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    • 1. 发明授权
    • Method of manufacturing magneto-optic recording film
    • 制造磁光记录膜的方法
    • US4608142A
    • 1986-08-26
    • US763789
    • 1985-09-17
    • Manabu GomiMasanori Abe
    • Manabu GomiMasanori Abe
    • C23C14/08C23C14/34G03G5/16G11B11/105H01F10/24G11B11/10
    • G11B11/10591C23C14/08C23C14/3414G03G5/16G11B11/10589H01F10/245
    • In a method of manufacturing a magneto-optic recording film wherein a vertically magnetized film of a Bi-substituted rare-earth iron garnet is formed on a substrate, a target consisting of an oxide containing at least Bi atoms, Fe atoms and rare-earth element atoms is sputtered, and the atoms constituting the oxide which are released from the target by sputtering are deposited on the substrate which is held at a temperature of 700.degree. C. or lower, thereby forming the vertically magnetized film consisting of the Bi-substituted rare-earth iron garnet.With this method, a vertically magnetized film of a Bi-substituted rare-earth iron garnet having a large Bi substitution amount x, a very large Faraday rotation angle .theta..sub.F, a sufficiently large coercive force H.sub.c and a sufficiently small absorption coefficient .alpha. can be manufactured, so that a magneto-optic recording film having excellent magneto-optic recording characteristics can be manufactured. In addition, since the material of the substrate on which a magneto-optic recording film is formed can be selected from various materials, the method is extremely advantageous from the manufacturing point of view.
    • PCT No.PCT / JP84 / 00547 Sec。 371日期:1985年9月17日 102(e)1985年9月17日PCT文件1984年11月15日PCT公布。 第WO85 / 02292号公报 日期:1985年5月23日。在制造磁光记录膜的方法中,其中在基底上形成Bi取代的稀土类铁石榴石的垂直磁化膜,由至少含有Bi原子的氧化物, 溅射Fe原子和稀土元素原子,通过溅射从构成靶的氧化物的原子沉积在保持在700℃以下的温度的基板上,由此形成垂直磁化膜 由双取代稀土铁石榴石组成。 利用该方法,可以使用具有大的Bi置换量x,非常大的法拉第旋转角度θ,足够大的矫顽力Hc和充分小的吸收系数α的Bi取代稀土类铁石榴石的垂直磁化膜 可以制造具有优良磁光记录特性的磁光记录膜。 此外,由于可以从各种材料中选择形成有磁光记录膜的基板的材料,所以从制造的观点来看,该方法是非常有利的。