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    • 3. 发明申请
    • Integrated Micromachining Proximity Switch Sensors in Air/Oil Lubricators
    • 集成微加工接近开关传感器在空气/油润滑剂
    • US20110301765A1
    • 2011-12-08
    • US12796565
    • 2010-06-08
    • Liji HuangJiliang RuanJian LuoChih-Chang Chen
    • Liji HuangJiliang RuanJian LuoChih-Chang Chen
    • G05D7/00G05D23/00G01N25/00
    • G01N33/2888G01N25/18
    • An apparatus integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon thermal sensor as a proximity switch sensor in air/oil Lubricators is disclosed in the present invention. The present invention relates to mass flow sensing and measurement for both gas and liquid phase and relates to air/oil lubrication process for multi-point lubrication machine. The invented apparatus is utilized as an alarm device to prevent mechanical system failures caused by the discontinuity of oil lubrication. The MEMS silicon thermal sensor is distinguished with a variety of advantages of small size, low power consumption, high reliability and high accuracy. In addition to the above benefits, the most significant and critical advantage is its fast response time of less than 20 msec, which makes the proximity switch control become viable for preventing equipment damage from oil lubricants discontinuity.
    • 本发明公开了一种与微加工(即微机电MEMS机械系统)硅热传感器集成的装置,作为空气/油中的接近开关传感器。 本发明涉及气相和液相的质量流量感测和测量,涉及多点润滑机的空气/油润滑过程。 本发明的装置用作报警装置,以防止油润滑不连续引起的机械系统故障。 MEMS硅热传感器具有体积小,功耗低,可靠性高,精度高等优点。 除了上述优点之外,最重要和最关键的优点是其快速响应时间小于20毫秒,这使得接近开关控制变得可行,以防止油润滑剂不连续的设备损坏。
    • 4. 发明授权
    • Integrated micromachining proximity switch sensors in air/oil lubricators
    • 空气/油润滑器中的集成微加工接近开关传感器
    • US08644693B2
    • 2014-02-04
    • US12796565
    • 2010-06-08
    • Liji HuangJiliang RuanJian LuoChih-Chang Chen
    • Liji HuangJiliang RuanJian LuoChih-Chang Chen
    • F24H1/10
    • G01N33/2888G01N25/18
    • An apparatus integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon thermal sensor as a proximity switch sensor in air/oil Lubricators is disclosed in the present invention. The present invention relates to mass flow sensing and measurement for both gas and liquid phase and relates to air/oil lubrication process for multi-point lubrication machine. The invented apparatus is utilized as an alarm device to prevent mechanical system failures caused by the discontinuity of oil lubrication. The MEMS silicon thermal sensor is distinguished with a variety of advantages of small size, low power consumption, high reliability and high accuracy. In addition to the above benefits, the most significant and critical advantage is its fast response time of less than 20 msec, which makes the proximity switch control become viable for preventing equipment damage from oil lubricants discontinuity.
    • 本发明公开了一种与微加工(即微机电MEMS机械系统)硅热传感器集成的装置,作为空气/油中的接近开关传感器。 本发明涉及气相和液相的质量流量感测和测量,涉及多点润滑机的空气/油润滑过程。 本发明的装置用作报警装置,以防止油润滑不连续引起的机械系统故障。 MEMS硅热传感器具有体积小,功耗低,可靠性高,精度高等优点。 除了上述优点之外,最重要和最关键的优点是其快速响应时间小于20毫秒,这使得接近开关控制变得可行,以防止油润滑剂不连续的设备损坏。