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1. 发明授权

US06746310B2 Uniform thin films produced by magnetorheological finishing 有权
标题翻译：由磁流变整理产生的均匀薄膜
公开(公告)号：US06746310B2
公开(公告)日：2004-06-08
申请号：US10213631
申请日：2002-08-06
申请人： Marc Tricard , William Kordonski
发明人： Marc Tricard , William Kordonski
IPC分类号： B24B4900
CPC分类号： B24B49/12 , B24B1/005 , B24B7/228 , B24B31/112 , G01B11/06 , G01B11/306
摘要： An improved method for producing a thin layer having highly uniform thickness, which layer may be pre-coated on an undulating surface of a substrate element. A working layer of the material is formed having a thickness greater than the final thickness desired. An areal (XY) determination of working layer thickness is made by ellipsometry, laser interferometry, or x-ray diffraction, or other known means. A map of thicknesses to be removed from the free surface of the working layer is entered into the control system of a magnetorheological finishing apparatus. The working layer is mounted on a workpiece holder of the apparatus and correctly indexed to the machine. The machine then removes material by magnetorheological finishing as instructed by the control system to leave a residual layer having a very high degree of thickness uniformity at a nominal average thickness and a very high surface integrity.
摘要翻译：一种用于生产具有高度均匀厚度的薄层的改进方法，该层可以预涂在基底元件的起伏表面上。该材料的工作层形成的厚度大于所需的最终厚度。通过椭偏仪，激光干涉仪或X射线衍射法或其他已知方法进行工作层厚度的面（XY）测定。要从工作层的自由表面移除的厚度的图形被输入到磁流变整理装置的控制系统中。工作层安装在设备的工件支架上，并正确地向机器索引。然后机器按照控制系统的指示通过磁流变整理来去除材料，以留下具有非常高的厚度均匀度的残余层，其标称平均厚度和非常高的表面完整性。

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