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1. 发明授权

US5859480A AC power supply controller for use in semiconductor fabrication facilities 失效
标题翻译：用于半导体制造设备的交流电源控制器
公开(公告)号：US5859480A
公开(公告)日：1999-01-12
申请号：US855239
申请日：1997-05-13
申请人： Kyu-Bok Ryu , Jung-Ho Guk
发明人： Kyu-Bok Ryu , Jung-Ho Guk
IPC分类号： H02J9/00 , H02J1/00 , H02J3/00 , H02J3/38 , H02J9/06 , H02J7/00
CPC分类号： H02J9/062 , H02J3/38 , Y10T307/305 , Y10T307/344 , Y10T307/406 , Y10T307/615 , Y10T307/724
摘要： A power supply controller is capable of regulating the amount of electrical power supplied to semiconductor fabrication facilities to amounts in accordance with processing conditions of each facility. The apparatus includes a plurality of process status detectors corresponding to the facilities, each status detector detecting an operation mode of each of the facilities and generating a mode detection signal. A plurality of unit controllers are provided, corresponding to the process status detectors, each unit controller generating a power control signal in response to the mode detection signal. A plurality of power supply units are provided, corresponding to the unit controllers, each power supply unit controlling and providing an amount of electrical power from the main power supply to the facilities in response to the power control signal corresponding the operation mode of each facility.
摘要翻译：电源控制器能够根据每个设施的处理条件来调节供应给半导体制造设备的电力量。该装置包括对应于该设施的多个处理状态检测器，每个状态检测器检测每个设备的操作模式并产生模式检测信号。提供了多个单元控制器，对应于处理状态检测器，每个单元控制器响应于模式检测信号产生功率控制信号。提供了与单元控制器相对应的多个电源单元，每个电源单元响应于对应于每个设施的操作模式的功率控制信号，控制并从主电源向设施提供一定量的电力。

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