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1. 发明授权

US06193854B1 Apparatus and method for controlling erosion profile in hollow cathode magnetron sputter source 有权
标题翻译：用于控制中空阴极磁控溅射源中的侵蚀曲线的装置和方法
公开(公告)号：US06193854B1
公开(公告)日：2001-02-27
申请号：US09375667
申请日：1999-08-16
申请人： Kwok Fai Lai , Larry Dowd Hartsough , Andrew L. Nordquist , Kaihan Abidi Ashtiani , Karl B. Levy , Maximilian A. Biberger
发明人： Kwok Fai Lai , Larry Dowd Hartsough , Andrew L. Nordquist , Kaihan Abidi Ashtiani , Karl B. Levy , Maximilian A. Biberger
IPC分类号： C23C1435
CPC分类号： H01J37/342 , C23C14/35 , H01J37/3405
摘要： A hollow cathode magnetron (HCM) sputter source includes a main magnet positioned near the sidewall of the hollow cathode target and a pair of rotating magnet arrays that are positioned near the closed end of the hollow cathode target. One of the arrays produces a magnetic field that is aligned with (aids) the magnetic field produced by the main magnet; the other arrays produce a magnetic field that is aligned against (bucks) the magnetic field produced by the main magnet. Field lines produced by the magnet arrays contain an extension of the plasma that is controlled by the main magnet. Charged particles circulate between the two portions of the plasma. The extended plasma is thus formed over a very high percentage of the surface of the target, thereby creating an erosion profile that is highly uniform and encompasses essentially the entire face of the target. This maximizes the utilization of the target and minimizes the frequency at which the spent target must be replaced.
摘要翻译：中空阴极磁控管（HCM）溅射源包括位于中空阴极靶的侧壁附近的主磁体和位于中空阴极靶的封闭端附近的一对旋转磁体阵列。其中一个阵列产生与由主磁体产生的磁场（辅助）对准的磁场; 其他阵列产生与主磁体产生的磁场对准（降压）的磁场。由磁体阵列产生的场线包含由主磁体控制的等离子体的延伸。带电粒子在等离子体的两部分之间循环。延长的等离子体因此形成在目标表面的非常高百分比上，从而产生高度均匀并且基本上涵盖靶的整个面的侵蚀曲线。这最大限度地提高了目标的利用率，并最大限度地减少了必须更换用完的目标的频率。

2. 发明授权

US06905959B1 Apparatus and method for depositing superior Ta (N) copper thin films for barrier and seed applications in semiconductor processing 失效
标题翻译：用于在半导体处理中沉积用于屏障和种子应用的优质Ta（N）铜薄膜的装置和方法
公开(公告)号：US06905959B1
公开(公告)日：2005-06-14
申请号：US10335464
申请日：2002-12-31
申请人： Kaihan A. Ashtiani , Maximilian A. Biberger , Erich R. Klawuhn , Kwok Fai Lai , Karl B. Levy , J. Patrick Rymer
发明人： Kaihan A. Ashtiani , Maximilian A. Biberger , Erich R. Klawuhn , Kwok Fai Lai , Karl B. Levy , J. Patrick Rymer
IPC分类号： H01L21/285 , H01L21/768 , H01L21/4763
CPC分类号： H01L21/76843 , H01L21/2855 , H01L21/76873 , H01L21/76876
摘要： A method of depositing thin films comprising tantalum, tantalum nitride, and copper for barrier films and seed layers within high aspect ratio openings used for copper interconnects. The barrier films and seed layers are deposited at extremely low temperature conditions wherein the wafer stage temperature of the sputter source is chilled to about −70° C. to about 0° C. Most preferably, the present invention is practiced using a hollow cathode magnetron. The resulting tantalum and/or tantalum nitride barrier films and copper seed layers are superior in surface smoothness, grain size and uniformity such that subsequent filling of the high aspect ratio opening is substantially void-free.
摘要翻译：一种用于在用于铜互连的高纵横比开口中沉积用于阻挡膜和种子层的钽，氮化钽和铜的薄膜的方法。阻挡膜和种子层在极低温度条件下沉积，其中溅射源的晶片台温度被冷却至约-70℃至约0℃。最优选地，本发明使用空心阴极磁控管。所得到的钽和/或氮化钽阻挡膜和铜籽晶层的表面平滑度，晶粒尺寸和均匀性都是优异的，使得高纵横比开口的后续填充基本上无空隙。

3. 发明授权

US06541371B1 Apparatus and method for depositing superior Ta(N)/copper thin films for barrier and seed applications in semiconductor processing 有权
标题翻译：用于在半导体处理中沉积用于屏障和种子应用的优良Ta（N）/铜薄膜的装置和方法
公开(公告)号：US06541371B1
公开(公告)日：2003-04-01
申请号：US09491853
申请日：2000-01-26
申请人： Kaihan A. Ashtiani , Maximilian A. Biberger , Erich R. Klawuhn , Kwok Fai Lai , Karl B. Levy , J. Patrick Rymer
发明人： Kaihan A. Ashtiani , Maximilian A. Biberger , Erich R. Klawuhn , Kwok Fai Lai , Karl B. Levy , J. Patrick Rymer
IPC分类号： H01L214763
CPC分类号： H01L21/76843 , H01L21/2855 , H01L21/76873 , H01L21/76876
摘要： A method of depositing thin films comprising tantalum, tantalum nitride, and copper for barrier films and seed layers within high aspect ratio openings used for copper interconnects. The barrier films and seed layers are deposited at extremely low temperature conditions wherein the wafer stage temperature of the sputter source is chilled to about −70° C. to about 0° C. Most preferably, the present invention is practiced using a hollow cathode magnetron. The resulting tantalum and/or tantalum nitride barrier films and copper seed layers are superior in surface smoothness, grain size and uniformity such that subsequent filling of the high aspect ratio opening is substantially void-free.
摘要翻译：一种用于在用于铜互连的高纵横比开口中沉积用于阻挡膜和种子层的钽，氮化钽和铜的薄膜的方法。阻挡膜和种子层在极低温度条件下沉积，其中溅射源的晶片台温度被冷却至约-70℃至约0℃。最优选地，本发明使用空心阴极磁控管。所得到的钽和/或氮化钽阻挡膜和铜籽晶层的表面平滑度，晶粒尺寸和均匀性都是优异的，使得高纵横比开口的后续填充基本上无空隙。

4. 发明授权

US08945219B1 System for and method of introducing additives to biological materials using supercritical fluids 有权
标题翻译：使用超临界流体将添加剂引入生物材料的系统和方法
公开(公告)号：US08945219B1
公开(公告)日：2015-02-03
申请号：US12151841
申请日：2008-05-08
申请人： Maximilian A. Biberger
发明人： Maximilian A. Biberger
IPC分类号： A61F2/28 , A61F2/54
CPC分类号： F28C3/16 , A61L2/18 , B01J2/16 , B01J19/0013 , B01J19/088 , B01J25/00 , B01J25/02 , B01J35/04 , B01J37/0018 , B01J37/0027 , B01J37/06 , B01J37/349 , B01J2219/0805 , B01J2219/0879 , B01J2219/0894 , B22F9/12 , B22F2203/13 , B22F2999/00 , F28D7/024 , F28D7/08 , F28D15/00 , F28F27/00 , Y10S623/92 , Y10S623/923 , Y10T137/0391 , Y10T137/2076 , Y10T156/15 , B22F2202/13
摘要： A method of introducing an additive to a biological material using a supercritical fluid is disclosed. The method comprises placing the biological material in a processing chamber, adding an additive to the supercritical fluid to form a supercritical fluid-additive mixture, adding the supercritical fluid-additive mixture to the processing chamber, and pulsing the mixture in the processing chamber. A processing system for introducing an additive to a biological material using a supercritical fluid in accordance with the present invention comprises a processing chamber for housing the biological material, a vat for storing a processing fluid, a pump, a heating element, an inlet port, and a flow path.
摘要翻译：公开了一种使用超临界流体将添加剂引入生物材料的方法。该方法包括将生物材料放置在处理室中，向超临界流体中加入添加剂以形成超临界流体添加剂混合物，将超临界流体添加剂混合物加入到处理室中，并将混合物脉冲在处理室中。根据本发明的使用超临界流体向生物材料引入添加剂的处理系统包括用于容纳生物材料的处理室，用于储存处理流体的桶，加热元件，入口端口，和流路。

5. 发明授权

US08906498B1 Sandwich of impact resistant material 有权
标题翻译：耐冲击材料三明治
公开(公告)号：US08906498B1
公开(公告)日：2014-12-09
申请号：US12968253
申请日：2010-12-14
申请人： Maximilian A. Biberger
发明人： Maximilian A. Biberger
IPC分类号： B32B15/04 , B32B19/00
CPC分类号： H05K1/0306 , B01J23/42 , B01J23/8926 , B01J37/00 , B22F2001/0092 , B28B3/025 , B28B23/0081 , B28B23/0087 , B32B5/30 , B32B7/12 , B32B37/14 , B32B2037/1253 , B32B2262/0253 , B32B2264/104 , B32B2264/107 , B32B2307/558 , B32B2571/02 , B82Y30/00 , B82Y40/00 , C01B33/027 , C23C4/134 , C23C18/14 , F41H1/02 , F41H5/0471 , F41H5/0492 , H01B1/02 , H01L21/6835 , H01L23/64 , H01L2924/0002 , H05K1/16 , Y02E60/122 , Y02P70/54 , Y10T428/12576 , Y10T428/24983 , Y10T428/25 , Y10T428/252 , Y10T428/26 , Y10T428/28 , Y10T428/2916 , H01L2924/00
摘要： A method of making a sandwich of impact resistant material, the method comprising: providing a powder; performing a spark plasma sintering process on powder to form a tile; and coupling a ductile backing layer to the tile. In some embodiments, the powder comprises micron-sized particles. In some embodiments, the powder comprises nano-particles. In some embodiments, the powder comprises silicon carbide particles. In some embodiments, the powder comprises boron carbide particles. In some embodiments, the ductile backing layer comprises an adhesive layer. In some embodiments, the ductile backing layer comprises: a layer of polyethylene fibers; and an adhesive layer coupling the layer of polyethylene fibers to the tile, wherein the adhesive layer comprises a thickness of 1 to 3 millimeters.
摘要翻译：一种制造耐冲击材料夹层的方法，所述方法包括：提供粉末; 对粉末进行火花等离子体烧结工艺以形成瓦片; 并将韧性背衬层耦合到瓷砖。在一些实施方案中，粉末包含微米级的颗粒。在一些实施方案中，粉末包含纳米颗粒。在一些实施例中，粉末包括碳化硅颗粒。在一些实施方案中，粉末包含碳化硼颗粒。在一些实施例中，延性背衬层包括粘合剂层。在一些实施例中，延性背衬层包括：一层聚乙烯纤维; 以及将聚乙烯纤维层耦合到瓦片的粘合剂层，其中粘合剂层包含1至3毫米的厚度。

6. 发明授权

US08524631B2 Nano-skeletal catalyst 有权
公开(公告)号：US08524631B2
公开(公告)日：2013-09-03
申请号：US12152109
申请日：2008-05-09
申请人： Maximilian A. Biberger
发明人： Maximilian A. Biberger
IPC分类号： B01J23/755 , B01J23/745 , B01J23/75 , B01J23/80 , B01J23/85 , B01J23/86 , B01J23/88 , B01J23/881 , B01J23/882 , B01J23/883
CPC分类号： F28C3/16 , A61L2/18 , B01J2/16 , B01J19/0013 , B01J19/088 , B01J25/00 , B01J25/02 , B01J35/04 , B01J37/0018 , B01J37/0027 , B01J37/06 , B01J37/349 , B01J2219/0805 , B01J2219/0879 , B01J2219/0894 , B22F9/12 , B22F2203/13 , B22F2999/00 , F28D7/024 , F28D7/08 , F28D15/00 , F28F27/00 , Y10S623/92 , Y10S623/923 , Y10T137/0391 , Y10T137/2076 , Y10T156/15 , B22F2202/13
摘要： A method of producing a catalyst material with nano-scale structure, the method comprising: introducing a starting powder into a nano-powder production reactor, the starting powder comprising a catalyst material; the nano-powder production reactor nano-sizing the starting powder, thereby producing a nano-powder from the starting powder, the nano-powder comprising a plurality of nano-particles, each nano-particle comprising the catalyst material; and forming a catalyst precursor material from the nano-powder, wherein the catalyst precursor material is a densified bulk porous structure comprising the catalyst material, the catalyst material having a nano-scale structure.

7. 发明申请

US20100188236A1 IN-SITU WATER ANALYSIS METHOD AND SYSTEM 有权
标题翻译：现场水分析方法与系统
公开(公告)号：US20100188236A1
公开(公告)日：2010-07-29
申请号：US12728055
申请日：2010-03-19
申请人： Maximilian A. Biberger
发明人： Maximilian A. Biberger
IPC分类号： G08B21/00 , G01N31/00 , G06F19/00
CPC分类号： G01N33/18 , B63B2022/006
摘要： An automatic system for monitoring chemistry information for a body of water comprises a sensor for determining chemistry information, a microprocessor for processing chemistry information, and a housing coupled to at least one of the sensor and the microprocessor. Preferably the housing is floatable or mountable. The method of providing chemistry information of a body of water comprising the steps of obtaining a sample of the body of water and determining chemistry information.
摘要翻译：一种用于监测水体化学信息的自动系统，包括用于确定化学信息的传感器，用于处理化学信息的微处理器，以及耦合到传感器和微处理器中的至少一个的壳体。优选地，壳体是可浮动的或可安装的。提供水体的化学信息的方法包括以下步骤：获得水体样品并确定化学信息。

8. 发明申请

US20080277267A1 Highly turbulent quench chamber 有权
标题翻译：高度湍流的骤冷室
公开(公告)号：US20080277267A1
公开(公告)日：2008-11-13
申请号：US12151935
申请日：2008-05-08
申请人： Maximilian A. Biberger , Frederick P. Layman
发明人： Maximilian A. Biberger , Frederick P. Layman
IPC分类号： B01J19/08
CPC分类号： F28C3/16 , A61L2/18 , B01J2/16 , B01J19/0013 , B01J19/088 , B01J25/00 , B01J25/02 , B01J35/04 , B01J37/0018 , B01J37/0027 , B01J37/06 , B01J37/349 , B01J2219/0805 , B01J2219/0879 , B01J2219/0894 , B22F9/12 , B22F2203/13 , B22F2999/00 , F28D7/024 , F28D7/08 , F28D15/00 , F28F27/00 , Y10S623/92 , Y10S623/923 , Y10T137/0391 , Y10T137/2076 , Y10T156/15 , B22F2202/13
摘要： An apparatus for cooling a reactive mixture, comprising: a reactor configured to form the reactive mixture; a quench chamber comprising a frusto-conical body having a wide end, a narrow end, and a quench region formed between the wide and narrow end, wherein the quench chamber is configured to receive the reactive mixture from the plasma reactor through a reactive mixture inlet into the quench region, to receive a conditioning fluid through at least one fluid inlet, and to flow the conditioning fluid into the quench region, wherein the frusto-conical body is configured to produce a turbulent flow within the quench region with the flow of the conditioning fluid into the quench region, thereby promoting the quenching of the reactive mixture to form a cooled gas-particle mixture; and a suction generator configured to force the cooled gas-particle mixture out of the quench chamber.
摘要翻译：一种用于冷却反应混合物的装置，包括：构造成形成反应混合物的反应器; 一个淬火室，包括一个截头圆锥体，其具有宽端，窄端和形成在宽和窄端之间的骤冷区，其中骤冷室构造成通过反应混合物入口接收来自等离子体反应器的反应混合物进入淬火区域，以通过至少一个流体入口接收调节流体，并使调节流体流入骤冷区域，其中截头圆锥体构造成在骤冷区域内产生湍流，调节流体进入淬火区域，从而促进反应混合物的淬火以形成冷却的气体 - 颗粒混合物; 以及抽吸发生器，其构造成迫使冷却的气体 - 微粒混合物离开骤冷室。

9. 发明申请

US20080277266A1 Shape of cone and air input annulus 有权
标题翻译：锥形和空气输入环形
公开(公告)号：US20080277266A1
公开(公告)日：2008-11-13
申请号：US12151766
申请日：2008-05-08
申请人： Frederick P. Layman , Maximilian A. Biberger
发明人： Frederick P. Layman , Maximilian A. Biberger
IPC分类号： B01J19/08 , B01J19/00
CPC分类号： F28C3/16 , A61L2/18 , B01J2/16 , B01J19/0013 , B01J19/088 , B01J25/00 , B01J25/02 , B01J35/04 , B01J37/0018 , B01J37/0027 , B01J37/06 , B01J37/349 , B01J2219/0805 , B01J2219/0879 , B01J2219/0894 , B22F9/12 , B22F2203/13 , B22F2999/00 , F28D7/024 , F28D7/08 , F28D15/00 , F28F27/00 , Y10S623/92 , Y10S623/923 , Y10T137/0391 , Y10T137/2076 , Y10T156/15 , B22F2202/13
摘要： A constricting chamber having first and second ends, the chamber comprising: an interior surface formed between the first and second ends, disposed circumferentially around and defining an interior space and a longitudinal axis of the chamber; a frusto-conical surface disposed between the first and second ends and narrowing as it extends away from the first end and into the second end; an ejection port disposed at the second end and substantially aligned with the longitudinal axis; a cover disposed at the first end, substantially perpendicular to the longitudinal axis, and comprising a center substantially aligned with the longitudinal axis; an injection port disposed on the cover proximate the center, and configured to receive a reactive mixture into the chamber; and an annular supply portion disposed circumferentially around the longitudinal axis and comprising supply port(s) configured to supply conditioning fluid into the chamber in an annular formation along the interior surface.
摘要翻译：收缩室具有第一和第二端，所述室包括：形成在所述第一和第二端之间的内表面，周向地设置在所述室的内部空间和纵向轴线周围; 一个截头圆锥形表面设置在第一和第二端之间，并且当其从第一端延伸并进入第二端时变窄; 排出口，设置在第二端并基本上与纵轴对齐; 布置在第一端处的盖，基本上垂直于纵向轴线，并且包括基本上与纵向轴线对准的中心; 注入口，设置在靠近中心的盖上，并且构造成将反应混合物接收到腔室中; 以及围绕所述纵向轴线周向设置的环形供应部分，并且包括供应端口，所述供应端口构造成沿着所述内表面沿环形结构向所述室供应调节流体。

10. 发明授权

US07409853B2 Floatable housing for in situ water monitoring system 有权
标题翻译：用于原位水监测系统的浮动住房
公开(公告)号：US07409853B2
公开(公告)日：2008-08-12
申请号：US11477701
申请日：2006-06-28
申请人： Maximilian A. Biberger , Michael Lee Manasco
发明人： Maximilian A. Biberger , Michael Lee Manasco
IPC分类号： G01N27/26 , G01N27/27 , G01N33/18
CPC分类号： G01N33/1886
摘要： An electronic system for use in a body of fluid is disclosed. The electronic system includes a first housing element and a second housing element. The second housing element is hermetically sealed to the first housing element, forming a first chamber there between. An electronic circuit is mounted within the first chamber. The electronic system further includes a second chamber internal to the second housing element. The second chamber is configured for holding a power source for the electronic circuit. Preferably, the power source is a battery pack. Also, the electronic system includes means for temporarily sealing the second chamber. Preferably, means for temporarily sealing the second chamber includes a detachable plug configured for coupling to the second housing element.
摘要翻译：公开了一种用于流体体内的电子系统。电子系统包括第一壳体元件和第二壳体元件。第二壳体元件气密地密封到第一壳体元件，在其间形成第一腔室。电子电路安装在第一室内。电子系统还包括在第二壳体元件内部的第二腔室。第二室被配置为保持电子电路的电源。优选地，电源是电池组。此外，电子系统包括用于临时密封第二室的装置。优选地，临时密封第二室的装置包括被配置为联接到第二壳体元件的可拆卸插头。

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