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1. 发明授权

US07301638B1 Dimensional calibration standards 有权
标题翻译：尺寸校准标准
公开(公告)号：US07301638B1
公开(公告)日：2007-11-27
申请号：US10770151
申请日：2004-01-31
申请人： Marco Tortonese , Jerry Prochazka , Ellen Laird , Pat Brady , Rene M. Blanquies
发明人： Marco Tortonese , Jerry Prochazka , Ellen Laird , Pat Brady , Rene M. Blanquies
IPC分类号： G01N21/84
CPC分类号： G01B11/0616 , G01B21/042
摘要： A calibration standard, for calibrating lateral or angular dimensional measurement systems, is provided. The standard may include a first substrate spaced from a second substrate. The standard may be cross-sectioned in a direction substantially perpendicular or substantially non-perpendicular to an upper surface of the first substrate. The cross-sectioned portion of the standard may form a viewing surface of the calibration standard. The standard may include at least one layer disposed between the first and second substrates. The layer, or a feature etched into the first or second substrate or a feature etched into the layer may have a traceably measured thickness or may be oriented at a traceably measured angle with respect to the viewing surface. A thickness or angle of the layer or other feature may be traceably measured using any technique for calibrating a measurement system with a standard reference material traceable to a national testing authority.
摘要翻译：提供了用于校准横向或角度尺寸测量系统的校准标准。标准可以包括与第二衬底间隔开的第一衬底。标准可以在基本上垂直于或基本上不垂直于第一基板的上表面的方向上横截面。标准的横截面部分可以形成校准标准的观察表面。标准可以包括设置在第一和第二基板之间的至少一层。蚀刻到第一或第二基底中的层或特征或蚀刻到该层中的特征可以具有可追溯测量的厚度，或者可相对于观察表面以可追溯测量的角度定向。层或其他特征的厚度或角度可以使用用于校准具有可追溯到国家检测机构的标准参考材料的测量系统的任何技术来追溯地测量。

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