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1. 发明授权

US08907258B2 Apparatus for providing transient thermal profile processing on a moving substrate 有权
标题翻译：用于在移动基板上提供瞬态热分布处理的装置
公开(公告)号：US08907258B2
公开(公告)日：2014-12-09
申请号：US13082469
申请日：2011-04-08
申请人： Kurt A. Schroder , Steven C. McCool , Douglas K. Jackson
发明人： Kurt A. Schroder , Steven C. McCool , Douglas K. Jackson
IPC分类号： H05B6/10 , B29C35/08
CPC分类号： H05B3/009 , B29C35/0805 , B29C35/10 , B29C71/02 , B29C2071/022 , F26B3/28 , F26B13/10 , H05B1/0294 , H05B41/34 , H05K1/0386 , H05K3/125 , H05K3/1283 , H05K2203/1545
摘要： A method and apparatus for thermally processing material on a low-temperature substrate using pulsed light from a flash lamp is disclosed. Material is conveyed past the flash lamp. The pulses of light are formed by Pulse Width Modulation to tailor the shape of the pulses to generate a thermal gradient in the substrate that enables the material to be heated beyond the maximum working temperature of the substrate without damage. Its shaped pulse rate is synchronized to the conveyance speed of a conveyance system. By using the information from a feedback sensor, the thermal gradient is recalculated to alter the shape of the pulses in real time for optimizing subsequent curings in real time without powering down the curing apparatus. The combined pulse shaping and synchronization allow a temperature profile to be tailored in the sample that is uniformly cured in the conveyance direction.
摘要翻译：公开了一种使用来自闪光灯的脉冲光在低温衬底上热处理材料的方法和装置。材料被传送通过闪光灯。光的脉冲通过脉冲宽度调制形成以调整脉冲的形状以在衬底中产生热梯度，使得能够将材料加热超过衬底的最大工作温度而不损坏。其形状的脉冲率与输送系统的输送速度同步。通过使用来自反馈传感器的信息，重新计算热梯度以实时改变脉冲的形状，以实时优化随后的固化而不关闭固化设备。组合的脉冲整形和同步允许在传送方向上均匀固化的样品中定制温度分布。

2. 发明授权

US08410712B2 Method and apparatus for curing thin films on low-temperature substrates at high speeds 有权
公开(公告)号：US08410712B2
公开(公告)日：2013-04-02
申请号：US12253399
申请日：2008-10-17
申请人： Kurt A. Schroder , Karl M. Martin , Doug K. Jackson , Steven C. McCool
发明人： Kurt A. Schroder , Karl M. Martin , Doug K. Jackson , Steven C. McCool
IPC分类号： H05B41/14
CPC分类号： H05K3/1283 , B05D3/06 , F26B3/343 , H05B41/34 , H05B41/38 , H05K1/095 , H05K1/097 , H05K2203/1545
摘要： A curing apparatus for thermally processing thin films on low-temperature substrates at high speeds is disclosed. The curing apparatus includes a strobe head, a strobe control module and a conveyor control module. The strobe control module controls the power, duration and repetition rate of a set of pulses generated by a flash lamp on the strobe head. The conveyor control module along with the strobe control module provide real-time synchronization between the repetition rate of the set of pulses and the speed at which the substrate is being moved under the strobe head, according to the speed information.

3. 发明授权

US10150230B2 Method for drying thin films in an energy efficient manner 有权
公开(公告)号：US10150230B2
公开(公告)日：2018-12-11
申请号：US13432399
申请日：2012-03-28
申请人： Kurt A. Schroder , Ian M. Rawson , Steven C. McCool , Andrew E. Edd , Ronald I. Dass
发明人： Kurt A. Schroder , Ian M. Rawson , Steven C. McCool , Andrew E. Edd , Ronald I. Dass
IPC分类号： H05B6/10 , B29C35/08 , B29B13/02 , B29B13/06 , B29B13/08 , B29C35/10 , H05K3/12
摘要： A method for drying a thin film stack having a thin film located on a substrate is disclosed. The thin film stack is conveyed past a flashlamp during which the thin film stack is irradiated with a composite light pulse from the flashlamp. The composite light pulse is composed of multiple micropulses. The time duration of the composite light pulse is shorter than a total thermal equilibration time of the thin film stack. In addition, when the thin film stack is being conveyed past the flashlamp, the thin film stack should move less than 10% of the length of the irradiating area in the conveyance direction during the delivery of the composite light pulse.

4. 发明申请

US20120255192A1 Method for Drying Thin Films in an Energy Efficient Manner 审中-公开
标题翻译：以高能量方式干燥薄膜的方法
公开(公告)号：US20120255192A1
公开(公告)日：2012-10-11
申请号：US13432399
申请日：2012-03-28
申请人： Kurt A. Schroder , Ian M. Rawson , Steven C. McCool , Andrew E. Edd , Ronald I. Dass
发明人： Kurt A. Schroder , Ian M. Rawson , Steven C. McCool , Andrew E. Edd , Ronald I. Dass
IPC分类号： F26B7/00
CPC分类号： B29C35/0805 , B29B13/023 , B29B13/06 , B29B13/08 , B29C35/10 , H05K3/1283
摘要： A method for drying a thin film stack having a thin film located on a substrate is disclosed. The thin film stack is conveyed past a flashlamp during which the thin film stack is irradiated with a composite light pulse from the flashlamp. The composite light pulse is composed of multiple micropulses. The time duration of the composite light pulse is shorter than a total thermal equilibration time of the thin film stack. In addition, when the thin film stack is being conveyed past the flashlamp, the thin film stack should move less than 10% of the length of the irradiating area in the conveyance direction during the delivery of the composite light pulse.
摘要翻译：公开了一种用于干燥具有位于基板上的薄膜的薄膜叠层的方法。薄膜叠层被传送通过闪光灯，在该闪光灯下，用闪光灯的复合光脉冲照射薄膜叠层。复合光脉冲由多个微脉冲组成。复合光脉冲的持续时间短于薄膜叠层的总热平衡时间。此外，当薄膜叠层被输送通过闪光灯时，薄膜叠层在传送复合光脉冲期间应该在传送方向上移动小于照射区域的长度的10％。

5. 发明授权

US07477500B2 Method and system for signal and power distribution in a building housing a manufacturing process 有权
标题翻译：建筑物内的制造过程信号和配电方法与系统
公开(公告)号：US07477500B2
公开(公告)日：2009-01-13
申请号：US10955166
申请日：2004-09-30
申请人： Stephen James Schmidt , Steven C. McCool
发明人： Stephen James Schmidt , Steven C. McCool
IPC分类号： H02H7/00
CPC分类号： H05K9/0064 , H02G3/0437
摘要： A power and signal distribution system is adaptable to existing building areas and provides a shielded, low resistance and low inductance grounding structure. The distribution system comprises two or more electrically conductive enclosed channels; one for lower current signals and power distribution and one for high current signals and power distribution. The enclosed channels are electrically coupled and are configured as crosses or spokes with branches extending substantially over the length and width of the building area. The earth ground for the building has a direct connection to one of the enclosures. The ground of each device in the building area is directly connected to the enclosed channels by a low impedance connection. Cables are routed through the enclosures and extended to the devices. The walls of the enclosed channels have a thickness that is greater than the skin depth of a predetermined low frequency.
摘要翻译：电力和信号分配系统适用于现有建筑面积，并提供屏蔽，低电阻和低电感接地结构。分配系统包括两个或多个导电封闭通道; 一个用于较低电流信号和功率分配，一个用于高电流信号和功率分配。封闭的通道电耦合并且被构造为具有基本上在建筑物区域的长度和宽度上延伸的分支的十字架或辐条。建筑物的地面与其中一个外壳直接连接。建筑物区域的每个设备的地面通过低阻抗连接直接连接到封闭的通道。电缆通过机箱路由并扩展到设备。封闭通道的壁的厚度大于预定低频的趋肤深度。

6. 发明授权

US07543170B2 Equipment fail safe safety system 有权
标题翻译：设备故障安全安全系统
公开(公告)号：US07543170B2
公开(公告)日：2009-06-02
申请号：US10955202
申请日：2004-09-30
申请人： Rens Ross , Steven C. McCool
发明人： Rens Ross , Steven C. McCool
IPC分类号： G06F1/30
CPC分类号： G05B9/02
摘要： A system for monitoring and controlling the safety system of equipment, which is used to insure personnel safety and cause the system to “fail safe” in the event of computer or software failure, the failure of a critical piece of hardware, or the opening of any interlock indicating, for example, the unexpected entry of personnel into a dangerous area. Provides an integrated system of timed status monitoring hardware and software for use in a distributed-network computer-controlled environment. The hardware piece of this system includes a digital I/O computer add-on card, or other hardware supporting high-speed alternating state telemetry, and a custom circuit card. Such a circuit, when used within the overall control system can monitor the state of interlock switches and monitor the status of the computer control system(s). Such a safety circuit can then cause a shutdown appropriate to the failure detected. In addition, it has an ability to sense local hardware status information and immediately signal the computer of any potentially dangerous situation.
摘要翻译：一种用于监控和控制设备安全系统的系统，用于确保人身安全，并导致系统在计算机或软件故障的情况下“故障安全”，关键硬件故障或开启任何联锁指示，例如，人员意外进入危险区域。提供一个用于分布式网络计算机控制环境的定时状态监控硬件和软件的集成系统。该系统的硬件包括数字I / O计算机附加卡或支持高速交流状态遥测的其他硬件以及定制电路卡。这种电路在整个控制系统中使用时，可以监控互锁开关的状态并监视计算机控制系统的状态。这样的安全电路然后可以引起适合于检测到的故障的停机。此外，它具有检测本地硬件状态信息的能力，并立即向计算机发出任何潜在危险情况的信号。

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