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1. 发明授权

US08680493B2 Radiation conduit for radiation source 有权
标题翻译：辐射源辐射管
公开(公告)号：US08680493B2
公开(公告)日：2014-03-25
申请号：US13489096
申请日：2012-06-05
申请人： Maikel Adrianus Cornelis Schepers , Markus Franciscus Antonius Eurlings , Franciscus Johannes Joseph Janssen , Bernard Jacob Andries Stommen , Hrishikesh Patel , Hermanus Johannes Maria Kreuwel , Jacob Cohen , Pepijn Wijnand Jozef Janssen , Maarten Kees Jan Boon
发明人： Maikel Adrianus Cornelis Schepers , Markus Franciscus Antonius Eurlings , Franciscus Johannes Joseph Janssen , Bernard Jacob Andries Stommen , Hrishikesh Patel , Hermanus Johannes Maria Kreuwel , Jacob Cohen , Pepijn Wijnand Jozef Janssen , Maarten Kees Jan Boon
IPC分类号： G01J3/10
CPC分类号： G03F7/70575 , G03F7/70033 , G03F7/70891 , G21K1/02 , G21K1/067 , H05G2/003 , H05G2/008
摘要： A radiation source includes a fuel supply configured to deliver fuel to a plasma emission location for vaporization by a laser beam to form a plasma, and a collector configured to collect EUV radiation emitted by the plasma and direct the EUV radiation towards an intermediate focus. The collector includes a diffraction grating configured to diffract infrared radiation emitted by the plasma. The radiation source includes a radiation conduit located in between the collector and the intermediate focus. The radiation conduit includes an entrance aperture connected by an inwardly tapering body to an exit aperture. The radiation conduit includes an inner portion and an outer portion, the inner portion being closer to the intermediate focus than the outer portion. The inner portion is configured to reflect incident diffracted infrared radiation towards the outer portion.
摘要翻译：辐射源包括被配置为将燃料输送到等离子体发射位置用于由激光束蒸发以形成等离子体的燃料供应器，以及收集器，其被配置为收集由等离子体发射的EUV辐射并将EUV辐射引向中间焦点。集电体包括衍射光栅，其被配置为衍射由等离子体发射的红外辐射。辐射源包括位于收集器和中间焦点之间的辐射导管。辐射导管包括通过向内渐缩的主体连接到出口孔的入口孔。辐射导管包括内部部分和外部部分，内部部分比外部部分更接近中间焦点。内部部分被配置成将入射的衍射红外辐射反射到外部。

2. 发明申请

US20130001442A1 RADIATION SOURCE AND LITHOGRAPHIC APPARATUS 有权
标题翻译：辐射源和光刻设备
公开(公告)号：US20130001442A1
公开(公告)日：2013-01-03
申请号：US13489096
申请日：2012-06-05
申请人： Maikel Adrianus Cornelis Schepers , Markus Franciscus Antonius Eurlings , Franciscus Johannes Joseph Janssen , Bernard Jacob Andries Stommen , Hrishikesh Patel , Hermanus Johannes Maria Kreuwel , Jacob Cohen , Pepijn Wijnand Jozef Janssen , Maarten Kees Jan Boon
发明人： Maikel Adrianus Cornelis Schepers , Markus Franciscus Antonius Eurlings , Franciscus Johannes Joseph Janssen , Bernard Jacob Andries Stommen , Hrishikesh Patel , Hermanus Johannes Maria Kreuwel , Jacob Cohen , Pepijn Wijnand Jozef Janssen , Maarten Kees Jan Boon
IPC分类号： G21K5/04 , G21K5/10
CPC分类号： G03F7/70575 , G03F7/70033 , G03F7/70891 , G21K1/02 , G21K1/067 , H05G2/003 , H05G2/008
摘要： A radiation source includes a fuel supply configured to deliver fuel to a plasma emission location for vaporization by a laser beam to form a plasma, and a collector configured to collect EUV radiation emitted by the plasma and direct the EUV radiation towards an intermediate focus. The collector includes a diffraction grating configured to diffract infrared radiation emitted by the plasma. The radiation source includes a radiation conduit located in between the collector and the intermediate focus. The radiation conduit includes an entrance aperture connected by an inwardly tapering body to an exit aperture. The radiation conduit includes an inner portion and an outer portion, the inner portion being closer to the intermediate focus than the outer portion. The inner portion is configured to reflect incident diffracted infrared radiation towards the outer portion.
摘要翻译：辐射源包括被配置为将燃料输送到等离子体发射位置用于由激光束蒸发以形成等离子体的燃料供应器，以及收集器，其被配置为收集由等离子体发射的EUV辐射并将EUV辐射引向中间焦点。集电体包括衍射光栅，其被配置为衍射由等离子体发射的红外辐射。辐射源包括位于收集器和中间焦点之间的辐射导管。辐射导管包括通过向内渐缩的主体连接到出口孔的入口孔。辐射导管包括内部部分和外部部分，内部部分比外部部分更接近中间焦点。内部部分被配置成将入射的衍射红外辐射反射到外部。

3. 发明授权

US07551970B2 Positioning apparatus gravity compensation device and method for compensating gravitational forces 失效
标题翻译：定位装置重力补偿装置和补偿重力的方法
公开(公告)号：US07551970B2
公开(公告)日：2009-06-23
申请号：US10567220
申请日：2004-07-29
申请人： Bernard Jacob Andries Stommen , Robertus Leonardus Tousain
发明人： Bernard Jacob Andries Stommen , Robertus Leonardus Tousain
IPC分类号： G05B19/18 , G05D23/275
CPC分类号： G05B19/404 , G05B2219/40255 , G05B2219/41114
摘要： The present invention relates to a positioning apparatus. The positioning apparatus comprises at least one position sensor, at least one position controller and at least one position actuator, wherein the or each position sensor measures the position of a position-controlled device, wherein the or each position controller uses measurement signals provided by the or each position sensor as input signals, and wherein output signals generated by the or each position controller are used by the or each position actuator to control the position of said position-controlled device. The positioning apparatus further comprising a gravity compensation device compensating gravitational forces acting on said position-controlled device, wherein the gravity compensation device includes at least one gravity compensation controller and at least one gravity compensation actuator, wherein the or each gravity compensation controller uses the output signals generated by the or each position controller as input signals, thereby generating output signals used by the or each gravity compensation actuator to compensate gravitational forces acting on said position-controlled device.
摘要翻译：定位装置技术领域本发明涉及一种定位装置。定位装置包括至少一个位置传感器，至少一个位置控制器和至少一个位置致动器，其中该位置传感器或每个位置传感器测量位置控制装置的位置，其中该位置控制器或每个位置控制器使用由或每个位置传感器作为输入信号，并且其中由所述位置控制器或每个位置控制器产生的输出信号由所述位置致动器或每个位置致动器使用以控制所述位置控制装置的位置。所述定位装置还包括重力补偿装置，其补偿作用在所述位置控制装置上的重力，其中所述重力补偿装置包括至少一个重力补偿控制器和至少一个重力补偿致动器，其中所述或每个重力补偿控制器使用所述输出由该位置控制器或每个位置控制器产生的信号作为输入信号，从而产生由该重力补偿致动器或每个重力补偿致动器使用的输出信号，以补偿作用在所述位置控制装置上的重力。

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