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1. 发明授权

US06238589B1 Methods for monitoring components in the TiW etching bath used in the fabrication of C4s 失效
标题翻译：用于监测用于制造C4的TiW蚀刻液中的组分的方法
公开(公告)号：US06238589B1
公开(公告)日：2001-05-29
申请号：US09138442
申请日：1998-08-21
申请人： Emanuel Israel Cooper , Madhav Datta , Thomas Edward Dinan, Jr. , Thomas Safron Kanarsky , Michael Barry Pike , Ravindra Vaman Shenoy
发明人： Emanuel Israel Cooper , Madhav Datta , Thomas Edward Dinan, Jr. , Thomas Safron Kanarsky , Michael Barry Pike , Ravindra Vaman Shenoy
IPC分类号： G01N3116
CPC分类号： G01N25/4846 , G01N31/162 , G01N31/164 , Y10T436/156666 , Y10T436/18
摘要： Monitoring techniques have been developed for direct/indirect determination of metal etching bath components and for managing their replenishment. The disclosed methods have been successfully employed to make TiW etching a robust process that provides minimized and controlled undercutting of ball limited metallurgy and mechanical reliable C4s. A metal etching solution is monitored and replenished by measuring the sulfate concentration of a hydrogen peroxide, soluble salt, and soluble EDTA salt etchant. Turbidimetric titration conditions are used to measure and compare opaqueness of liquids by viewing light through them and determining how much light is cut off. Additional sulfate is added to maintain the sulfate concentration. Water and/or fresh etchant is added to compensate for evaporation or drag.
摘要翻译：已经开发了用于直接/间接测定金属蚀刻浴组分并用于管理其补充的监测技术。所公开的方法已被成功地用于制造TiW蚀刻鲁棒的工艺，其提供球限制冶金和机械可靠的C4的最小化和受控的底切。通过测量过氧化氢，可溶性盐和可溶性EDTA盐蚀刻剂的硫酸盐浓度来监测和补充金属蚀刻溶液。浊度滴定条件用于通过观察它们的光线来测量和比较液体的不透明度，并确定多少光被切断。加入额外的硫酸盐以保持硫酸盐浓度。添加水和/或新鲜蚀刻剂以补偿蒸发或阻力。

2. 发明授权

US5796168A Metallic interconnect pad, and integrated circuit structure using same, with reduced undercut 失效
标题翻译：金属互连焊盘和使用相同的集成电路结构，减少了底切
公开(公告)号：US5796168A
公开(公告)日：1998-08-18
申请号：US711433
申请日：1996-09-06
申请人： Madhav Datta , Thomas Safron Kanarsky , Michael Barry Pike , Ravindra Vaman Shenoy
发明人： Madhav Datta , Thomas Safron Kanarsky , Michael Barry Pike , Ravindra Vaman Shenoy
IPC分类号： H01L21/60 , H01L23/48 , H01L23/52 , H01L29/40
CPC分类号： H01L24/11 , H01L2224/13099 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01022 , H01L2924/01024 , H01L2924/01029 , H01L2924/01033 , H01L2924/01074 , H01L2924/01082 , H01L2924/014 , H01L2924/14
摘要： Reduced undercutting of a titanium-tungsten layer in a ball limiting metallurgy (BLM) is achieved in the preparation of solder ball interconnect structures by removing metal oxide film which forms on the titanium-tungsten layer and etching the titanium-tungsten layer in different steps. Removing the metal oxide with an acid solution prior to etching the titanium-tungsten layer provides for a more uniform etch of the titanium-tungsten layer.
摘要翻译：通过去除在钛 - 钨层上形成的金属氧化物膜并以不同的步骤蚀刻钛 - 钨层，在制备焊球互连结构中实现了在极限极限冶金（BLM）中减少钛钨层的底切。在蚀刻钛 - 钨层之前用酸溶液去除金属氧化物提供对钛 - 钨层的更均匀的蚀刻。

3. 发明授权

US5800726A Selective chemical etching in microelectronics fabrication 失效
标题翻译：微电子制造中的选择性化学蚀刻
公开(公告)号：US5800726A
公开(公告)日：1998-09-01
申请号：US507098
申请日：1995-07-26
申请人： John Michael Cotte , Madhav Datta , Thomas Edward Dinan , Ravindra Vaman Shenoy
发明人： John Michael Cotte , Madhav Datta , Thomas Edward Dinan , Ravindra Vaman Shenoy
IPC分类号： C23F1/30 , H01L21/3213 , C23G1/14
CPC分类号： H01L21/32134 , C23F1/30
摘要： The present invention relates to a chemical etchant for etching metals in the presence of one or more metals not to be etched, the etchant comprising 10-25 gms EDTA, 15-35 gms K.sub.2 HPO.sub.4 and 25-45 gms oxalic acid in a liter of 30% H.sub.2 O.sub.2. More particularly, in the fabrication of interconnections for microchip structures, the present invention addresses the removal of intermediate adherent layers, e.g., Ti--W, without damaging other microchip structures made of other metals, such as Al or Al--Cu test pads; Cu and phased Cr--Cu layers; and Sn--Pb solder bumps. The use of potassium phosphate in the hydrogen peroxide+EDTA bath has been found to significantly reduce the attack on the metal not to be etched. Furthermore, the use of oxalic acid in the bath prevented the deposition of tin oxide on the substrate adherent layer metal, thus facilitating its complete removal.
摘要翻译：本发明涉及用于在一种或多种不被蚀刻的金属存在下蚀刻金属的化学蚀刻剂，该蚀刻剂包括10-25克EDTA，15-35克K 2 HPO 4和25-45克草酸，每升30升％H2O2。更具体地说，在制造用于微芯片结构的互连时，本发明解决了诸如Ti-W之类的中间粘附层的去除，而不损害由其它金属例如Al或Al-Cu测试焊盘制成的其它微芯片结构; Cu和相Cr-Cu层; 和Sn-Pb焊锡凸块。已经发现在过氧化氢+ EDTA浴中使用磷酸钾可显着减少对不被蚀刻的金属的侵蚀。此外，在浴中使用草酸防止氧化锡沉积在基底粘附层金属上，从而有助于其完全去除。

4. 发明授权

US08584522B2 Micromachined piezoelectric x-axis gyroscope 有权
标题翻译：微机械压电x轴陀螺仪
公开(公告)号：US08584522B2
公开(公告)日：2013-11-19
申请号：US12930186
申请日：2010-12-30
申请人： Cenk Acar , Ravindra Vaman Shenoy , Justin Phelps Black , Kurt Edward Petersen , Srinivasan Kodaganallur Ganapathi , Philip Jason Stephanou
发明人： Cenk Acar , Ravindra Vaman Shenoy , Justin Phelps Black , Kurt Edward Petersen , Srinivasan Kodaganallur Ganapathi , Philip Jason Stephanou
IPC分类号： G01C19/56
CPC分类号： G01C19/5769 , G01C19/5712 , G01C19/5719 , G01C19/5747 , G01C25/00 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/082 , H01L41/25 , H01L41/311 , H01L41/312 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49155
摘要： This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Some gyroscopes include a drive frame, a central anchor and a plurality of drive beams disposed on opposing sides of the central anchor. The drive beams may connect the drive frame to the central anchor. The drive beams may include a piezoelectric layer and may be configured to cause the drive frame to oscillate torsionally in a plane of the drive beams. The gyroscope may also include a proof mass and a plurality of piezoelectric sense beams. At least some components may be formed from plated metal. The drive frame may be disposed within the proof mass. The drive beams may constrain the drive frame to rotate substantially in the plane of the drive beams. Such devices may be included in a mobile device, such as a mobile display device.
摘要翻译：本公开提供了系统，方法和装置，包括在计算机存储介质上编码的用于制造和使用陀螺仪的计算机程序。一些陀螺仪包括驱动框架，中心锚杆和设置在中心锚固件的相对侧上的多个驱动梁。驱动梁可以将驱动框架连接到中心锚杆上。驱动梁可以包括压电层，并且可以被配置为使得驱动框架在驱动梁的平面中扭转地摆动。陀螺仪还可以包括检测质量块和多个压电感测光束。至少一些组分可以由镀金属形成。驱动框架可以设置在检验质量块内。驱动梁可以限制驱动框架大致在驱动梁的平面内旋转。这样的设备可以被包括在诸如移动显示设备的移动设备中。

5. 发明申请

US20130050226A1 DIE-CUT THROUGH-GLASS VIA AND METHODS FOR FORMING SAME 审中-公开
标题翻译：通过玻璃切割和形成它们的方法
公开(公告)号：US20130050226A1
公开(公告)日：2013-02-28
申请号：US13221677
申请日：2011-08-30
申请人： Ravindra Vaman Shenoy , David William Burns , Kurt Edward Petersen
发明人： Ravindra Vaman Shenoy , David William Burns , Kurt Edward Petersen
IPC分类号： G06T1/00 , H05K7/00 , B05D5/12 , C23F1/00 , B32B37/14 , B32B38/10 , B05D3/12 , H05K1/00 , B05D3/10
CPC分类号： B81B7/007 , B81B2207/095 , B81B2207/097 , B81B2207/098 , B81C2203/0792 , H01L23/15 , H01L23/49827 , H01L2924/0002 , Y10T156/1052 , H01L2924/00
摘要： This disclosure provides systems, methods and apparatus for providing electrical connections through glass substrates. In one aspect, a through-glass via including a peripheral through-glass via hole and sidewall metallization is provided. Sidewall metallization can include multiple conductive lines facilitating increased interconnect density. In another aspect, one or more methods of forming peripheral through-glass vias are provided. In some implementations, the methods include double-sided processes to form aligned via holes in a glass substrate that together form a through-glass via hole, followed by sidewall metallization and dicing through the through-glass via hole.
摘要翻译：本公开提供了通过玻璃基板提供电连接的系统，方法和装置。在一个方面，提供了一种包括周边透玻璃通孔和侧壁金属化的透玻璃通孔。侧壁金属化可以包括促进增加的互连密度的多条导线。在另一方面，提供了一种或多种形成外围玻璃通孔的方法。在一些实施方式中，所述方法包括双面工艺以在玻璃基板中形成对准的通孔，所述对准的通孔一起形成贯穿玻璃通孔，随后侧壁金属化和通过玻璃通孔进行切割。

6. 发明授权

US07084650B2 Apparatus and method for limiting over travel in a probe card assembly 失效
公开(公告)号：US07084650B2
公开(公告)日：2006-08-01
申请号：US10321743
申请日：2002-12-16
申请人： Timothy E. Cooper , Benjamin N. Eldridge , Carl V. Reynolds , Ravindra Vaman Shenoy
发明人： Timothy E. Cooper , Benjamin N. Eldridge , Carl V. Reynolds , Ravindra Vaman Shenoy
IPC分类号： G01R31/02
CPC分类号： G01R31/2887 , G01R3/00 , G01R31/2886
摘要： Methods and apparatuses for testing semiconductor devices are disclosed. Over travel stops limit over travel of a device to be tested with respect to probes of a probe card assembly. Feedback control techniques are employed to control relative movement of the device and the probe card assembly. A probe card assembly includes flexible base for absorbing excessive over travel of the device to be tested with respect to the probe card assembly.

7. 发明申请

US20120235969A1 THIN FILM THROUGH-GLASS VIA AND METHODS FOR FORMING SAME 审中-公开
标题翻译：通过玻璃的薄膜和形成它们的方法
公开(公告)号：US20120235969A1
公开(公告)日：2012-09-20
申请号：US13048768
申请日：2011-03-15
申请人： David William Burns , Ravindra Vaman Shenoy
发明人： David William Burns , Ravindra Vaman Shenoy
IPC分类号： G06F3/038 , H05K7/00 , H05K3/42 , H01L23/48
CPC分类号： B81C1/00095 , H01L2924/0002 , H05K3/0017 , H05K3/002 , H05K3/42 , H05K2201/09854 , H05K2203/025 , H05K2203/1572 , Y10T29/49165 , H01L2924/00
摘要： This disclosure provides systems, methods and apparatus providing electrical connections through glass substrates. In one aspect, a thin film through-glass via including a through-glass via hole and a thin conductive film that conformally coats the sidewalls of the through-glass via hole is provided. A contour of a through-glass via hole may include concave portions that overlap at a midsection of the glass, with the through-glass via hole sidewalls curved inward to form the concave portions. In another aspect, one or more methods of forming through-glass vias are provided. In some implementations, the methods include double-sided processes to form aligned via holes in a glass substrate that together form a contoured through-glass via hole, followed by deposition of a thin continuous film of a conductive material.
摘要翻译：本公开提供了通过玻璃基板提供电连接的系统，方法和装置。在一个方面，提供了一种包括透玻璃通孔的薄膜贯穿玻璃通孔和共形地涂覆透玻璃通孔的侧壁的薄导电膜。透玻璃通孔的轮廓可以包括在玻璃的中间部分重叠的凹部，其中贯通玻璃通孔侧壁向内弯曲以形成凹部。在另一方面，提供一种或多种形成透玻璃通孔的方法。在一些实施方案中，所述方法包括双面工艺以在玻璃基板中形成对准的通孔，其一起形成轮廓的贯穿玻璃通孔，随后沉积导电材料的薄的连续膜。

8. 发明申请

US20110265566A1 Micromachined piezoelectric z-axis gyroscope 有权
标题翻译：微加工压电z轴陀螺仪
公开(公告)号：US20110265566A1
公开(公告)日：2011-11-03
申请号：US12930175
申请日：2010-12-30
申请人： Cenk Acar , Ravindra Vaman Shenoy , Justin Phelps Black , Kurt Edward Petersen , Srinivasan Kodaganallur Ganapathi , Philip Jason Stephanou
发明人： Cenk Acar , Ravindra Vaman Shenoy , Justin Phelps Black , Kurt Edward Petersen , Srinivasan Kodaganallur Ganapathi , Philip Jason Stephanou
IPC分类号： G01C19/56 , B05D5/12
CPC分类号： G01C19/5769 , G01C19/5712 , G01C19/5719 , G01C19/5747 , G01C25/00 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/082 , H01L41/25 , H01L41/311 , H01L41/312 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49155
摘要： This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a central anchor, a sense frame disposed around the central anchor, a plurality of sense beams configured for connecting the sense frame to the central anchor and a drive frame disposed around and coupled to the sense frame. The gyroscope may include pairs of drive beams disposed on opposing sides of the sense frame. The gyroscope may include a drive frame suspension for substantially restricting a drive motion of the drive frame to that of a substantially linear displacement along the first axis. The sense frame may be substantially decoupled from drive motions of the drive frame. Such devices may be included in a mobile device, such as a mobile display device.
摘要翻译：本公开提供了系统，方法和装置，包括在计算机存储介质上编码的用于制造和使用陀螺仪的计算机程序。这种陀螺仪可以包括中心锚固体，围绕中心锚固设置的感测框架，被配置用于将感测框架连接到中心锚固件的多个感测梁和设置在感测框架周围并耦合到感测框架的驱动框架。陀螺仪可以包括设置在感测框架的相对侧上的成对的驱动梁。陀螺仪可以包括驱动框架悬架，用于将驱动框架的驱动运动基本上限制为沿着第一轴线的基本上线性的位移。感测框架可以基本上与驱动框架的驱动运动分离。这样的设备可以被包括在诸如移动显示设备的移动设备中。

9. 发明申请

US20110265565A1 Micromachined piezoelectric X-axis gyroscope 有权
标题翻译：微加工压电X轴陀螺仪
公开(公告)号：US20110265565A1
公开(公告)日：2011-11-03
申请号：US12930186
申请日：2010-12-30
申请人： Cenk Acar , Ravindra Vaman Shenoy , Justin Phelps Black , Kurt Edward Petersen , Srinivasan Kodaganallur Ganapathi , Philip Jason Stephanou
发明人： Cenk Acar , Ravindra Vaman Shenoy , Justin Phelps Black , Kurt Edward Petersen , Srinivasan Kodaganallur Ganapathi , Philip Jason Stephanou
IPC分类号： G01C19/02 , C23C28/00 , H01L41/22
CPC分类号： G01C19/5769 , G01C19/5712 , G01C19/5719 , G01C19/5747 , G01C25/00 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/082 , H01L41/25 , H01L41/311 , H01L41/312 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49155
摘要： This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Some gyroscopes include a drive frame, a central anchor and a plurality of drive beams disposed on opposing sides of the central anchor. The drive beams may connect the drive frame to the central anchor. The drive beams may include a piezoelectric layer and may be configured to cause the drive frame to oscillate torsionally in a plane of the drive beams. The gyroscope may also include a proof mass and a plurality of piezoelectric sense beams. At least some components may be formed from plated metal. The drive frame may be disposed within the proof mass. The drive beams may constrain the drive frame to rotate substantially in the plane of the drive beams. Such devices may be included in a mobile device, such as a mobile display device.
摘要翻译：本公开提供了系统，方法和装置，包括在计算机存储介质上编码的用于制造和使用陀螺仪的计算机程序。一些陀螺仪包括驱动框架，中心锚杆和设置在中心锚固件的相对侧上的多个驱动梁。驱动梁可以将驱动框架连接到中心锚杆上。驱动梁可以包括压电层，并且可以被配置为使得驱动框架在驱动梁的平面中扭转地摆动。陀螺仪还可以包括检测质量块和多个压电感测光束。至少一些组分可以由镀金属形成。驱动框架可以设置在检验质量块内。驱动梁可以限制驱动框架大致在驱动梁的平面内旋转。这样的设备可以被包括在诸如移动显示设备的移动设备中。

10. 发明申请

US20110265564A1 Micromachined piezoelectric x-axis gyroscope 有权
标题翻译：微机械压电x轴陀螺仪
公开(公告)号：US20110265564A1
公开(公告)日：2011-11-03
申请号：US12930174
申请日：2010-12-30
申请人： Cenk Acar , Ravindra Vaman Shenoy , Justin Phelps Black , Kurt Edward Petersen , Srinivasan Kodaganallur Ganapathi , Philip Jason Stephanou
发明人： Cenk Acar , Ravindra Vaman Shenoy , Justin Phelps Black , Kurt Edward Petersen , Srinivasan Kodaganallur Ganapathi , Philip Jason Stephanou
IPC分类号： G01C19/02 , C25D7/00 , H01L41/22
CPC分类号： G01C19/5769 , G01C19/5712 , G01C19/5719 , G01C19/5747 , G01C25/00 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/082 , H01L41/25 , H01L41/311 , H01L41/312 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49155
摘要： This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a sense frame, a proof mass disposed outside the sense frame, a pair of anchors and a plurality of drive beams. The plurality of drive beams may be disposed on opposing sides of the sense frame and between the pair of anchors. The drive beams may connect the sense frame to the proof mass. The drive beams may be configured to cause torsional oscillations of the proof mass substantially in a first plane of the drive beams. The sense frame may be substantially decoupled from the drive motions of the proof mass. Such devices may be included in a mobile device, such as a mobile display device.
摘要翻译：本公开提供了系统，方法和装置，包括在计算机存储介质上编码的用于制造和使用陀螺仪的计算机程序。这种陀螺仪可以包括检测框架，设置在感测框架外部的检测质量块，一对锚固件和多个驱动梁。多个驱动梁可以设置在感测框架的相对侧之间并且在一对锚固件之间。驱动梁可将感应框架连接到检测质量块。驱动梁可以被配置成基本上在驱动梁的第一平面中引起防弹块的扭转振荡。感测框架可以与证明质量块的驱动运动基本上分离。这样的设备可以被包括在诸如移动显示设备的移动设备中。

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