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    • 1. 发明申请
    • FORM MEASURING APPARATUS AND MEASURING METHOD FOR V GROOVE CENTER
    • 表面测量装置和测量方法
    • US20150052769A1
    • 2015-02-26
    • US14464184
    • 2014-08-20
    • MITUTOYO CORPORATION
    • Takashi NODAHiroshi KAMITANIKazumi MIZUKAMI
    • G01B5/008
    • G01B5/008G01B5/204G01B21/047
    • Controller executes a first scanning control, causing a driver to move a probe such that a tip scans along an inclined surface of a V groove to approach a center of the V groove, and a second scanning control, causing the driver to move the probe such that the tip scans along the inclined surface of the V groove to approach the center of the V groove from a side opposite that of the first scanning control. Angle calculator calculates an angle created between a direction of a deflection vector of the probe and a predetermined direction. Threshold value-correspondent coordinate obtainer obtains coordinates of the tip where the angle has changed to exceed a first threshold value during execution of the first scanning control and obtains coordinates of the tip where the angle has changed to exceed a second threshold value during execution of the second scanning control.
    • 控制器执行第一扫描控制,使得驾驶员移动探头,使得尖端沿着V槽的倾斜表面扫描以接近V槽的中心;以及第二扫描控制,使得驾驶员将探针移动到 尖端沿着V槽的倾斜表面扫描以从与第一扫描控制的相反侧接近V槽的中心。 角度计算器计算在探针的偏转矢量的方向和预定方向之间产生的角度。 阈值对应坐标获取器在执行第一扫描控制期间获得角度已经改变的尖端的坐标超过第一阈值,并且在执行第一扫描控制期间获得角度已经改变的尖端的坐标超过第二阈值 第二扫描控制。