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    • 1. 发明申请
    • ADJUSTABLE GAS DISTRIBUTION APPARATUS
    • 可调节气体分配装置
    • US20100112212A1
    • 2010-05-06
    • US12604591
    • 2009-10-23
    • Lin ZhangLun TsueiAlan TsoTom K. ChoBrian Sy-Yuan Shieh
    • Lin ZhangLun TsueiAlan TsoTom K. ChoBrian Sy-Yuan Shieh
    • C23C16/455C23C16/54
    • H01J37/32935C23C16/45565C23C16/45589H01J37/3244
    • Embodiments of the present invention generally provide apparatus and methods for altering the contour of a gas distribution plate within a process chamber without breaking vacuum conditions within the chamber. In one embodiment, a central support device adjusted to vary the height of a central region of a gas distribution plate with respect to the periphery of the gas distribution plate. In another embodiment, a plurality of central support devices is adjusted to vary the height of a central region of a gas distribution plate with respect to the periphery of the plate. In yet another embodiment, a plurality of central support devices and a plurality of mid-range support devices are adjusted to vary the height of certain regions of the gas distribution plate with respect to other regions of the gas distribution plate. In one embodiment, the contour of the gas distribution plate is altered based on changes detected within the process chamber.
    • 本发明的实施例通常提供用于改变处理室内的气体分配板的轮廓而不破坏室内的真空条件的装置和方法。 在一个实施例中,中央支撑装置被调节以改变气体分配板的中心区域相对于气体分配板的周边的高度。 在另一个实施例中,调节多个中心支撑装置以相对于板的周边改变气体分配板的中心区域的高度。 在另一个实施例中,调节多个中央支撑装置和多个中距离支撑装置以改变气体分配板的某些区域相对于气体分配板的其它区域的高度。 在一个实施例中,基于在处理室内检测到的变化来改变气体分配板的轮廓。
    • 4. 发明授权
    • Fiberglass compositions
    • 玻璃纤维组合物
    • US08334228B2
    • 2012-12-18
    • US12637737
    • 2009-12-14
    • Yuqiang ZhangGuorong CaoBing ZhangLin ZhangWenzhong XingGuijiang Gu
    • Yuqiang ZhangGuorong CaoBing ZhangLin ZhangWenzhong XingGuijiang Gu
    • C03C13/02C03C13/06
    • C03C13/00
    • This invention involves a fiberglass composition containing the following components: SiO2, Al2O3, CaO, MgO, B2O3, F2, TiO2, K2O, Na2O, Fe2O3 and SO3. The weight percentage of each of the components are as follows: SiO2 58˜65%, CaO 20˜26%, Al2O3 9˜17%, MgO 0.5˜1%, B2O3 0˜5%, F2 0˜1%, TiO2 0.1˜1%, K2O+Na2O 0˜0.8%, Fe2O3 0.1˜0.5%, SO3 0˜0.6%. The ternary system, SiO2—Al2O3—CaO, is basis of the fiberglass composition in this invention, which also has low quantities of MgO and B2O3. In addition, the total amount of alkaline earth oxide and the proportional relationship between MgO and CaO are rationally designed, which helps to improve the mechanical strength, heat resistance, and chemical stability of the glass. It also has excellent manufacturing performance. Moreover, the raw materials of the fiberglass composition in this invention are low in cost, and the invention meets environmental protection requirements.
    • 本发明涉及含有以下组分的玻璃纤维组合物:SiO2,Al2O3,CaO,MgO,B2O3,F2,TiO2,K2O,Na2O,Fe2O3和SO3。 每种组分的重量百分比如下:SiO 2 58〜65%,CaO 20〜26%,Al 2 O 3 9〜17%,MgO 0.5〜1%,B 2 O 3〜5%,F2 0〜1%,TiO 2 0.1 〜1%,K2O + Na2O 0〜0.8%,Fe2O3 0.1〜0.5%,SO3 0〜0.6%。 三元体系SiO2-Al2O3-CaO是本发明玻璃纤维组合物的基础,它也具有低量的MgO和B2O3。 此外,合理设计碱土金属的总量和MgO与CaO的比例关系,有利于提高玻璃的机械强度,耐热性和化学稳定性。 它也具有优良的制造性能。 此外,本发明的玻璃纤维组合物的原料成本低,本发明符合环保要求。