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1. 发明申请

US20220005674A1 High Speed Synchronization Of Plasma Source/Bias Power Delivery 有权
公开(公告)号：US20220005674A1
公开(公告)日：2022-01-06
申请号：US17480993
申请日：2021-09-21
申请人： MKS Instruments, Inc. , LAM RESEARCH CORPORATION
发明人： Aaron T. RADOMSKI , Benjamin J. GITLIN , Larry J. FISK, II , Mariusz OLDZIEJ , Aaron M. BURRY , Jonathan W. SMYKA , Alexei MARAKHTANOV , Bing JI , Felix Leib KOZAKEVICH , John HOLLAND , Ranadeep BHOWMICK
IPC分类号： H01J37/32
摘要： A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.

2. 发明申请

US20220165545A1 Apparatus and Tuning Method for Mitigating RF Load Impedance Variations Due to Periodic Disturbances 有权
公开(公告)号：US20220165545A1
公开(公告)日：2022-05-26
申请号：US17102598
申请日：2020-11-24
申请人： MKS Instruments, Inc.
发明人： Aaron M. BURRY , Aaron T. RADOMSKI , Mariusz OLDZIEJ , Peter PAUL , Ross REINHARDT
IPC分类号： H01J37/32
摘要： A radio frequency (RF) power generation system includes a RF power source that generates a RF output signal delivered to a load. A RF power controller is configured to generate a control signal to vary the RF output signal. The controller adjusts a parameter associated with the RF output signal, and the parameter is controlled in accordance with a trigger signal. The parameter is adjusted in accordance with a cost function, and the cost function is determined by intruding a perturbation into an actuator that affects the cost function. The actuator may control an external RF output signal, and the trigger signal may vary in accordance with the external RF output signal.

3. 发明申请

US20140118031A1 RF Pulse Edge Shaping 有权
标题翻译：射频脉冲边缘整形
公开(公告)号：US20140118031A1
公开(公告)日：2014-05-01
申请号：US13663574
申请日：2012-10-30
申请人： MKS INSTRUMENTS, INC.
发明人： Amish RUGHOONUNDON , Larry J. FISK, II , Aaron T. RADOMSKI
IPC分类号： H03K5/01
CPC分类号： H03K4/026 , H03K5/00006
摘要： A radio frequency (RF) generation module includes a power control module that receives first and second desired amplitudes of an output of the RF generation module in first and second respective states, and that outputs, based on the first and second desired amplitudes, input power setpoints corresponding to a transition from the first state to the second state. A frequency control module receives the input power setpoints and outputs frequency setpoints corresponding to the input power setpoints. A pulse shaping module receives the input power setpoints, the frequency setpoints, and an indication of when to transition from the first state to the second state, and transitions the output of the RF generation module from the first state to the second state based on the input power setpoints, the frequency setpoints, and the indication.
摘要翻译：射频（RF）生成模块包括功率控制模块，其在第一和第二相应状态下接收RF产生模块的输出的第一和第二期望幅度，并且基于第一和第二期望幅度输出输入功率设定值对应于从第一状态到第二状态的转变。频率控制模块接收输入功率设定点并输出与输入功率设定值对应的频率设定值。脉冲整形模块接收输入功率设定点，频率设定点以及何时从第一状态转换到第二状态的指示，并且基于该第一状态将RF产生模块的输出从第一状态转换到第二状态输入功率设定值，频率设定值和指示。

4. 发明申请

US20210373054A1 System and Method for Arc Detection Using a Bias RF Generator Signal 有权
公开(公告)号：US20210373054A1
公开(公告)日：2021-12-02
申请号：US16887346
申请日：2020-05-29
申请人： MKS Instruments, Inc.
发明人： Larry J. FISK, II , Benjamin J. GITLIN , Mariusz OLDZIEJ , Aaron M. BURRY , Matthew G. HARRINGTON , Aaron T. RADOMSKI
IPC分类号： G01R23/16 , G01R29/02 , H01J37/32
摘要： An arc detector for a RF power supply system, where the RF power supply incudes a first RF power supply and a second RF power supply. A signal applied to a non-linear load varies in accordance with an output from one of the first RF power supply or the second RF power supply. The signal has a frequency. During an arc or arc condition in the non-linear load, the frequency of the signal changes, and if the frequency is outside of a selected range, an arc or arc condition is indicated. The frequency can be determined by digitizing the signal into a series of pulses and measuring a time or period between pulses.

5. 发明申请

US20190334385A1 PIECEWISE RF POWER SYSTEMS AND METHODS FOR SUPPLYING PRE-DISTORTED RF BIAS VOLTAGE SIGNALS TO AN ELECTRODE IN A PROCESSING CHAMBER 审中-公开
公开(公告)号：US20190334385A1
公开(公告)日：2019-10-31
申请号：US16506555
申请日：2019-07-09
申请人： MKS Instruments, Inc.
发明人： Ky LUU , Aaron T. RADOMSKI
IPC分类号： H02J50/20 , H02J50/80 , H04B5/00
摘要： A radio frequency power system is provided that includes bias modules, a switch, a matching network, and a control module. The bias modules are configured to generate respectively DC bias voltages. The switch is configured to (i) receive current from the bias modules, and (ii) control flow of the current from the bias modules to generate a radio frequency bias voltage signal. The matching network is configured to (i) receive the radio frequency bias voltage signal, and (ii) based on the radio frequency bias voltage signal, supply at least a portion of a radio frequency output voltage signal to an electrode of a substrate support in a processing chamber. The control module is connected to the switch and configured to control a state of the switch based on the radio frequency output voltage signal to shape a waveform of the radio frequency bias voltage signal.

6. 发明申请

US20140266492A1 Virtual RF Sensor 有权
标题翻译：虚拟射频传感器
公开(公告)号：US20140266492A1
公开(公告)日：2014-09-18
申请号：US13832901
申请日：2013-03-15
申请人： MKS INSTRUMENTS, INC.
发明人： Aaron T. RADOMSKI , Dennis M. BROWN , Nicholas NELSON
IPC分类号： H03H7/40
CPC分类号： H03H7/40
摘要： A radio frequency (RF) generation system includes an impedance determination module that receives an RF voltage and an RF current. The impedance determination module further determines an RF generator impedance based on the RF voltage and the RF current. The RF generation system also includes a control module that determines a plurality of electrical values based on the RF generator impedance. The matching module further matches an impedance of a load based on the RF generator impedance and the plurality of electrical components. The matching module also determines a 2 port transfer function based on the plurality of electrical values. The RF generation system also includes a virtual sensor module that estimates a load voltage, a load current, and a load impedance based on the RF voltage, the RF generator, the RF generator impedance, and the 2 port transfer function.
摘要翻译：射频（RF）生成系统包括接收RF电压和RF电流的阻抗确定模块。阻抗确定模块还基于RF电压和RF电流来确定RF发生器阻抗。 RF发生系统还包括控制模块，该控制模块基于RF发生器阻抗来确定多个电气值。匹配模块还基于RF发生器阻抗和多个电气部件来匹配负载的阻抗。匹配模块还基于多个电气值确定2端口传送功能。 RF发生系统还包括虚拟传感器模块，其基于RF电压，RF发生器，RF发生器阻抗和2端口传递函数来估计负载电压，负载电流和负载阻抗。

7. 发明申请

US20230041177A1 Adaptive Pulse Shaping With Post Match Sensor 有权
公开(公告)号：US20230041177A1
公开(公告)日：2023-02-09
申请号：US17396901
申请日：2021-08-09
申请人： MKS Instruments, Inc.
发明人： Jonathan W. SMYKA , Aaron T. RADOMSKI , Peter PAUL , Aaron M. BURRY
IPC分类号： H01J37/32
摘要： A RF generator includes a RF power source and a RF control module coupled to the RF power source. The RF control module is configured to generate at least one control signal to vary a respective at least one of an RF output signal from the RF power source or an impedance between the RF power source and a load. The RF output signal includes a RF signal modulated by a pulse signal, and the RF control module is further configured to adjust the at least one control signal to vary at least one of an amplitude or a frequency of the RF output signal or the impedance between the RF power source and the load to control a shape of the pulse signal. The at least one of the amplitude, the frequency, or the impedance is adjusted in accordance with respective feedforward adjustments that vary in accordance with a respective sensed pulse parameter detected between a matching network and the load.

8. 发明申请

US20210118649A1 Intermodulation Distortion Mitigation Using Electronic Variable Capacitor 有权
公开(公告)号：US20210118649A1
公开(公告)日：2021-04-22
申请号：US17073709
申请日：2020-10-19
申请人： MKS Instruments, Inc.
发明人： Jin HUH , Aaron T. RADOMSKI , Duy NGUYEN , Soohan KIM
IPC分类号： H01J37/32 , H05H1/46
摘要： A matching network for a system having a non-linear load and powered by a first RF power supply operating at a first frequency and a second RF power supply operating at a second frequency. The matching network includes a first matching network section for providing an impedance match between the first power supply and the load. The matching network also includes a second matching network section for providing an impedance match between the second power supply and the load. A the first matching network section includes a first variable reactance, and the variable reactance is controlled in accordance with IMD sensed in the signal applied to the load by the first RF power supply. The variable reactance is adjusted in accordance with the IMD to reduce the detected IMD.

9. 发明申请

US20210013007A1 Adaptive Periodic Waveform Controller 有权
公开(公告)号：US20210013007A1
公开(公告)日：2021-01-14
申请号：US16905377
申请日：2020-06-18
申请人： MKS Instruments, Inc.
发明人： Larry J. FISK, II , Aaron T. RADOMSKI , Jonathan W. SMYKA
IPC分类号： H01J37/32
摘要： A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.

10. 发明申请

US20190214231A1 Adaptive Periodic Waveform Controller 审中-公开
公开(公告)号：US20190214231A1
公开(公告)日：2019-07-11
申请号：US16273595
申请日：2019-02-12
申请人： MKS Instruments, Inc.
发明人： Larry J. FISK, II , Aaron T. RADOMSKI , Jonathan W. SMYKA
IPC分类号： H01J37/32
摘要： A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.

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