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1. 发明授权

US08232707B2 Flexural vibration piece and oscillator using the same 失效
标题翻译：弯曲振动片和振荡器使用相同
公开(公告)号：US08232707B2
公开(公告)日：2012-07-31
申请号：US12729481
申请日：2010-03-23
申请人： Makoto Furuhata , Takashi Yamazaki , Yuji Hamayama
发明人： Makoto Furuhata , Takashi Yamazaki , Yuji Hamayama
IPC分类号： H01L41/04
CPC分类号： H03H9/215 , H03H9/02102 , H03H9/02133
摘要： A flexural vibration piece includes a flexural vibrator that has a first region on which a compressive stress or a tensile stress acts due to vibration and a second region having a relationship in which a tensile stress acts thereon when a compressive stress acts on the first region and a compressive stress acts thereon when a tensile stress acts on the first region, and performs flexural vibration in a first plane. The flexural vibration piece also includes a heat conduction path, in the vicinity of the first region and the second region, that is formed of a material having a thermal conductivity higher than that of the flexural vibrator and thermally connects between the first region and the second region.
摘要翻译：弯曲振动片包括弯曲振动器，其具有由于振动而产生压缩应力或拉伸应力的第一区域和当压缩应力作用在第一区域上时拉伸应力作用于其上的第二区域，当拉伸应力作用在第一区域上时，施加压缩应力，并且在第一平面中进行弯曲振动。弯曲振动片还包括在第一区域和第二区域附近的导热路径，该热传导路径由导热率高于弯曲振动器的导热率的材料形成，并且在第一区域和第二区域之间热连接地区。

2. 发明授权

US08405283B2 Flexural vibration piece and oscillator using the same 失效
标题翻译：弯曲振动片和振荡器使用相同
公开(公告)号：US08405283B2
公开(公告)日：2013-03-26
申请号：US13534623
申请日：2012-06-27
申请人： Makoto Furuhata , Takashi Yamazaki , Yuji Hamayama
发明人： Makoto Furuhata , Takashi Yamazaki , Yuji Hamayama
IPC分类号： H01L41/04
CPC分类号： H03H9/215 , H03H9/02102 , H03H9/02133
摘要： A flexural vibration piece includes a flexural vibrator that has a first region on which a compressive stress or a tensile stress acts due to vibration and a second region having a relationship in which a tensile stress acts thereon when a compressive stress acts on the first region and a compressive stress acts thereon when a tensile stress acts on the first region, and performs flexural vibration in a first plane. The flexural vibration piece also includes a heat conduction path, in the vicinity of the first region and the second region, that is formed of a material having a thermal conductivity higher than that of the flexural vibrator and thermally connects between the first region and the second region.
摘要翻译：弯曲振动片包括弯曲振动器，其具有由于振动而产生压缩应力或拉伸应力的第一区域和当压缩应力作用在第一区域上时拉伸应力作用于其上的第二区域，当拉伸应力作用在第一区域上时，施加压缩应力，并且在第一平面中进行弯曲振动。弯曲振动片还包括在第一区域和第二区域附近的导热路径，该热传导路径由导热率高于弯曲振动器的导热率的材料形成，并且在第一区域和第二区域之间热连接地区。

3. 发明授权

US08294337B2 Flexural vibration piece, flexural vibrator, and electronic device 失效
标题翻译：弯曲振动片，弯曲振动器和电子设备
公开(公告)号：US08294337B2
公开(公告)日：2012-10-23
申请号：US12748714
申请日：2010-03-29
申请人： Hiroki Kawai , Makoto Furuhata , Akinori Yamada , Yuji Hamayama
发明人： Hiroki Kawai , Makoto Furuhata , Akinori Yamada , Yuji Hamayama
IPC分类号： H03H9/205
CPC分类号： H01L41/1132 , G01C19/5607 , H03H9/0547 , H03H9/1021 , H03H9/21
摘要： A flexural vibration piece includes a base, and a vibrating arms extending therefrom, each pair of vibrating arms has a first groove formed in the extension direction of the vibrating arm in one main surface following the direction in which the pair of vibrating arms are aligned, and a second groove formed side by side to the first groove in another main surface, the sum of the depths of the first and second groove portions is greater than the interval between the one main surface and the other main surface, and a mass portion is provided on each of the pair of vibrating arms, on the one main surface which is the opening side of the first grooves formed toward the outer sides opposite the inner sides on which the vibrating arms face each other.
摘要翻译：弯曲振动片包括基座和从其延伸的振动臂，每对振动臂具有沿着所述一对振动臂对准的方向的一个主表面沿所述振动臂的延伸方向形成的第一凹槽，和在另一个主表面上与第一槽并排形成的第二槽，第一和第二槽部的深度之和大于一个主表面与另一个主表面之间的间隔，质量部分为设置在所述一对振动臂中的每一个上，在作为所述第一凹槽的开口侧的一个主表面上，所述第一凹槽朝向与所述振动臂彼此面对的内侧相反的外侧形成。

4. 发明授权

US08362854B2 Flexural vibration piece and oscillator using the same 失效
标题翻译：弯曲振动片和振荡器使用相同
公开(公告)号：US08362854B2
公开(公告)日：2013-01-29
申请号：US12729759
申请日：2010-03-23
申请人： Makoto Furuhata , Akinori Yamada , Yuji Hamayama
发明人： Makoto Furuhata , Akinori Yamada , Yuji Hamayama
IPC分类号： H03H9/21 , H01L41/04
CPC分类号： H03H9/215
摘要： A flexural vibration piece including a vibrator having a first region on which a compressive stress or a tensile stress acts and a second region on which a tensile stress acts when a compressive stress acts on the first region and a compressive stress acts when a tensile stress acts on the first region, and performs flexural vibration in a first plane; and a heat conduction path formed of a material having a thermal conductivity higher than the vibrator and that thermally connects the regions, wherein when m is the number of heat conduction paths, ρth is the thermal resistivity of the heat conduction path, ρv is the thermal resistivity of the vibrator, tv is the thickness of the vibrator in a direction orthogonal to the first plane, and tth is the thickness of the heat conduction path, a relationship of tth≧(1/m)×tv×(ρth/ρv) is satisfied.
摘要翻译：一种弯曲振动片，包括具有作用于其上的压缩应力或拉伸应力的第一区域的振动器和当压缩应力作用在第一区域上时拉伸应力起作用的第二区域，并且当拉伸应力作用时，压缩应力作用在第一区域上进行弯曲振动，以及由导热率高于振动器的材料形成的热传导路径，并且热连接该区域，其中当m是热传导路径的数量时，热传导路径的热阻为＆rgr; v是振动器的热阻率，tv是振动器在与第一平面正交的方向上的厚度，tth是导热路径的厚度，tth≥（1 / m）×tv×（＆rgr; th /＆rgr; v）满足。

5. 发明授权

US08766515B2 Flexural vibrating reed, flexural vibrator, and piezoelectric device 失效
标题翻译：弯曲振动片，弯曲振动器和压电装置
公开(公告)号：US08766515B2
公开(公告)日：2014-07-01
申请号：US13125000
申请日：2009-10-22
申请人： Makoto Furuhata , Takeo Funakawa , Takashi Yamazaki
发明人： Makoto Furuhata , Takeo Funakawa , Takashi Yamazaki
IPC分类号： H03H9/21
CPC分类号： H03H9/21 , H03H9/0547 , H03H9/1021 , H03H9/19 , H03H9/215
摘要： Deterioration of the Q value caused by the thermoelastic effect is suppressed. Since a first depth of a first groove and a second depth of a second groove are smaller than a distance between a surface including a third surface and a surface including a fourth surface, the first and second grooves do not penetrate between the surface including the third surface and the surface including the fourth surface. In addition, the sum of the first depth of the first groove and the second depth of the second groove is greater than the distance between the third and fourth surfaces, a heat transfer path between a first expandable portion (the first surface) and a second expandable portion (the second surface) cannot be formed as a straight line. As such, the heat transfer path between the first expandable portion (the first surface) and a second expandable portion (the second surface) is made to detour to the first and second grooves and and thus be lengthened.
摘要翻译：抑制由热弹性效应引起的Q值的劣化。由于第一凹槽的第一深度和第二凹槽的第二深度小于包括第三表面的表面和包括第四表面的表面之间的距离，所以第一和第二凹槽不会穿过包括第三凹槽的表面表面和包括第四表面的表面。此外，第一凹槽的第一深度和第二凹槽的第二深度之和大于第三和第四表面之间的距离，第一可膨胀部分（第一表面）和第二凹槽之间的传热路径可膨胀部分（第二表面）不能形成为直线。因此，使第一可膨胀部分（第一表面）和第二可膨胀部分（第二表面）之间的传热路径绕第一和第二槽弯曲并因此被延长。

6. 发明授权

US07944132B2 Tuning-fork resonator with grooves on principal surfaces 有权
标题翻译：调谐叉式谐振器，主表面有凹槽
公开(公告)号：US07944132B2
公开(公告)日：2011-05-17
申请号：US12892096
申请日：2010-09-28
申请人： Makoto Furuhata , Takashi Yamazaki
发明人： Makoto Furuhata , Takashi Yamazaki
IPC分类号： H01L41/08 , H03H9/21
CPC分类号： H03H9/215 , H03H9/0547 , H03H9/1021
摘要： A resonator having a base part; and a resonating arm that performs flexing vibration, the resonating arm part has two principal surfaces, a first groove provided on one principal surface, a second groove provided in juxtaposition with the first groove on the other principal surface, a third groove provided in juxtaposition with the first groove and provided nearer the base part side than the first groove on the other principal surface, and a fourth groove provided in juxtaposition with the second groove and provided nearer the base part side than the second groove on the principal surface. The sum of a depth of the first and second groove part and a sum of a depth of the third and fourth groove part are larger than a distance between the one principal surface and the other principal surface.
摘要翻译：具有基部的谐振器; 以及谐振臂，其进行弯曲振动，所述谐振臂部分具有两个主表面，设置在一个主表面上的第一凹槽，与另一个主表面上的第一凹槽并置设置的第二凹槽，设置成与第一凹槽并排设置的第三凹槽，所述第一槽比所述另一主面上的所述第一槽更靠近所述基部侧;以及第四槽，与所述第二槽并列设置，并且在所述主面上设置为比所述基部侧更靠近所述第二槽。第一槽部分和第二槽部分的深度之和和第三和第四槽部分的深度之和大于一个主表面和另一个主表面之间的距离。

7. 发明申请

US20090178260A1 VIBRATING PIECE MANUFACTURING METHOD AND VIBRATOR MANUFACTURING METHOD 失效
标题翻译：振动片制造方法和振动器制造方法
公开(公告)号：US20090178260A1
公开(公告)日：2009-07-16
申请号：US12349201
申请日：2009-01-06
申请人： Takashi Yamazaki , Tsukasa Funasaka , Takeo Funakawa , Makoto Furuhata
发明人： Takashi Yamazaki , Tsukasa Funasaka , Takeo Funakawa , Makoto Furuhata
IPC分类号： H01L41/22
CPC分类号： H03H9/1021 , H03H3/04 , H03H9/21 , Y10T29/42 , Y10T29/49005 , Y10T29/49155 , Y10T29/49574
摘要： A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.
摘要翻译：振动片制造方法包括：（a）制备具有第一和第二表面的支撑体，所述第一和第二表面在朝向相反方向限定厚度的同时，所述支撑体包括基部和多个臂，所述臂延伸在与基板的厚度方向正交的方向上并排配置，下电极膜设置在各臂的第一面上，压电膜设置在下电极膜上，至少一个上电极膜设置在压电膜上，每个臂的第二表面的至少一部分是暴露区域; 和（b）蚀刻第二表面的暴露区域以便减小厚度以降低臂相对于厚度方向的抗弯刚度。

8. 发明授权

US08191216B2 Vibrating piece manufacturing method and vibrator manufacturing method 失效
标题翻译：振动片制造方法和振动器制造方法
公开(公告)号：US08191216B2
公开(公告)日：2012-06-05
申请号：US12349201
申请日：2009-01-06
申请人： Takashi Yamazaki , Tsukasa Funasaka , Takeo Funakawa , Makoto Furuhata
发明人： Takashi Yamazaki , Tsukasa Funasaka , Takeo Funakawa , Makoto Furuhata
IPC分类号： H04R17/10 , C23F1/02
CPC分类号： H03H9/1021 , H03H3/04 , H03H9/21 , Y10T29/42 , Y10T29/49005 , Y10T29/49155 , Y10T29/49574
摘要： A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.
摘要翻译：振动片制造方法包括：（a）制备具有第一和第二表面的支撑体，所述第一和第二表面在朝向相反方向限定厚度的同时，所述支撑体包括基部和多个臂，所述臂延伸在与基板的厚度方向正交的方向上并排配置，下电极膜设置在各臂的第一面上，压电膜设置在下电极膜上，至少一个上电极膜设置在压电膜上，每个臂的第二表面的至少一部分是暴露区域; 和（b）蚀刻第二表面的暴露区域以便减小厚度以降低臂相对于厚度方向的抗弯刚度。

9. 发明授权

US07932664B2 Flexural vibration piece 有权
标题翻译：弯曲振动片
公开(公告)号：US07932664B2
公开(公告)日：2011-04-26
申请号：US12767851
申请日：2010-04-27
申请人： Takashi Yamazaki , Makoto Furuhata
发明人： Takashi Yamazaki , Makoto Furuhata
IPC分类号： H01L41/08 , H03H9/21
CPC分类号： H03H9/215 , H03H9/19
摘要： A resonator includes a base portion and a vibration arm. The vibration arm has first and second main faces opposite each other, the main faces have first and second grooves, the first groove has a plurality of first groove portions which are divided in the longitudinal direction of the vibration arm and arranged to be alternately shifted on both sides with respect to the longitudinal center line of the vibration arm, the second groove has a plurality of second groove portions arranged similar to the first groove portions on an opposite side to the first groove portions with respect to the longitudinal center line. A voltage is applied to excitation electrodes provided at the first and second grooves and second excitation electrodes provided on both side faces of the vibration arm, such that the vibration arm flexural-vibrates in the in-plane direction of the first or second main face.
摘要翻译：谐振器包括基部和振动臂。振动臂具有彼此相对的第一和第二主表面，主表面具有第一和第二凹槽，第一凹槽具有多个第一凹槽部分，该第一凹槽部分沿振动臂的纵向被分隔并且被布置成交替地移动相对于振动臂的纵向中心线的两侧，第二凹槽具有与第一凹槽部相对于第一凹槽部相对于纵向中心线相反一侧布置的多个第二凹槽部。施加电压设置在设置在振动臂的两个侧面上的第一和第二槽和第二激励电极处的激励电极，使得振动臂在第一或第二主面的面内方向上弯曲振动。

10. 发明授权

US08415863B2 Vibrating piece manufacturing method and vibrator manufacturing method 有权
标题翻译：振动片制造方法和振动器制造方法
公开(公告)号：US08415863B2
公开(公告)日：2013-04-09
申请号：US13460277
申请日：2012-04-30
申请人： Takashi Yamazaki , Tsukasa Funasaka , Takeo Funakawa , Makoto Furuhata
发明人： Takashi Yamazaki , Tsukasa Funasaka , Takeo Funakawa , Makoto Furuhata
IPC分类号： H03H9/19 , H03H9/21
CPC分类号： H03H9/1021 , H03H3/04 , H03H9/21 , Y10T29/42 , Y10T29/49005 , Y10T29/49155 , Y10T29/49574
摘要： A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.
摘要翻译：振动片制造方法包括：（a）制备具有第一和第二表面的支撑体，所述第一和第二表面在朝向相反方向限定厚度的同时，所述支撑体包括基部和多个臂，所述臂延伸在与基板的厚度方向正交的方向上并排配置，下电极膜设置在各臂的第一面上，压电膜设置在下电极膜上，至少一个上电极膜设置在压电膜上，每个臂的第二表面的至少一部分是暴露区域; 和（b）蚀刻第二表面的暴露区域以便减小厚度以降低臂相对于厚度方向的抗弯刚度。

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