会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明授权
    • Electrode arrangement
    • 电极排列
    • US06881270B1
    • 2005-04-19
    • US09710769
    • 2000-11-09
    • Thomas GebeleJurgen HenrichStefan BangertJürgen HonekampElisabeth BudkeJürgen UlrichHelmut Grimm
    • Thomas GebeleJurgen HenrichStefan BangertJürgen HonekampElisabeth BudkeJürgen UlrichHelmut Grimm
    • C23C14/24C23C14/32H01J37/32C23C16/00H05H1/02
    • H01J37/32055C23C14/325H01J37/32422H01J37/32532
    • An electrode arrangement for the plasma-aided coating of a substrate (3) with a layer of material comprising at least one first and a second material component and for the production of a plasma discharge, more especially an arc discharge (35), having an anode arrangement (5), which provides the first material component at an anode material surface (13) for evaporation, and a cathode arrangement (7), which provides the second material component at a cathode material surface (25). The electrode arrangement is characterized in that the cathode material surface (25) is constituted by an evaporation-active part (27) supporting the plasma discharge (35) and an evaporation-inactive part (41) not supporting the plasma discharge. Preferably, a motion-producing means (49) is provided for moving the evaporation-inactive part (41) over the cathode material surface (25) in order to reduce deposit of material due to he first material component on the cathode material surface (25).
    • 一种用于衬底(3)的等离子体辅助涂层的电极装置,其具有包括至少一种第一和第二材料组分的材料层,并且用于产生等离子体放电,更特别是电弧放电(35),具有 阳极装置(5),其在用于蒸发的阳极材料表面(13)处提供第一材料部件,以及在阴极材料表面(25)处提供第二材料部件的阴极装置(7)。 电极装置的特征在于,阴极材料表面(25)由支撑等离子体放电(35)的蒸发活性部分(27)和不支持等离子体放电的蒸发非活性部分(41)构成。 优选地,提供运动产生装置(49),用于将蒸发非活性部分(41)移动到阴极材料表面(25)上,以便减少由于第一材料成分在阴极材料表面(25)上沉积的材料 )。