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1. 发明申请

US20100148241A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：半导体器件及其制造方法
公开(公告)号：US20100148241A1
公开(公告)日：2010-06-17
申请号：US12630296
申请日：2009-12-03
申请人： Koji AKIYAMA , Hirokazu HIGASHIJIMA , Tetsushi OZAKI , Tetsuya SHIBATA
发明人： Koji AKIYAMA , Hirokazu HIGASHIJIMA , Tetsushi OZAKI , Tetsuya SHIBATA
IPC分类号： H01L29/792 , H01L21/336
CPC分类号： H01L27/11568 , H01L21/28282 , H01L29/792
摘要： The semiconductor device has a stacked structure in which a tunnel oxide layer, a charge trapping layer, a blocking oxide layer, and a gate electrode are sequentially formed on a silicon substrate, wherein the blocking oxide layer includes a crystalline layer disposed adjacent to the charge trapping layer and an amorphous layer disposed adjacent to the gate electrode.
摘要翻译：半导体器件具有其中在硅衬底上依次形成隧道氧化物层，电荷俘获层，阻挡氧化物层和栅电极的堆叠结构，其中阻挡氧化物层包括邻近电荷设置的晶体层捕获层和邻近栅电极设置的非晶层。

2. 发明申请

US20120309207A1 FABRICATION METHOD OF SEMICONDUCTOR DEVICE 有权
标题翻译：半导体器件的制造方法
公开(公告)号：US20120309207A1
公开(公告)日：2012-12-06
申请号：US13473817
申请日：2012-05-17
申请人： Koji AKIYAMA , Hirokazu Higashijima , Yoshitsugu Tanaka , Yasushi Akasaka , Koji Yamashita
发明人： Koji AKIYAMA , Hirokazu Higashijima , Yoshitsugu Tanaka , Yasushi Akasaka , Koji Yamashita
IPC分类号： H01L21/31
CPC分类号： H01L21/3105 , H01L21/02178 , H01L21/02181 , H01L21/26566 , H01L21/28185 , H01L29/517
摘要： A disclosed fabrication method of a semiconductor device includes steps of depositing a dielectric film on a semiconductor substrate; thermally treating the dielectric film; and irradiating an ionized gas cluster onto the thermally treated dielectric film.
摘要翻译：公开的半导体器件的制造方法包括以下步骤：在半导体衬底上沉积电介质膜; 对电介质膜进行热处理; 并将电离气体簇照射到热处理的电介质膜上。

3. 发明申请

US20060238098A1 CATHODE RAY TUBE AND IMAGE DISPLAY APPARATUS USING THE SAME 审中-公开
标题翻译： CATHODE RAY TUBE和图像显示装置使用它
公开(公告)号：US20060238098A1
公开(公告)日：2006-10-26
申请号：US11275702
申请日：2006-01-25
申请人： Koji AKIYAMA , Hideo KUROKAWA , Michiaki WATANABE , Toshifumi NAKATANI
发明人： Koji AKIYAMA , Hideo KUROKAWA , Michiaki WATANABE , Toshifumi NAKATANI
IPC分类号： H01J29/80 , H01J29/02
CPC分类号： H01J29/073 , H01J2229/0716 , H01J2229/0744
摘要： A cathode ray tube includes an electron gun for emitting at least one electron beam; a mask frame include a mask having a plurality of holes or slits for allowing the electron beam to be transmitted therethrough and a frame to which the mask is attached; and a panel including a phosphor layer to be scanned by the at least one electron beam transmitted through the plurality of holes or slits of the mask. The panel includes a plurality of stud pins for supporting the frame. The frame includes a plurality of elastic supports engaged with the plurality of stud pins. At least one of the plurality of elastic supports includes an engagement portion having an engaging hole which is engaged with one of the plurality of the stud pins and an elastic portion in contact with the one stud pin. Mask frame vibration causes the elastic portion to rub against a respective stud pin so as to generate a frictional force for attenuating the vibration of the mask frame.
摘要翻译：阴极射线管包括用于发射至少一个电子束的电子枪; 掩模框架包括具有用于允许电子束透过的多个孔或狭缝的掩模和附着有掩模的框架; 以及包括由透过所述掩模的所述多个孔或狭缝的所述至少一个电子束扫描的荧光体层的面板。面板包括用于支撑框架的多个螺柱销。框架包括与多个螺柱销接合的多个弹性支撑件。所述多个弹性支撑体中的至少一个包括具有接合孔的接合部分，所述接合孔与所述多个所述螺柱销中的一个接合，以及与所述一个螺柱销接触的弹性部分。面罩框架振动使得弹性部分摩擦相应的柱销，从而产生用于衰减面罩框架的振动的摩擦力。

4. 发明申请

US20120244721A1 FILM FORMING METHOD, FILM FORMING APPARATUS, AND STORAGE MEDIUM 有权
标题翻译：薄膜成型方法，薄膜成型装置和储存介质
公开(公告)号：US20120244721A1
公开(公告)日：2012-09-27
申请号：US13429742
申请日：2012-03-26
申请人： Yuichiro MOROZUMI , Takuya SUGAWARA , Koji AKIYAMA , Shingo HISHIYA , Toshiyuki HIROTA , Takakazu KIYOMURA
发明人： Yuichiro MOROZUMI , Takuya SUGAWARA , Koji AKIYAMA , Shingo HISHIYA , Toshiyuki HIROTA , Takakazu KIYOMURA
IPC分类号： H01L21/31 , C23C16/455 , C23C16/52
CPC分类号： H01L21/02189 , C23C16/18 , C23C16/405 , C23C16/45529 , H01L21/02186 , H01L21/022 , H01L21/0228 , H01L28/40 , H01L29/66181
摘要： A method of forming a dielectric film including a zirconium oxide film includes: forming a zirconium oxide film on a substrate to be processed by supplying a zirconium material and an oxidant, the zirconium material including a Zr compound which includes a cyclopentadienyl ring in a structure, and forming a titanium oxide film on the zirconium oxide film by supplying a titanium material and an oxidant, the titanium material including a Ti compound which includes a cyclopentadienyl ring in a structure.
摘要翻译：形成包括氧化锆膜的电介质膜的方法包括：通过提供锆材料和氧化剂在待处理的基板上形成氧化锆膜，所述锆材料包括包含结构中的环戊二烯基环的Zr化合物，并且通过供给钛材料和氧化剂在氧化锆膜上形成氧化钛膜，所述钛材料包括结构中包含环戊二烯基环的Ti化合物。

5. 发明申请

US20100065927A1 SEMICONDUCTOR DEVICE AND FABRICATION METHOD OF THE SAME 失效
标题翻译：半导体器件及其制造方法
公开(公告)号：US20100065927A1
公开(公告)日：2010-03-18
申请号：US12401772
申请日：2009-03-11
申请人： Koji AKIYAMA , Wenwu WANG
发明人： Koji AKIYAMA , Wenwu WANG
IPC分类号： H01L29/78 , H01L21/31
CPC分类号： H01L29/517 , H01L21/28194 , H01L29/495 , H01L29/513 , H01L29/78
摘要： A disclosed semiconductor device includes a gate insulation film formed on a silicon substrate and a metal gate electrode formed in the gate insulation film, wherein the gate insulation film includes a first insulation film, a second insulation film that is formed on the first insulation film and has a greater dielectric constant than the first insulation film, and a third insulation film formed on the second insulation film.
摘要翻译：所公开的半导体器件包括形成在硅衬底上的栅极绝缘膜和形成在栅极绝缘膜中的金属栅电极，其中栅极绝缘膜包括第一绝缘膜，形成在第一绝缘膜上的第二绝缘膜和具有比第一绝缘膜更大的介电常数和形成在第二绝缘膜上的第三绝缘膜。

6. 发明申请

US20060238099A1 CATHODE RAY TUBE AND IMAGE DISPLAY APPARATUS USING THE SAME 审中-公开
公开(公告)号：US20060238099A1
公开(公告)日：2006-10-26
申请号：US11275708
申请日：2006-01-25
申请人： Koji AKIYAMA , Hideo KUROKAWA , Michiaki WATANABE , Toshifumi NAKATANI
发明人： Koji AKIYAMA , Hideo KUROKAWA , Michiaki WATANABE , Toshifumi NAKATANI
IPC分类号： H01J29/80
CPC分类号： H01J29/073 , H01J2229/0716 , H01J2229/0744
摘要： A cathode ray tube includes an electron gun for emitting at least one electron beam; a mask frame include a mask having a plurality of holes or slits for allowing the electron beam to be transmitted therethrough and a frame to which the mask is attached; and a panel including a phosphor layer to be scanned by the at least one electron beam transmitted through the plurality of holes or slits of the mask. The panel includes a plurality of stud pins for supporting the frame. The frame includes a plurality of elastic supports engaged with the plurality of stud pins. At least one of the plurality of elastic supports includes an engagement portion having an engaging hole which is engaged with one of the plurality of the stud pins and an elastic portion in contact with the one stud pin. Mask frame vibration causes the elastic portion to rub against a respective stud pin so as to generate a frictional force for attenuating the vibration of the mask frame.

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