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    • 4. 发明授权
    • Thermal control of optical filter with local silicon frame
    • 具有局部硅框架的光学滤波器的热控制
    • US07961374B2
    • 2011-06-14
    • US12825066
    • 2010-06-28
    • Marc FinotMark McDonaldAndrew Daiber
    • Marc FinotMark McDonaldAndrew Daiber
    • G02F1/03G02B5/22
    • G02B7/008Y10S359/90
    • Briefly, in accordance with one or more embodiments, a thermally controlled optical filter comprises a frame coupled to an etalon where the frame includes a resistive thermal device disposed on the frame to obtain thermal measurements of the etalon during operation. The frame may be generally L-shaped or generally square-shaped. The frame may include a fillet that is generally planar, generally beveled or trapezoidal, or generally circular in shape. A heater may be additionally disposed on the frame. The etalon and frame subassembly may be bonded to a micro hot plate that is capable of heating the etalon to an operational temperature.
    • 简而言之,根据一个或多个实施例,热控制光学滤波器包括耦合到标准具的框架,其中框架包括布置在框架上的电阻热装置,以在操作期间获得标准具的热测量。 框架可以是大致L形或大致正方形的。 框架可以包括通常是平面的,大致倾斜的或梯形的或者大致圆形的圆角。 可以在框架上另外设置加热器。 标准具和框架子组件可以结合到能够将标准具加热到工作温度的微热板。