可变形调制元件可以是非金属的。这些元件通过形成两层的夹层和在它们之间的牺牲层制成，牺牲层具有与最终空腔尺寸相关的厚度，并且使用水或氧基等离子体去除牺牲层。

7. 发明申请

US20070146376A1 SYSTEMS AND METHODS OF CONTROLLING MICRO-ELECTROMECHANICAL DEVICES 失效
标题翻译：控制微机电装置的系统和方法
公开(公告)号：US20070146376A1
公开(公告)日：2007-06-28
申请号：US11564800
申请日：2006-11-29
申请人： Mark Miles
发明人： Mark Miles
IPC分类号： G09G5/399
CPC分类号： G02B26/0841 , B82Y20/00 , G01J3/0256 , G01J3/26 , G01L5/0047 , G02B5/02 , G02B6/12007 , G02B6/122 , G02B6/1225 , G02B6/13 , G02B6/266 , G02B6/3516 , G02B6/3522 , G02B6/353 , G02B6/3536 , G02B6/3546 , G02B6/3548 , G02B6/356 , G02B6/357 , G02B6/3578 , G02B6/3584 , G02B6/3594 , G02B6/3598 , G02B6/43 , G02B26/001 , G02B26/02 , G02B26/08 , G02B26/0833 , G02B2006/12104 , G02B2006/12109 , G02B2006/12126 , G02B2006/12159 , G02B2006/12164 , G09G3/3466 , G09G2310/02 , G09G2310/0254 , G09G2310/06
摘要： An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod's electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials.
摘要翻译：干涉调制器（Imod）包含抗反射涂层和/或微制造补充光源。为IMod或其他微机械设备的矩阵寻址阵列提供了有效的驱动方案。改进的配色方案提供更大的灵活性。电子硬件可以进行现场重新配置，以适应不同的显示格式和/或应用功能。 IMod的机电行为可以与其光学行为分离。提供了一种改进的致动装置，其中一些可以隐藏在视野之内。制造IMod或IMod阵列并与MEMS开关或开关阵列结合使用。 IMod可用于光开关和调制。一些IMods包含2-D和3-D光子结构。讨论了调制光的各种应用。基于连续的网络馈送过程提供MEMS制造和封装方法。可以将IMODs用作评估沉积材料残余应力的测试结构。

8. 发明申请

US20070097134A1 Systems and methods of testing micro-electromechanical devices 失效
标题翻译：微机电装置的测试系统和方法
公开(公告)号：US20070097134A1
公开(公告)日：2007-05-03
申请号：US11584425
申请日：2006-10-21
申请人： Mark Miles
发明人： Mark Miles
IPC分类号： G09G5/399
CPC分类号： G09G3/3466 , G02B26/001 , G02B26/0841 , G09G3/2014 , G09G2310/0278
摘要： An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod's electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials.
摘要翻译：干涉调制器（Imod）包含抗反射涂层和/或微制造补充光源。为IMod或其他微机械设备的矩阵寻址阵列提供了有效的驱动方案。改进的配色方案提供更大的灵活性。电子硬件可以进行现场重新配置，以适应不同的显示格式和/或应用功能。 IMod的机电行为可以与其光学行为分离。提供了一种改进的致动装置，其中一些可以隐藏在视野之内。制造IMod或IMod阵列并与MEMS开关或开关阵列结合使用。 IMod可用于光开关和调制。一些IMods包含2-D和3-D光子结构。讨论了调制光的各种应用。基于连续的网络馈送过程提供MEMS制造和封装方法。可以将IMODs用作评估沉积材料残余应力的测试结构。

9. 发明申请

US20070008607A1 Moveable micro-electromechanical device 失效
标题翻译：可移动微机电装置
公开(公告)号：US20070008607A1
公开(公告)日：2007-01-11
申请号：US11517721
申请日：2006-09-08
申请人： Mark Miles
发明人： Mark Miles
IPC分类号： G02B26/00
CPC分类号： G02B26/0833 , G02B5/201 , G02B19/0019 , G02B26/00 , G02B26/001 , G02B26/007 , G02B26/02 , G02B26/06 , G02B26/0816 , G02B26/0825 , G02B26/0841 , G02B27/0068 , G02F1/01 , G02F1/0128 , G02F2203/12 , G09G3/2014 , G09G3/22 , G09G3/3433 , G09G3/3466 , G09G2300/0426 , G09G2300/0469 , G09G2300/08 , G09G2300/0809 , G09G2300/0842 , G09G2300/088 , Y10T29/49002 , Y10T29/4913
摘要： A MEMS device is provided. The MEMS device may include a first plate and a second plate defining a cavity with the first plate. The MEMS device may also include a first transducer configured to cause a first relative movement between the first and second plates and a second transducer configured to cause a second relative movement between the first and second plates..
摘要翻译：提供了一种MEMS器件。 MEMS器件可以包括第一板和限定具有第一板的空腔的第二板。 MEMS器件还可以包括构造成在第一和第二板之间引起第一相对运动的第一换能器和被构造成在第一和第二板之间引起第二相对运动的第二换能器。

10. 发明申请

US20060262126A1 Transparent thin films 有权
标题翻译：透明薄膜
公开(公告)号：US20060262126A1
公开(公告)日：2006-11-23
申请号：US11492533
申请日：2006-07-24
申请人： Mark Miles
发明人： Mark Miles
IPC分类号： G09G5/399
CPC分类号： G02B26/0841 , B82Y20/00 , G01J3/0256 , G01J3/26 , G01L5/0047 , G02B5/02 , G02B6/12007 , G02B6/122 , G02B6/1225 , G02B6/13 , G02B6/266 , G02B6/3516 , G02B6/3522 , G02B6/353 , G02B6/3536 , G02B6/3546 , G02B6/3548 , G02B6/356 , G02B6/357 , G02B6/3578 , G02B6/3584 , G02B6/3594 , G02B6/3598 , G02B6/43 , G02B26/001 , G02B26/02 , G02B26/08 , G02B26/0833 , G02B2006/12104 , G02B2006/12109 , G02B2006/12126 , G02B2006/12159 , G02B2006/12164 , G09G3/3466 , G09G2310/02 , G09G2310/0254 , G09G2310/06
摘要： An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod's electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials.
摘要翻译：干扰调制器（IMod）包含防反射涂层和/或微制造的辅助光源。为IMod或其他微机械设备的矩阵寻址阵列提供了有效的驱动方案。改进的配色方案提供更大的灵活性。电子硬件可以进行现场重新配置，以适应不同的显示格式和/或应用功能。 IMod的机电行为可以与其光学行为分离。提供了一种改进的致动装置，其中一些可以隐藏在视野之内。制造IMod或IMod阵列并与MEMS开关或开关阵列结合使用。 IMod可用于光开关和调制。一些IMods包含2-D和3-D光子结构。讨论了调制光的各种应用。基于连续的网络馈送过程提供MEMS制造和封装方法。可以将IMODs用作评估沉积材料残余应力的测试结构。

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