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1. 发明申请

US20050051730A1 Detector for electromagnetic radiation assisted by majority current 有权
标题翻译：大多数电流辅助的电磁辐射探测器
公开(公告)号：US20050051730A1
公开(公告)日：2005-03-10
申请号：US10929277
申请日：2004-08-30
申请人： Maarten Kuijk , Daniel Nieuwenhove
发明人： Maarten Kuijk , Daniel Nieuwenhove
IPC分类号： G01J1/42 , G01T1/24 , H01L31/0352 , H01L31/101
CPC分类号： H01L31/0352 , G01S7/4816 , G01S7/4913 , H01L31/101
摘要： The present invention relates to a novel photo-detector structure and method whereby light is detected in a semiconductor substrate. Through the use of a small current of majority carriers an electrical field is created that directs photo-generated minority carriers towards a detection region. In this way, a large sensitive area 34 for a detector can be designed with a detection region having low junction area and low associated detector capacitance, thus enhancing output signal to noise ratio and/or speed of attached readout circuits. Simultaneously, the assistant majority current can sweep the minority carriers from deep within the substrate towards the detection region, thus improving the overall detector sensitivity. By making the majority current reconfigurable, a photonic mixer structure with two or more detection regions can be conceived, whereby the direction of the applied current will determine in an efficient way to which detection region the photo-generated minority carriers will be directed. In this way, incident modulated light can get demodulated, such that phase and amplitude of the modulated light can be measured for a.o. range-finding applications.
摘要翻译：本发明涉及一种在半导体衬底中检测光的新型光电检测器结构和方法。通过使用多数载流子的小电流，产生将光产生的少数载流子导向检测区域的电场。以这种方式，可以设计用于检测器的大的敏感区域34，具有低结区和低相关检测器电容的检测区域，从而增强附加读出电路的输出信噪比和/或速度。同时，辅助多数电流可以将少数载流子从衬底内的深度扫描到检测区域，从而提高了检测器的整体灵敏度。通过使大部分电流可重构，可以构思具有两个或更多个检测区域的光子混合器结构，由此施加的电流的方向将以有效的方式确定光产生的少数载流子将被引导到哪个检测区域。以这种方式，入射调制光可以被解调，使得可以测量调制光的相位和幅度。测距应用。

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