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    • 4. 发明申请
    • Mechanical oscillator for wafer scan with spot beam
    • 机械振荡器,用于具有点光束的晶圆扫描
    • US20050247891A1
    • 2005-11-10
    • US10840186
    • 2004-05-06
    • Mehran AsdighaKurt ClevelandJay KrishnasamyKan Ota
    • Mehran AsdighaKurt ClevelandJay KrishnasamyKan Ota
    • H01L21/00H01L21/687H01J37/20
    • H01L21/68764H01J37/3171H01J2237/20228H01L21/67069
    • The present invention is directed to a scanning apparatus and method for processing a substrate, wherein the scanning apparatus comprises a first link and a second link rigidly coupled to one another at a first joint, wherein the first link and second link are rotatably coupled to a base portion by the first joint, therein defining a first axis. An end effector, whereon the substrate resides, is coupled to the first link. The second link is coupled to a first actuator via at least second joint. The first actuator is operable to translate the second joint with respect to the base portion, therein rotating the first and second links about the first axis and translating the substrate along a first scan path in an oscillatory manner. A controller is further operable to maintain a generally constant translational velocity of the end effector within a predetermined scanning range.
    • 本发明涉及一种用于处理基板的扫描装置和方法,其中扫描装置包括第一连杆和在第一关节处彼此刚性地联接的第二连杆,其中第一连杆和第二连杆可旋转地连接到 其中所述第一接头限定第一轴线。 衬底所在的末端执行器被耦合到第一连杆。 第二连杆通过至少第二接头联接到第一致动器。 第一致动器可操作以相对于基部部分平移第二接头,其中使第一和第二连杆围绕第一轴线旋转,并以振荡方式沿着第一扫描路径平移基板。 控制器还可操作以将末端执行器的大致恒定的平移速度保持在预定扫描范围内。