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    • 5. 发明授权
    • Piezoelectric vacuum gauge and measuring method thereof
    • 压电式真空计及其测量方法
    • US09140619B2
    • 2015-09-22
    • US13562709
    • 2012-07-31
    • Chia-Che WuChi-Shao ChenChe-Yu LinFong-Zhi ChenFan-Chun Hsieh
    • Chia-Che WuChi-Shao ChenChe-Yu LinFong-Zhi ChenFan-Chun Hsieh
    • G01L9/00
    • G01L9/0022
    • A piezoelectric vacuum gauge includes an actuator with a flexible portion, an actuating unit, a sensor unit, a signal input terminal and a signal output terminal, and a fixture unit having a base portion and a cover portion. An external signal is generated by a signal generator. Receive and transmit an external signal to an actuating unit by the signal input terminal so that the actuating unit has a vibration. Prompt a flexible portion by the actuating unit to produce a first resonant motion when the actuating unit having the vibration. The first resonant motion converts into a second resonant motion because the flexible portion is subject to a damping force of ambient air. Prompt a sensor unit by the second resonant motion to cause a shape transformation of the sensor unit to generate a detecting signal. Output the detecting signal to an external instrument by a signal output terminal of sensor unit to calculate a vacuum pressure value.
    • 压电式真空计包括具有柔性部分的致动器,致动单元,传感器单元,信号输入端子和信号输出端子,以及具有基部和盖部分的固定单元。 外部信号由信号发生器产生。 通过信号输入端子将一个外部信号接收并发送到一个执行单元上,使致动单元有振动。 当致动单元具有振动时,通过致动单元提供柔性部分以产生第一共振运动。 第一共振运动转换成第二共振运动,因为柔性部分受到环境空气的阻尼力。 通过第二共振运动提示传感器单元,以使传感器单元的形状变换产生检测信号。 通过传感器单元的信号输出端将检测信号输出到外部仪器,以计算真空压力值。
    • 6. 发明申请
    • PIEZOELECTRIC VACUUM GAUGE AND MEASURING METHOD THEREOF
    • 压电式真空计及其测量方法
    • US20130291644A1
    • 2013-11-07
    • US13562709
    • 2012-07-31
    • Chia-Che WuChi-Shao ChenChe-Yu LinFong-Zhi ChenFan-Chun Hsieh
    • Chia-Che WuChi-Shao ChenChe-Yu LinFong-Zhi ChenFan-Chun Hsieh
    • G01L9/08
    • G01L9/0022
    • A piezoelectric vacuum gauge includes an actuator with a flexible portion, an actuating unit, a sensor unit, a signal input terminal and a signal output terminal, and a fixture unit having a base portion and a cover portion. An external signal is generated by a signal generator. Receive and transmit an external signal to an actuating unit by the signal input terminal so that the actuating unit has a vibration. Prompt a flexible portion by the actuating unit to produce a first resonant motion when the actuating unit having the vibration. The first resonant motion converts into a second resonant motion because the flexible portion is subject to a damping force of ambient air. Prompt a sensor unit by the second resonant motion to cause a shape transformation of the sensor unit to generate a detecting signal. Output the detecting signal to an external instrument by a signal output terminal of sensor unit to calculate a vacuum pressure value.
    • 压电式真空计包括具有柔性部分的致动器,致动单元,传感器单元,信号输入端子和信号输出端子,以及具有基部和盖部分的固定单元。 外部信号由信号发生器产生。 通过信号输入端子将一个外部信号接收并发送到一个执行单元上,使致动单元有振动。 当致动单元具有振动时,通过致动单元提供柔性部分以产生第一共振运动。 第一共振运动转换成第二共振运动,因为柔性部分受到环境空气的阻尼力。 通过第二共振运动提示传感器单元,以使传感器单元的形状变换产生检测信号。 通过传感器单元的信号输出端将检测信号输出到外部仪器,以计算真空压力值。
    • 8. 发明授权
    • Geometrical structure configuration of maglev forces in a maglev
rotational bearing apparatus
    • 磁悬浮轴承装置中磁浮力的几何结构构造
    • US6057620A
    • 2000-05-02
    • US301008
    • 1999-04-28
    • Fong-Zhi ChenRong-Yuan JouHong-Ping ChengYu-Wen ChangJin-Shyang Lin
    • Fong-Zhi ChenRong-Yuan JouHong-Ping ChengYu-Wen ChangJin-Shyang Lin
    • F16C39/06H02K7/09
    • F16C32/044
    • This invention provides a geometrical structure configuration of maglev forces in a maglev rotational bearing apparatus. The bearing apparatus uses the magnetic forces as the suspension support for the rotational shaft, and utilizes a radial maglev support module to provide two maglev constraint forces perpendicular to and crossing on the axis of rotating shaft and an axial maglev support module to provide three maglev constraint forces parallel to the axis but non-coplanar. From the viewpoint of kinematical geometry, this machine has five linearly independent constraint forces so that the main axis is allowed to be suspended without contact and friction with static elements, and the suspension force in axial direction is better than currently available maglev bearings. The rotational shaft can be driven by a motor to perform high-speed rotational motion with noises free and vibrations free. This technique can be applied to high-speed rotational machines such as turbo molecular vacuum pumps, the spindle of high-speed machine tools, inertial gyroscopes, etc.
    • 本发明提供磁悬浮转动轴承装置中的磁浮力的几何结构构造。 轴承装置使用磁力作为旋转轴的悬架支撑件,并且利用径向磁悬浮支撑模块来提供垂直于并且与旋转轴的轴线交叉的两个磁悬浮约束力和一个轴向磁悬浮支撑模块,以提供三个磁悬浮约束 力平行于轴线而非共面。 从运动学几何学的角度来看,该机具有五个线性独立的约束力,使主轴允许悬挂而不与静态元件接触和摩擦,轴向悬架力优于目前可用的磁悬浮轴承。 旋转轴可以由电机驱动,以便无噪音,无振动地进行高速旋转运动。 该技术可应用于高速旋转机械,如涡轮分子真空泵,高速机床主轴,惯性陀螺仪等。