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    • 10. 发明授权
    • Cluster tool reporting system
    • 集群工具报告系统
    • US06724404B1
    • 2004-04-20
    • US09777996
    • 2001-02-06
    • Thomas C. Hann, Jr.Mark D. MeyerTheodore O. Meyer
    • Thomas C. Hann, Jr.Mark D. MeyerTheodore O. Meyer
    • G09G500
    • G05B19/4187G05B2219/31412G05B2219/45031Y02P90/205
    • A method for determining an up time of a multi-component tool having discrete elements, where the up time determination is based upon different processes that are to be accomplished in the multi-component tool. The discrete elements of the multi-component tool and the different processes to be accomplished in the multi-component tool are identified. Different tool states for the multi-component tool are determined by setting element states for each of the discrete elements of the multi-component tool. A first possible element state indicates that the discrete element is functional, and a second possible element state indicates that the discrete element is nonfunctional. Possible combinations of the element states of the discrete elements are identified as the different tool states of the multi-component tool. A determination is made as to which of the different processes can be accomplished in the different tool states, and a percentage of time usage is determined for the allocation of the multi-component tool to each of the different processes. Rates associated with combinations of the different tool states with the different processes are determined. Process state efficiencies are determined from the rates and the percent of time usage allocated to the processes associated with the rates. A preliminary state efficiency for the different tool states is determined from the process state efficiencies associated with the different tool states. Percent of time conditions are determined for the different tool states, where the percent of time conditions represent ratios of time that the multi-component tool exhibits the associated tool state. The final state efficiencies for the different tool states are determined from the percent of time conditions and the preliminary state efficiencies associated with the different tool states, and the up time is determined from the final state efficiencies.
    • 一种用于确定具有离散元件的多分量工具的上升时间的方法,其中所述上升时间确定基于将在所述多部件工具中实现的不同过程。 识别多组件工具的分立元件以及在多组件工具中要完成的不同过程。 通过为多组件工具的每个离散元素设置元素状态来确定多组件工具的不同工具状态。 第一个可能的元素状态表示离散元素是有效的,第二个可能的元素状态表示离散元素是非功能的。 分离元件的元件状态的可能组合被识别为多组件工具的不同工具状态。 确定在不同的工具状态中可以实现哪个不同的过程,并且确定用于将多组件工具分配给每个不同过程的时间使用的百分比。 确定与不同工具状态与不同过程的组合相关联的速率。 流程状态效率由分配给流程相关流程的时间利用率和百分比确定。 根据与不同刀具状态相关联的过程状态效率确定不同刀具状态的初步状态效率。 确定不同工具状态的时间条件百分比,其中时间条件的百分比表示多部件工具显示相关工具状态的时间的比率。 不同刀具状态的最终状态效率由时间条件的百分比和与不同刀具状态相关联的初始状态效率确定,并且从最终状态效率确定上升时间。