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    • 9. 发明授权
    • Ferroelectric varactor with built-in DC blocks
    • 铁电变容二极管内置直流电阻
    • US06727535B1
    • 2004-04-27
    • US09434433
    • 1999-11-04
    • Louise C. SenguptaSteven C. StowellYongfei ZhuSomnath Sengupta
    • Louise C. SenguptaSteven C. StowellYongfei ZhuSomnath Sengupta
    • H01L2976
    • H01L27/016H01G7/06H01L29/93
    • A voltage tunable dielectric varactor includes a tunable ferroelectric layer and first and second non-tunable dielectric layers. First and second electrodes positioned adjacent to the tunable ferroelectric layer form a tunable capacitor. A third electrode is positioned adjacent to the first non-tunable dielectric layer such that the third and first electrodes and the first non-tunable dielectric layer form a first blocking capacitor. A fourth electrode is positioned adjacent to the second non-tunable dielectric layer such that the fourth and second electrodes and the second non-tunable dielectric layer form a second blocking capacitor. The first and second electrodes can be positioned on a surface of the tunable ferroelectric layer opposite the generally planar surface of the substrate, with the first and second electrodes being separated to form a gap. The first and second non-tunable dielectric layers can also be positioned on the generally planar surface of the substrate. The third electrode can be positioned on the surface of the first non-tunable dielectric layer opposite the generally planar surface of the substrate such that the third and first electrodes form a second gap. The fourth electrode can be positioned on the surface of the second non-tunable dielectric layer opposite the generally planar surface of the substrate such that the fourth and second electrodes form a third gap.
    • 电压可调介质变容二极管包括可调谐铁电层和第一和第二不可调电介质层。 位于与可调谐铁电体层相邻的第一和第二电极形成可调电容器。 第三电极定位成与第一非可调电介质层相邻,使得第三电极和第一电极和第一非可调电介质层形成第一阻塞电容器。 第四电极定位成与第二非可调电介质层相邻,使得第四和第二电极和第二非可调电介质层形成第二阻塞电容器。 第一和第二电极可以位于与基板的大致平坦的表面相对的可调谐铁电层的表面上,其中第一和第二电极被分离以形成间隙。 第一和第二非可调电介质层也可以位于基底的大致平坦的表面上。 第三电极可以位于与基板的大致平坦的表面相对的第一非可调电介质层的表面上,使得第三和第一电极形成第二间隙。 第四电极可以位于与基板的大致平坦的表面相对的第二非可调电介质层的表面上,使得第四和第二电极形成第三间隙。