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    • 5. 发明授权
    • Apparatus for ion implantation including contactless cooling and beam
current measurement means
    • 用于离子注入的装置,包括非接触式冷却和束电流测量装置
    • US5338940A
    • 1994-08-16
    • US917208
    • 1992-07-21
    • Kunihiko Takeyama
    • Kunihiko Takeyama
    • H01J37/317H01J37/30G21K5/08
    • H01J37/3171H01J2237/2001H01J2237/20257H01J2237/31703
    • Wafer disk holds wafers in position by centrifugal force and its rotating shaft is supported by a bearing capable of magnetic levitation that has a thrust bearing and radial bearings. An annular groove providing a heat radiating zone is formed under the wafer receiving faces of the wafer disk. A cooling plate cooled to a temperature not exceeding the temperature of liquid nitrogen is inserted into the groove in a contactless manner so that the wafer disk is cooled by heat radiation. In the absence of any area of physical contact in the mechanisms for axially supporting and cooling the wafer disk, ions can be implanted in low dose into wafers on the fast rotating disk while improving the quality of wafers after implantation. Further, no triboelectricity will develop, thereby contributing to an improvement in the precision of ion beam current measurement.
    • 晶圆盘通过离心力将晶片保持在适当位置,其旋转轴由具有推力轴承和径向轴承的磁悬浮轴承支撑。 在晶片盘的晶片接收面的下方形成设置散热区的环状槽。 将冷却至不超过液氮温度的冷却板以非接触的方式插入槽中,从而通过热辐射冷却晶片盘。 在用于轴向支撑和冷却晶片盘的机构中没有任何物理接触区域的情况下,可以将离子以低剂量注入快速旋转盘上的晶片中,同时改善植入后晶片的质量。 此外,不会产生摩擦电,从而有助于提高离子束电流测量的精度。
    • 10. 发明授权
    • Tripeptide derivatives
    • US4826814A
    • 1989-05-02
    • US046189
    • 1987-05-05
    • Tadahiro SawayamaMasatoshi TsukamotoTakashi SasagawaKazuya NishimuraKanoo HosokiKunihiko Takeyama
    • Tadahiro SawayamaMasatoshi TsukamotoTakashi SasagawaKazuya NishimuraKanoo HosokiKunihiko Takeyama
    • A61K38/00A61K38/05A61K38/06A61K38/55A61P9/00A61P9/12A61P43/00C07K1/02C07K1/113C07K5/02C07K5/06C07K5/068C07K5/08C07K14/81A61K37/43
    • C07K5/06086C07K5/0215A61K38/00
    • There are provided tripeptide compounds represented by the following formula ##STR1## wherein R.sub.1 represents a C.sub.1-10 alkyl group, a C.sub.4-7 cycloalkyl or C.sub.5-7 cycloalkyl-lower alkyl group, a phenyl or phenyl-lower alkyl group in which the benzene ring may optionally be substituted by a substituent selected from halogen, lower alkyl, lower alkoxy, phenyl, methylenedioxy, ethylenedioxy, amino, di(lower alkyl)amino and hydroxy, a naphthyl or naphthyl-lower alkyl group in which the naphthalene ring may optionally be substituted by a substituent selected from halogen, lower alkyl, lower alkoxy and hydroxy, a heterocyclic or heterocyclic-lower alkyl group in which the heterocycle is a saturated or unsaturated 5- or 6-membered ring containing a nitrogen, oxygen or sulfur atom as the hetero atom, and may optionally be substituted by a substituent selected from halogen, lower alkyl, lower alkoxy, amino, di(lower alkyl)amino, hydroxy, oxo and saturated 5- or 6-membered nitrogen-containing heterocyclic group, and further may optionally be fused to a benzene ring, or an imidazolylvinyl group; R.sub.2 represents a hydrogen atom, a C.sub.1-10 alkyl group or a benzyl group; R.sub.3 represents a group of the formula ##STR2## represents a benzene, cyclopentane or cyclohexane ring, R.sub.4 represents a hydrogen atom, a C.sub.1-10 alkyl group or a benzyl group, p is 0 or 1, q is 1, 2, or 3, and X represents a phenyl group which may optionally be substituted by a substituent selected from halogen, lower alkoxy and hydroxy, a C.sub.4-8 cycloalkyl group, or a C.sub.5-7 cycloalkyl group which is fused to a benzene, and Y represents a hydrogen atom or a lower alkyl group, or X and Y, together with the nitrogen and carbon atoms to which they are bonded, forms a 5- or 6-membered heterocycle which may contain a nitrogen, oxygen or sulfur atom,W represents a single bond, --O-- or --NH--, T represents a single bond, ##STR3## and m is 2 or 3, or salts thereof and processes for production thereof. The compounds are useful as antihypertensive agents.