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    • 3. 发明授权
    • Method of correcting a position of a prober
    • 纠正探测器位置的方法
    • US08400174B2
    • 2013-03-19
    • US12656520
    • 2010-02-02
    • Seung-Yong OhByoung Joo KimDae-Gab ChiKi-Yoon Kim
    • Seung-Yong OhByoung Joo KimDae-Gab ChiKi-Yoon Kim
    • G01R31/00
    • G01R31/2891
    • A method of correcting a position of a prober, the method including obtaining a first image of a pad, the pad having a predetermined reference contact position, contacting the prober to the pad after obtaining the first image of the pad, obtaining a second image of the pad after contacting the prober to the pad, determining an actual contact position of an actual contact mark on the pad, the actual contact mark being produced by the contacting of the prober to the pad, comparing the second image to the first image to obtain an offset data, the offset data relating the actual contact position to the reference contact position, and correcting the position of the prober by aligning the actual contact position with the reference contact position based on the offset data.
    • 一种纠正探测器位置的方法,所述方法包括获得焊盘的第一图像,所述焊盘具有预定的参考接触位置,在获得所述焊盘的所述第一图像之后将所述探测器接触所述焊盘,获得第二图像 在将探测器接触到焊盘之后,确定焊盘上的实际接触标记的实际接触位置,实际接触标记是通过探测器与焊盘接触而产生的,将第二图像与第一图像进行比较以获得 偏移数据,将实际接触位置与参考接触位置相关联的偏移数据,以及基于偏移数据,通过将实际接触位置与参考接触位置对准来校正探测器的位置。
    • 4. 发明申请
    • Method of correcting a position of a prober
    • 纠正探测器位置的方法
    • US20100194418A1
    • 2010-08-05
    • US12656520
    • 2010-02-02
    • Seung-Yong OhByoung Joo KimDae-Gab ChiKi-Yoon Kim
    • Seung-Yong OhByoung Joo KimDae-Gab ChiKi-Yoon Kim
    • G01R31/02
    • G01R31/2891
    • A method of correcting a position of a prober, the method including obtaining a first image of a pad, the pad having a predetermined reference contact position, contacting the prober to the pad after obtaining the first image of the pad, obtaining a second image of the pad after contacting the prober to the pad, determining an actual contact position of an actual contact mark on the pad, the actual contact mark being produced by the contacting of the prober to the pad, comparing the second image to the first image to obtain an offset data, the offset data relating the actual contact position to the reference contact position, and correcting the position of the prober by aligning the actual contact position with the reference contact position based on the offset data.
    • 一种纠正探测器位置的方法,所述方法包括获得焊盘的第一图像,所述焊盘具有预定的参考接触位置,在获得所述焊盘的所述第一图像之后将所述探测器接触所述焊盘,获得第二图像 在将探测器接触到焊盘之后,确定焊盘上的实际接触标记的实际接触位置,实际接触标记是通过探测器与焊盘接触而产生的,将第二图像与第一图像进行比较以获得 偏移数据,将实际接触位置与参考接触位置相关联的偏移数据,以及基于偏移数据,通过将实际接触位置与参考接触位置对准来校正探测器的位置。