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    • 1. 发明授权
    • Structure and method of fabricating a hinge type MEMS switch
    • 制造铰链式MEMS开关的结构和方法
    • US07348870B2
    • 2008-03-25
    • US10905449
    • 2005-01-05
    • Louis C. HsuTimothy DaltonLawrence ClevengerCarl RadensKwong Hon WongChih-Chao Yang
    • Louis C. HsuTimothy DaltonLawrence ClevengerCarl RadensKwong Hon WongChih-Chao Yang
    • H01H51/22
    • H01H59/0009H01H1/20H01H2001/0084H01H2001/0089Y10T29/49105Y10T29/49128Y10T29/49155Y10T29/49204Y10T29/49208
    • A hinge type MEMS switch that is fully integratable within a semiconductor fabrication process, such as a CMOS, is described. The MEMS switch constructed on a substrate consists of two posts, each end thereof terminating in a cap; a movable conductive plate having a surface terminating in a ring in each of two opposing edges, the rings being loosely connected to guiding posts; an upper and lower electrode pairs; and upper and lower interconnect wiring lines connected and disconnected by the movable conductive plate. When in the energized state, a low voltage level is applied to the upper electrode pair, while the lower electrode pair is grounded. The conductive plate moves up, shorting two upper interconnect wirings lines. Conversely, the conductive plate moves down when the voltage is applied to the lower electrode pair, while the upper electrode pair is grounded, shorting the two lower interconnect wiring lines and opening the upper wiring lines. The MEMS switch thus formed generates an even force that provides the conductive plate with a translational movement, with the displacement being guided by the two vertical posts.
    • 描述了在诸如CMOS之类的半导体制造工艺中可完全集成的铰链式MEMS开关。 构造在基板上的MEMS开关由两个柱构成,每个端部终止于盖; 可移动导电板,其表面终止于两个相对边缘中的每一个中的环中,所述环松动地连接到引导柱; 上下电极对; 以及由可动导电板连接和断开的上下互连布线。 当处于通电状态时,低电压电平施加到上电极对,而下电极对接地。 导电板向上移动,使两条上部互连线路短路。 相反,当电压施加到下电极对时,导电板向下移动,而上电极对接地,使两个下互连布线短路并打开上布线。 由此形成的MEMS开关产生均匀的力,其为导电板提供平移运动,位移由两个垂直柱引导。