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    • 1. 发明授权
    • Methods and devices for supporting substrates using fluids
    • 使用流体支撑底物的方法和装置
    • US07144299B2
    • 2006-12-05
    • US11125605
    • 2005-05-09
    • Leonel R. AranaTerry L. SterrettDevendra Natekar
    • Leonel R. AranaTerry L. SterrettDevendra Natekar
    • B24B1/00
    • B24B7/228B24B41/068Y10T29/49998
    • Electronic device support and processing methods are described. One embodiment includes a method of processing an electronic device including solder bumps extending therefrom. The method includes providing at least one fluid selected from the group consisting of electrorheological fluids and magnorheological fluids on a support structure. The solder bumps extending from the electronic device are positioned in the fluid. The fluid is activated by applying a field selected from the group consisting of an electric field and a magnetic field to the fluid. The activated fluid mechanically holds the electronic device in place. A surface of the electronic device is polished while the electronic device is held in place by the activated fluid. The fluid is deactivated by removing the applied field from the fluid, and the electronic device is separated from the deactivated fluid. Other embodiments are described and claimed.
    • 描述电子设备支持和处理方法。 一个实施例包括处理包括从其延伸的焊锡凸块的电子器件的方法。 该方法包括在支撑结构上提供至少一种选自电流变流体和流变流体的流体。 从电子设备延伸的焊料凸块位于流体中。 通过将从电场和磁场组成的组中选出的场施加到流体来激活流体。 活化流体将电子设备机械地保持在适当位置。 电子设备的表面被抛光,同时电子设备被活化的流体保持就位。 通过从流体中除去所施加的场,使流体失活,并且电子装置与去活化流体分离。 描述和要求保护其他实施例。