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    • 5. 发明授权
    • Method of forming flash memory device
    • 形成闪存设备的方法
    • US08026140B2
    • 2011-09-27
    • US12344447
    • 2008-12-26
    • Hee Soo KimJae Mun Kim
    • Hee Soo KimJae Mun Kim
    • H01L21/336
    • H01L21/76232H01L27/11521
    • The present invention relates to a method of forming a flash memory device, which is capable of forming floating gates. According to a method of forming a flash memory device in accordance with the present invention, isolation mask patterns are first formed over a semiconductor substrate. Trenches are formed by performing an etching process using the isolation mask patterns. Isolation layers are formed between the isolation mask patterns, including the insides of the respective trenches. The isolation mask patterns are removed. Tunnel dielectric layers and crystallized first conductive layers are sequentially formed over the exposed semiconductor substrate. A dielectric layer and a second conductive layer are formed over the isolation layers and the first conductive layers.
    • 本发明涉及一种能够形成浮动栅极的闪速存储器件的形成方法。 根据本发明的形成闪速存储器件的方法,首先在半导体衬底上形成隔离掩模图案。 通过使用隔离掩模图案执行蚀刻工艺来形成沟槽。 隔离层形成在隔离掩模图案之间,包括各个沟槽的内部。 隔离掩模图案被去除。 隧道电介质层和结晶的第一导电层依次形成在暴露的半导体衬底上。 在绝缘层和第一导电层上形成介电层和第二导电层。
    • 10. 发明授权
    • Airfoil-magnetic hybrid bearing and a control system thereof
    • 翼型磁性混合轴承及其控制系统
    • US08772992B2
    • 2014-07-08
    • US12739590
    • 2007-11-19
    • Yong Bok LeeChang Ho KimSeung Jong KimSang Hwa LeeHee Soo Kim
    • Yong Bok LeeChang Ho KimSeung Jong KimSang Hwa LeeHee Soo Kim
    • H02K7/09
    • F16C32/0444F16C17/024F16C32/0402F16C32/048
    • An airfoil-magnetic hybrid bearing, which is a combination of a magnetic bearing and airfoil bearing includes a housing, an airfoil bearing, a magnetic bearing, coils, and a coupling segment. The housing is around a rotating shaft of a rotation device. The airfoil bearing is positioned between the housing and the rotating shaft to form dynamic pressure to levitate the rotating shaft during rotation of the rotating shaft. The magnetic bearing includes cores positioned radially between inner surface of the housing and outer surface of the airfoil bearing. The cores are projected to the center of the rotating shaft. The coils wound to the cores to levitate the rotating shaft using a magnetic attractive force generated by a current application thereto. The coupling segment is configured to couple the airfoil bearing to the magnetic bearing directly.
    • 作为磁轴承和翼型轴承的组合的翼型 - 磁性混合轴承包括壳体,翼型轴承,磁性轴承,线圈和联接段。 壳体围绕旋转装置的旋转轴。 翼型轴承定位在壳体和旋转轴之间,以在旋转轴旋转期间形成动态压力以使旋转轴悬浮。 磁性轴承包括位于壳体的内表面和翼型件轴承的外表面之间径向的芯。 芯体突出到旋转轴的中心。 线圈缠绕到芯部上以使用由其施加的电流产生的磁吸引力来悬浮旋转轴。 联接段被配置为直接将翼型件轴承连接到磁性轴承。