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1. 发明申请

US20020148098A1 Auxiliary tool and method for assembling motor assembly to support wafer 失效
标题翻译：用于组装电机组件以支持晶片的辅助工具和方法
公开(公告)号：US20020148098A1
公开(公告)日：2002-10-17
申请号：US10106676
申请日：2002-03-25
申请人： MOSEL VITELIC, INC.
发明人： Zhi-Zhao Tai , Wen-Kan Hu , Ching-Shun Fan , Li-Chun Liang
IPC分类号： B23P011/00 , B23P017/00
CPC分类号： H01L21/6875 , H01L21/68785 , Y10T29/49895 , Y10T29/49947 , Y10T29/49963
摘要： The present invention provides an auxiliary tool for assembling a motor assembly to a wafer-deposition machine for supporting a wafer. The auxiliary tool facilitates easy and quick assembly of the motor assembly to the wafer-deposition machine. An aspect of the present invention is directed to an auxiliary tool for assembling a motor assembly to a wafer-deposition machine, wherein the motor assembly includes a plurality of first screw holes and the wafer-deposition machine includes a plurality of second screw holes corresponding to the first screw holes, respectively. The auxiliary tool comprises a plurality of locking members each having a substantially uniform dimension in a longitudinal direction and being configured to be inserted through one of the plurality of first screw holes of the motor assembly with a corresponding one of the plurality of second screw holes of the wafer-deposition machine to align the first screw hole with the corresponding second screw hole. The auxiliary tool further comprises a plurality of supporting members. At least one supporting member is releasably coupled to each of the plurality of locking members to support the motor assembly with respect to the wafer-deposition machine to keep the locking member inserted through the first screw hole and the corresponding second screw hole and to maintain alignment of the first screw hole and the corresponding second screw hole.
摘要翻译：本发明提供了一种用于将电动机组件组装到用于支撑晶片的晶片沉积机的辅助工具。辅助工具有助于将电机组件容易且快速地组装到晶片沉积机器上。本发明的一个方面涉及一种用于将电动机组件组装到晶片沉积机的辅助工具，其中电动机组件包括多个第一螺钉孔，并且晶片沉积机器包括多个对应于第一个螺丝孔。辅助工具包括多个锁定构件，每个锁定构件在纵向方向上具有基本上均匀的尺寸，并且构造成通过马达组件的多个第一螺钉孔中的一个插入，并将多个第二螺钉孔晶片沉积机将第一螺纹孔与相应的第二螺孔对准。辅助工具还包括多个支撑构件。至少一个支撑构件可释放地联接到多个锁定构件中的每一个上，以相对于晶片沉积机器支撑马达组件，以保持锁定构件插入通过第一螺钉孔和对应的第二螺钉孔并保持对准的第一螺丝孔和相应的第二螺丝孔。

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