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    • 2. 发明申请
    • THIN-FILM SOLAR CELL
    • 薄膜太阳能电池
    • US20110253189A1
    • 2011-10-20
    • US12978104
    • 2010-12-23
    • Makoto ShimosawaNobuyuki Masuda
    • Makoto ShimosawaNobuyuki Masuda
    • H01L31/05
    • H01L31/0504H01L31/0465H01L31/0508H01L31/0516Y02E10/50
    • A thin-film solar cell includes an insulating substrate and multiple unit solar cells. Each unit solar cell includes a photoelectric conversion portion having a first electrode layer, a photoelectric conversion layer, and a second transparent electrode layer, formed on a front surface of the insulating substrate, and a rear electrode layer formed on a rear surface of the insulating substrate. A portion of the first electrode layer of a first unit solar cell, taken from a plan view, overlaps an extending portion of the rear electrode layer of an adjacent second unit solar cell. The first electrode layer of the first unit solar cell is electrically connected to the rear electrode layer of the adjacent second unit solar cells via at least one connection hole passing through the insulating substrate and being connected to the extending portion.
    • 薄膜太阳能电池包括绝缘基板和多单元太阳能电池。 每个单位太阳能电池包括形成在绝缘基板的前表面上的具有第一电极层,光电转换层和第二透明电极层的光电转换部分,以及形成在绝缘基板的后表面上的后电极层 基质。 从平面图看,第一单元太阳能电池的第一电极层的一部分与相邻的第二单元太阳能电池的后电极层的延伸部分重叠。 第一单元太阳能电池的第一电极层经由穿过绝缘基板的至少一个连接孔与相邻的第二单元太阳能电池的后电极层电连接并连接到延伸部分。
    • 3. 发明申请
    • Plasma control method and plasma control apparatus
    • 等离子体控制方法和等离子体控制装置
    • US20060110933A1
    • 2006-05-25
    • US11217680
    • 2005-09-02
    • Makoto Shimosawa
    • Makoto Shimosawa
    • H01L21/31
    • H01J37/32091H01J37/32935H01L31/03926H01L31/0465H01L31/202H01L31/206Y02E10/50Y02P70/521
    • A method that controls the distribution of a plasma generated in a vacuum chamber, for example as part of a plasma thin film deposition or plasma etching process. For thin film deposition, the method serves to minimize variations in film thickness caused by the variations of the film deposition conditions. The vacuum chamber includes a high-frequency-wave electrode connected to a high-frequency electric power supply and an earth electrode connected to the ground potential by high frequency-electric power fed to high-frequency-wave electrode. Peak-to-peak voltages are measured at multiple measuring points on one of the two electrodes. The distribution of the plasma is controlled by adjusting the chamber pressure to minimize the differences between the measured peak-to-peak voltages.
    • 控制在真空室中产生的等离子体分布的方法,例如作为等离子体薄膜沉积或等离子体蚀刻工艺的一部分。 对于薄膜沉积,该方法用于最小化由膜沉积条件的变化引起的膜厚度变化。 真空室包括通过高频电力馈送到高频电极而连接到高频电源和连接到地电位的接地电极的高频波电极。 在两个电极之一上的多个测量点测量峰峰值电压。 通过调节腔室压力来控制等离子体的分布,以最小化测量的峰 - 峰电压之间的差异。
    • 4. 发明申请
    • METHOD FOR MANUFACTURING PHOTOVOLTAIC CELL
    • 制造光伏电池的方法
    • US20130203213A1
    • 2013-08-08
    • US13823162
    • 2011-10-03
    • Makoto Shimosawa
    • Makoto Shimosawa
    • H01L31/18
    • H01L31/18H01L31/03921H01L31/03923H01L31/076H01L31/206Y02E10/541Y02E10/548Y02P70/521
    • Provided is a method for manufacturing a photovoltaic cell capable of efficiently preventing deterioration of photoelectric conversion performance caused by adhesion of a foreign substance and occurrence of leakage without lowering manufacturing efficiency. The method for manufacturing a photovoltaic cell having a structure in which a first electrode, a photoelectric conversion layer and a second electrode are laminated on one surface of a substrate in this order, and the photoelectric conversion layer is arranged as a multi-junction type photoelectric conversion layer in which a plurality of photoelectric conversion units are laminated while each photoelectric conversion unit has a plurality of layers, the method including at least one step in which a surface of a layer formed in a process after the thickest layer in a photoelectric conversion unit is formed and before the thickest layer in any one of photoelectric conversion units further laminated is formed is washed in the process.
    • 本发明提供一种能够有效地防止由异物的附着引起的光电转换性能的劣化和发生泄漏而不降低制造效率的太阳能电池的制造方法。 制造具有第一电极,光电转换层和第二电极的结构的光伏电池的制造方法依次层叠在基板的一个表面上,光电转换层被配置为多结型光电 转换层,其中多个光电转换单元被层叠,同时每个光电转换单元具有多个层,所述方法包括至少一个步骤,其中在光电转换单元中的最厚层之后的工艺中形成的层的表面 在形成了进一步层压的光电转换单元中的最厚层之前,在该过程中进行洗涤。
    • 6. 发明授权
    • Plasma control method and plasma control apparatus
    • 等离子体控制方法和等离子体控制装置
    • US07338887B2
    • 2008-03-04
    • US11217680
    • 2005-09-02
    • Makoto Shimosawa
    • Makoto Shimosawa
    • H01L21/26H01L21/42
    • H01J37/32091H01J37/32935H01L31/03926H01L31/0465H01L31/202H01L31/206Y02E10/50Y02P70/521
    • A method that controls the distribution of plasma generated in a vacuum chamber, for example, as part of a plasma thin film deposition or plasma etching process. For thin film deposition, the method serves to minimize variations in film thickness caused by the variations of the film deposition conditions. The vacuum chamber includes a high-frequency-wave electrode connected to a high-frequency electric power supply and an earth electrode connected to ground potential. High frequency-electric power is fed to the high-frequency-wave electrode and peak-to peak voltages are measured at multiple measuring points on one of the two electrodes. The distribution of the plasma is controlled by adjusting the chamber pressure to minimize the differences between the measured peak-to-peak voltages.
    • 控制在真空室中产生的等离子体分布的方法,例如作为等离子体薄膜沉积或等离子体蚀刻工艺的一部分。 对于薄膜沉积,该方法用于最小化由膜沉积条件的变化引起的膜厚度变化。 真空室包括连接到高频电源的高频波电极和接地电位的接地电极。 将高频电力馈送到高频波电极,并且在两个电极之一上的多个测量点处测量峰峰值电压。 通过调节腔室压力来控制等离子体的分布,以最小化测量的峰 - 峰电压之间的差异。