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    • 1. 发明授权
    • Method of manufacturing non-volatile DRAM
    • 制造非易失性DRAM的方法
    • US07232717B1
    • 2007-06-19
    • US10447675
    • 2003-05-28
    • Kyu Hyun ChoiSheau-suey Li
    • Kyu Hyun ChoiSheau-suey Li
    • H01L21/8244
    • H01L27/115H01L27/105H01L27/1052H01L27/10873H01L27/10894H01L27/11521
    • A method of forming a non-volatile DRAM includes, in part: forming p-well and an n-well between two trench isolation regions formed in a semiconductor substrate, forming a polysilicon control gate of the non-volatile device disposed in the non-volatile DRAM, forming a first oxide spacer above portions of the body region and adjacent said first control gate, forming gate oxide layers of varying thicknesses above the body region, forming the guiding gate of the non-volatile device and the gate of an associated passgate transistor, forming LDD implant regions of the non-volatile device and the associated pass-gate transistor, forming source/drain regions of the non-volatile device and the associated pass-gate transistor, depositing a dielectric layer over the polysilicon guiding gate of the non-volatile device and the polysilicon gate of the associated passgate transistor, forming polysilicon landing pads, and forming polysilicon vertical walls defining capacitor plates of the non-volatile DRAM capacitor.
    • 形成非挥发性DRAM的方法部分包括:形成在半导体衬底中的两个沟槽隔离区之间形成p阱和n阱,形成设置在非易失性DRAM中的非易失性器件的多晶硅控制栅极, 在本体区域的部分和邻近所述第一控制栅极之上形成第一氧化物隔离层,在体区上方形成不同厚度的栅极氧化物层,形成非易失性器件的引导栅极和相关联的栅极 晶体管,形成非易失性器件的LDD注入区和相关联的栅极晶体管,形成非易失性器件的源极/漏极区域和相关联的栅极 - 晶体管,在介电层的多晶硅引导栅极上沉积介电层 非易失性器件和相关联的闸门晶体管的多晶硅栅极,形成多晶硅着陆焊盘,以及形成限定非挥发物的电容器板的多晶硅垂直壁 e DRAM电容。
    • 2. 发明授权
    • Non-volatile memory device
    • 非易失性存储器件
    • US06965145B2
    • 2005-11-15
    • US10394417
    • 2003-03-19
    • Kyu Hyun Choi
    • Kyu Hyun Choi
    • G11C14/00H01L29/792
    • G11C14/00
    • A non-volatile memory device (hereinafter alternatively referred to device) includes a guiding gate that extends along a first portion of the device's channel length and a control gate that extends along a second portion of the device's channel length. The first and second portions of the channel length do not overlap. The guiding gate, which overlays the substrate above the channel region, is insulated from the semiconductor substrate in which the device is formed via an oxide layer. The control gate, which also overlays the substrate above the channel region, is insulated from the substrate via an oxide-nitride-oxide layer. The device includes a source terminal, a drain terminal, a guiding gate terminal, a control gate terminal, and a substrate terminal coupled to the semiconductor substrate in which the device is formed.
    • 非易失性存储器件(以下可替代地称为器件)包括沿器件沟道长度的第一部分延伸的导向栅极和沿器件沟道长度的第二部分延伸的控制栅极。 通道长度的第一和第二部分不重叠。 在通道区域上方覆盖衬底的引导栅极与通过氧化物层形成器件的半导体衬底绝缘。 也在通道区域上方覆盖衬底的控制栅极通过氧化物 - 氮化物 - 氧化物层与衬底绝缘。 该器件包括源极端子,漏极端子,引导栅极端子,控制栅极端子和耦合到其中形成器件的半导体衬底的衬底端子。
    • 3. 发明授权
    • High capacity stacked DRAM device and process for making a smaller geometry
    • 高容量堆叠DRAM器件和制造较小几何形状的工艺
    • US06514819B1
    • 2003-02-04
    • US09258596
    • 1999-02-26
    • Kyu Hyun Choi
    • Kyu Hyun Choi
    • H01L218242
    • H01L27/10852H01L27/10817
    • A DRAM having a theoretical cell layout efficiency of 100% and a density of up to four gigabits DRAM is obtained without sacrificing the storage capacitor values. This accomplishment is achieved by introducing landing pads in layout and obtaining narrow widths down to 1000A and small spaces down to 700 Å. The DRAM has active isolations, word lines, cup-shaped vertical capacitor walls, and bit lines. The process for forming small dimensions having this narrow width, narrow wall and the small space in ranges down 800 Å comprises depositing a form material on the surface of a product material. A portion of the form material is removed by RIE etching by using the lithography technique. A layer of masking material is deposited over the form material and product material, the layer of masking material having a thickness correlating to said desired width of product material. Masking material is removed by vertical RIE until the form material is exposed, leaving a predetermined width of masking material. Portions of the product material which are not protected by the masking material are removed to leave a desired width of product material corresponding to the width of the masking material. The corresponding process can be used to form spacings of corresponding dimensions.
    • 在不牺牲存储电容器值的情况下,获得具有100%的理论单元布局效率和高达4吉比特DRAM的密度的DRAM。 这种成就通过在布局中引入着陆垫并获得低至1000A的窄宽度和低至700的小空间来实现。 DRAM具有主动隔离,字线,杯形垂直电容器壁和位线。 用于形成具有这种窄宽度,窄壁和在800范围内的小空间的小尺寸的方法包括将成形材料沉积在产品材料的表面上。 通过使用光刻技术通过RIE蚀刻去除部分成形材料。 掩模材料层沉积在成形材料和产品材料上方,掩模材料层具有与产品材料的所需期望宽度相关的厚度。 掩蔽材料通过垂直RIE去除直到成型材料暴露,留下预定宽度的掩模材料。 去除未被掩蔽材料保护的产品材料的部分以留下与掩模材料的宽度相对应的所需产品材料宽度。 相应的过程可用于形成相应尺寸的间距。
    • 5. 发明申请
    • METHOD OF MANUFACTURING SELF-ALIGNED NON-VOLATILE MEMORY DEVICE
    • 制造自对准非易失性存储器件的方法
    • US20050136592A1
    • 2005-06-23
    • US10746907
    • 2003-12-23
    • Kyu Hyun Choi
    • Kyu Hyun Choi
    • H01L21/336H01L21/8246H01L27/105H01L27/115
    • H01L27/11568H01L27/105H01L27/115H01L27/11573
    • A method of forming a self-aligned non-volatile device, includes, in part: forming trench isolation regions, forming a well between the trench isolation, forming a second well above the first well, forming a first oxide layer above a first portion of the second well, forming a first dielectric, a first polysilicon gate, and a second dielectric layer, respectively, above the first polysilicon layer, forming a first spacer above the body region and adjacent the first polysilicon layer, forming a second oxide layer above a second portion of the second well not covered by the first spacer, forming a second polysilicon gate layer above the second oxide layer, the first spacer and a portion of the second dielectric layer, removing the second polysilicon layer and the layers below it that are exposed in a via formed using a mask, thereby forming self-aligned source/drain regions.
    • 一种形成自对准非易失性装置的方法,部分包括形成沟槽隔离区域,在沟槽隔离之间形成阱,在第一阱之上形成第二阱,在第一部分的第一部分上方形成第一氧化物层 所述第二阱分别在所述第一多晶硅层上方形成第一电介质,第一多晶硅栅极和第二电介质层,在所述主体区域的上方形成与所述第一多晶硅层相邻的第一间隔物,在所述第一多晶硅层的上方形成第二氧化物层 所述第二阱的第二部分未被所述第一间隔物覆盖,在所述第二氧化物层上方形成第二多晶硅栅极层,所述第一间隔物和所述第二电介质层的一部分,去除所述第二多晶硅层和暴露于其中的所述第二多晶硅层 在使用掩模形成的通孔中,从而形成自对准的源/漏区。
    • 7. 发明授权
    • Method of making a smaller geometry high capacity stacked DRAM device
    • 制造较小几何大容量堆叠DRAM器件的方法
    • US5946566A
    • 1999-08-31
    • US609846
    • 1996-03-01
    • Kyu Hyun Choi
    • Kyu Hyun Choi
    • H01L21/8242H01L27/108
    • H01L27/10852H01L27/10817
    • A DRAM having a theoretical cell layout efficiency of 100% and a density of up to four gigabits DRAM is obtained without sacrificing the storage capacitor values. This accomplishment is achieved by introducing landing pads in layout and obtaining narrow widths down to 1000 .ANG. and small spaces down to 700 .ANG.. The DRAM has active isolations, word lines, cup-shaped vertical capacitor walls, and bit lines. The process for forming small dimensions having this narrow width, narrow wall and the small space in ranges down 800 .ANG. comprises depositing a form material on the surface of a product material. A portion of the form material is removed by RIE etching by using the lithography technique. A layer of masking material is deposited over the form material and product material, the layer of masking material having a thickness correlating to said desired width of product material. Masking material is removed by vertical RIE until the form material is exposed, leaving a predetermined width of masking material. Portions of the product material which are not protected by the masking material are removed to leave a desired width of product material corresponding to the width of the masking material. The corresponding process can be used to form spacings of corresponding dimensions.
    • 在不牺牲存储电容器值的情况下,获得具有100%的理论单元布局效率和高达4吉比特DRAM的密度的DRAM。 这种成就是通过在布局中引入着陆垫并获得窄至1000个ANGSTROM和低至700安培的小空间来实现的。 DRAM具有主动隔离,字线,杯形垂直电容器壁和位线。 用于形成具有窄窄度,窄壁和小范围的小尺寸的小尺寸的方法800 ANGSTROM包括将成形材料沉积在产品材料的表面上。 通过使用光刻技术通过RIE蚀刻去除部分成形材料。 掩模材料层沉积在成形材料和产品材料上方,掩模材料层具有与产品材料的所需期望宽度相关的厚度。 掩蔽材料通过垂直RIE去除直到成型材料暴露,留下预定宽度的掩模材料。 去除未被掩蔽材料保护的产品材料的部分以留下与掩模材料的宽度相对应的所需产品材料宽度。 相应的过程可用于形成相应尺寸的间距。
    • 9. 发明授权
    • Non-volatile DRAM and a method of making thereof
    • 非易失性DRAM及其制造方法
    • US07186612B2
    • 2007-03-06
    • US10819596
    • 2004-04-06
    • Kyu Hyun Choi
    • Kyu Hyun Choi
    • H01L21/8234
    • H01L27/108H01L27/105H01L27/1052H01L27/10894H01L27/115H01L27/11526H01L27/11546
    • A method of forming a non-volatile DRAM includes, in part, forming a first polysilicon layer above a first dielectric layer to form a control gate of the non-volatile device of the non-volatile DRAM; forming sidewall spacers adjacent the first polysilicon layer; forming a second oxide layer; forming a second polysilicon layer above the second oxide layer, forming lightly doped areas in the body region; forming a second spacer above the body region, forming source and drain regions of the non-volatile device and the MOS transistor of the non-volatile DRAM; forming a third polysilicon layer over portions of the lightly doped areas to form polysilicon landing pads; forming a third dielectric layer above the polysilicon landing pads; and forming a fourth polysilicon layer over the third dielectric layer.
    • 形成非易失性DRAM的方法部分地包括在第一介电层上方形成第一多晶硅层以形成非易失性DRAM的非易失性器件的控制栅极; 形成与所述第一多晶硅层相邻的侧壁间隔物; 形成第二氧化物层; 在所述第二氧化物层上形成第二多晶硅层,在所述体区中形成轻掺杂区域; 在所述体区域上方形成第二间隔物,形成所述非易失性器件的源极和漏极区域以及所述非易失性DRAM的所述MOS晶体管; 在所述轻掺杂区域的部分上形成第三多晶硅层以形成多晶硅着陆焊盘; 在所述多晶硅着陆焊盘上形成第三电介质层; 以及在第三介电层上形成第四多晶硅层。
    • 10. 发明授权
    • Non-volatile differential dynamic random access memory
    • 非易失性差分动态随机存取存储器
    • US06954377B2
    • 2005-10-11
    • US10394496
    • 2003-03-19
    • Kyu Hyun ChoiSheau-suey Li
    • Kyu Hyun ChoiSheau-suey Li
    • G11C14/00
    • G11C14/00
    • In accordance with the present invention, a memory cell includes a pair of non-volatile devices and a pair of DRAM cells each associated with a different one of the non-volatile devices. Each DRAM cell further includes an MOS transistor a capacitor. The DRAM cells and their associated non-volatile devices operate differentially and when programmed store and supply complementary data. The non-volatile devices are erased prior to being programmed. Programming of the non-volatile devices may be done via hot-electron injection or Fowler-Nordheim tunneling. When a power failure occurs, the data stored in the DRAM are loaded in the non-volatile devices. After the power is restored, the data stored in the non-volatile devices are restored in the DRAM cells. The differential reading and wring of data reduces over-erase of the non-volatile devices.
    • 根据本发明,存储单元包括一对非易失性器件和一对DRAM单元,每个DRAM单元与不同的非易失性器件相关联。 每个DRAM单元还包括一个MOS晶体管,一个电容器。 DRAM单元及其相关的非易失性器件在编程时存储和供应补充数据时工作差异。 非易失性器件在编程之前被擦除。 非易失性器件的编程可以通过热电子注入或Fowler-Nordheim隧道进行。 当发生电源故障时,存储在DRAM中的数据被加载到非易失性设备中。 在电源恢复之后,存储在非易失性设备中的数据在DRAM单元中恢复。 数据的差分读取和拧紧减少了非易失性器件的过擦除。