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    • 9. 发明申请
    • METHODS FOR FABRICATING SEMICONDUCTOR DEVICES
    • 制造半导体器件的方法
    • US20100311242A1
    • 2010-12-09
    • US12480232
    • 2009-06-08
    • Yunfei DengJongwook Kye
    • Yunfei DengJongwook Kye
    • H01L21/308G03B27/42G03F7/20G03F1/00
    • G03F1/00G03B27/42G03F7/2024H01L21/0273
    • Methods are provided for fabricating a semiconductor device. One method comprises providing a first pattern having a first polygon, the first polygon having a first tonality and having a first side and a second side, the first side adjacent to a second polygon having a second tonality, and the second side adjacent to a third polygon having the second tonality, and forming a second pattern by reversing the tonality of the first pattern. The method further comprises forming a third pattern from the second pattern by converting the second polygon from the first tonality to the second tonality forming a fourth pattern from the second pattern by converting the third polygon from the first tonality to the second tonality forming a fifth pattern by reversing the tonality of the third pattern, and forming a sixth pattern by reversing the tonality of the fourth pattern.
    • 提供了制造半导体器件的方法。 一种方法包括提供具有第一多边形的第一图案,所述第一多边形具有第一音调并且具有第一侧和第二侧,所述第一侧邻近于具有第二音调的第二多边形,并且所述第二侧相邻于第三多边形 具有第二色调的多边形,并且通过反转第一图案的色调来形成第二图案。 该方法还包括通过从第二图案将第二多边形从第一图案转换成第二色调而将第二多边形从第一色调转换成第二色调以从第二图案转换成第二色调,从第二图案形成第三图案, 通过颠倒第三图案的音调,并通过反转第四图案的音调形成第六图案。
    • 10. 发明授权
    • Methods for fabricating semiconductor devices
    • 制造半导体器件的方法
    • US08361335B2
    • 2013-01-29
    • US12480232
    • 2009-06-08
    • Yunfei DengJongwook Kye
    • Yunfei DengJongwook Kye
    • B44C1/22H01L21/302
    • G03F1/00G03B27/42G03F7/2024H01L21/0273
    • Methods are provided for fabricating a semiconductor device. One method comprises providing a first pattern having a first polygon, the first polygon having a first tonality and having a first side and a second side, the first side adjacent to a second polygon having a second tonality, and the second side adjacent to a third polygon having the second tonality, and forming a second pattern by reversing the tonality of the first pattern. The method further comprises forming a third pattern from the second pattern by converting the second polygon from the first tonality to the second tonality forming a fourth pattern from the second pattern by converting the third polygon from the first tonality to the second tonality forming a fifth pattern by reversing the tonality of the third pattern, and forming a sixth pattern by reversing the tonality of the fourth pattern.
    • 提供了制造半导体器件的方法。 一种方法包括提供具有第一多边形的第一图案,所述第一多边形具有第一音调并且具有第一侧和第二侧,所述第一侧邻近于具有第二音调的第二多边形,并且所述第二侧相邻于第三多边形 具有第二色调的多边形,并且通过反转第一图案的色调来形成第二图案。 该方法还包括通过从第二图案将第二多边形从第一图案转换成第二色调而将第二多边形从第一色调转换成第二色调以从第二图案转换成第二色调,从第二图案形成第三图案, 通过颠倒第三图案的音调,并通过反转第四图案的音调形成第六图案。