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    • 4. 发明申请
    • Electrostatic drive type MEMS mirror scanner
    • 静电驱动型MEMS镜面扫描仪
    • US20070053044A1
    • 2007-03-08
    • US11594900
    • 2006-11-09
    • Yoshifumi KawakamiKyoji Shimoda
    • Yoshifumi KawakamiKyoji Shimoda
    • G02B26/08
    • G02B26/0841
    • An object of the present invention is to provide an MEMS mirror scanner capable of achieving a scanning operation at a speed equivalent to or higher than a polygon mirror scanner and including a supporting structure for a flexible mirror, which can be driven even by drive force having a small electrostatic force. A scanning mirror is formed between a pair of suspension beams formed in a rod-like manner and arranged on the same straight line on a substrate and is oscillatably supported by using the straight line as an oscillation axis, and further, an electrostatic capacity drive unit is disposed along either side or both sides of the suspension beam. A maximum distance in an direction perpendicular to oscillation axis, that is, a direction of a width of the suspension beam from a center of an oscillation axis of the electrostatic capacity drive unit is, for example, 60% or less, more preferably, 40% or less of a maximum distance in an direction perpendicular to oscillation axis, that is, a direction of a length of the mirror from a center of an oscillation axis, that is, a rotational center of the mirror, thereby increasing a resonance frequency of the large scanning mirror.
    • 本发明的目的是提供一种能够以等于或高于多面镜扫描器的速度实现扫描操作的MEMS反射镜扫描器,并且包括用于柔性反射镜的支撑结构,即使通过具有 静电力小。 扫描反射镜形成在以杆状形成的一对悬臂梁之间,并配置在基板的同一条直线上,并以直线作为摆动轴摆动地支撑,此外,静电电容驱动单元 沿悬挂梁的两侧或两侧设置。 垂直于振动轴的方向上的最大距离,即,来自静电电容驱动单元的振荡轴的中心的悬架梁的宽度方向例如为60%以下,更优选为40% 在垂直于振动轴的方向上的最大距离的百分之几或更小,即,来自振荡轴的中心的反射镜的长度方向,即反射镜的旋转中心,从而增加了反射镜的共振频率 大扫描镜。